Advanced Motion Control for Next-Generation Precision Mechatronics
Dr. Tom Oomen received the M.Sc. degree (cum laude) and Ph.D. degree from the Eindhoven University of Technology, Eindhoven, The Netherlands. He held visiting positions at KTH, Stockholm, Sweden, and at The University of Newcastle, Australia. Presently, he is an assistant professor with the Department of Mechanical Engineering at the Eindhoven University of Technology. He is a recipient of the Corus Young Talent Graduation Award and the 2015 IEEE Transactions on Control Systems Technology Outstanding Paper Award. He is Associate Editor on the IEEE Conference Editorial Board and IFAC Mechatronics. His research interests are in the field of system identification, robust control, and learning control, with applications in mechatronic systems.
Manufacturing equipment and scientific instruments, including wafer scanners, printing systems, and microscopes, require precise and fast motions. Increasing requirements necessitate new lightweight system designs and enhanced control performance. These next-generation motion systems raise new challenges for advanced motion control. In particular, flexible mechanics need to be explicitly addressed, e.g., through overactuation, oversensing, inferential control, and position-dependent control. This in turn necessitates and justifies improved model quality compared to the state-of-the-art. New user-friendly, data-driven modeling techniques are developed, which directly deliver control-relevant models. In addition, numerically reliable algorithms are developed to deal with the high dimensionality and model complexity. Furthermore, the model is complemented with a robust-control-relevant uncertainty description, enabling high-performance robust control design. The feedback design is complemented with advanced feedforward control techniques, including learning control and machine-in-the-loop tuning of feedforward control parameters.