Preface to "Process Technologies" : Reviews

..............T. Tsuchiya 1

Basics of Resist Process

..............M. Sasaki 2

Silicon Oxide Sacrificial Etching Technology

..............H. Toshiyoshi 8

Technological History of Silicon Dry Etching Process

..............J. Ohara & Y. Takeuchi 14

Development Trend of Three-Dimensional (3D) Integration Technology

..............K. Sakuma 19

Evaluation for Electrochemical Impedance Measurement of Carbon Nanotube Taste Sensor

..............N. Takeda, T. Hirata, & M. Akiya 26

Equivalent RF Circuit Model on Fluid MEMS Capacitors

..............K. Ishida, K. Kitamura, T. Furutsuka, & K. Suzuki 35

Proposal of High-Density Packaging Construction and Conductive Pattern Forming Method on Vertical Wall Using Spray Coating Technology

..............H. Morii, F. Oohira, T. Suzuki, K. Terao, M. Sasaki,
T. Ochi, A. Yuzuriha, & K. Wani 40

Development of Fall Detection System Using Ultrasound Sensors

..............T. Tajima, T. Abe, & H. Kimura 45

Liquid Crystal Device with a Variable Focal Length by Using Two Different Ring Electrodes

..............M. Kawamura & Y. Ito 53

Measurement of Electrophoretic Mobility of Human Promyelocytic Leukemia Cell Lines (HL60) During Neutrophil Differentiation Using On-Chip Cell Electrophoresis

..............R. Matsuhashi, T. Akagi, & T. Ichiki 65

Infrared Radiation Image Sensor with Function of Vacuum Pressure Detection

..............K. Ishii, H. Funaki, H. Yagi, I. Fujiwara, K. Suzuki, & H. Honda 70

Research of Novel Benzene Vapor Sensor and Theoretical Model

..............H. Guo & X. Chen 75

Improvement of Reliability of SOI Electrostatic Tilt Mirror by Using Landing Island Structure

..............K. Isamoto, M. Tei, H. Fujita, & H. Toshiyoshi 81

A Photo-ionization VOCs Sensor Developed the Resistance to Contamination of Electrode Surface

..............Y. Hirano, E. Kazawa, Y. Haramoto, & H. Yoshida 88

Current Trends in Wireless Sensor Network

..............K. Imanaka & S. Sasaki 97

Development of Active Bending Electric Endoscope Using Shape Memory Alloy for Disposable and Thin Endoscope

..............W. Makishi, M. Ikeda, M. Esashi, T. Matsunaga, & Y. Haga 102

Electromagnetically Driven Dual-axis Tilting MEMS Grating for Near Infrared Spectroscopy

..............Y. Watanabe, Y. Takahashi, Y. Abe, S. Iwamatsu,
T. Yahagi, S. Kobayashi, S. Konno, & T. Sato 111

Development of Hydrogen Gas Sensors Using Quartz Resonator

..............H. Oigawa, D. Yamazaki, & T. Ueda 117

Etching Technology Using Ozone for Chemically Stable Polymer in MEMS

..............H. Yanagida, S. Yoshida, M. Esashi, & S. Tanaka 122

A Built-in Vibration Sensor Using Arc-Discharged Reactive Ion Plated PZT

..............U. Baran, M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, & H. Toshiyoshi 128

A Fabrication Process of MEMS Coplanar Waveguides Using a Thick Plated Gold Layer as DRIE Mask

..............D. Yamane, Y. Yi, H. Fujita, & H. Toshiyoshi 130

An Optimal Design of Epidermal Ridges to the Tactile Sensor for Sensitivity Enhancement during Shear Force Detection

..............Y. Zhang & N. Miki 141

Investigation on the Hydrogen Gas Sensor Based on Exothermicity Reaction by Hydrogen Absorption into the Pd Film

..............N. Takashima & M. Kimura 148

Observation of Winking Phenomenon in Ring Laser Gyroscope with a Semiconductor Optical Amplifier

..............T. Hashimoto, K. Makimura, K. Kanda, T. Fujita, & K. Maenaka 154

Direct Bonding between Silicone and Glass by Atmospheric-Pressure Surface Modification

..............W. Okada & T. Yamamoto 159