| Title |
Author |
Page |
Extended Summary |
| Development of Active Bending Electric Endoscope Using Shape Memory Alloy for Disposable and Thin Endoscope | W. Makishi, M. Ikeda, M. Esashi, T. Matsunaga, & Y. Haga | 102 |  |
| Electromagnetically Driven Dual-axis Tilting MEMS Grating for Near Infrared Spectroscopy | Y. Watanabe, Y. Takahashi, Y. Abe, S. Iwamatsu, T. Yahagi, S. Kobayashi,
S. Konno, & T. Sato | 111 |  |
| Development of Hydrogen Gas Sensors Using Quartz Resonator | H. Oigawa, D. Yamazaki, & T. Ueda | 117 |  |
| Etching Technology Using Ozone for Chemically Stable Polymer in MEMS | H. Yanagida, S. Yoshida, M. Esashi, & S. Tanaka | 122 |  |
|