JAN FEB MAR APR MAY JUN JUL AUG SEP OCT NOV DEC

JANUARY 2010 Volume 130-E Number 1

Title Author Page Extended Summary Droplet Transportation on a Wettability Gradient Surface Generated by Electrowetting-on-Dielectric K. Imamura & T. Yasuda 1 A Simple Wireless Intra-Oral Thermometry - A Denture with a CMOS Chip- T. Ishikawa, T. Kunimasa, N. Sasaki, Y. Murakami, T. Yoshida, & K. Tsuga 6 Urea Monitor Based on Chemiluminescence and Electrolysis as a Marker for Dialysis Efficiency M. Ozaki, T. Okabayashi, T. Ishimaru, K. Hayashi, J. Hori, I. Yamamoto, & M. Nakagawa 11 Real-Time Vibration Amplitude/Phase Imager Using White-Light Interferometer and Correlation Image Sensor S. Sato, T. Kurihara, & S. Ando 17

FEBRUARY 2010 Volume 130-E Number 2

Title Author Page Extended Summary Device Structure of Low Coordinate Distortion Touch Panel Sensor Using Resistive Films with Electromagnetic Wave Shield Effect N. Harada, R. Kawakami, & T. Yoneda 31 Fire Detection Using Tin Oxide Gas Sensors Installed in an Indoor Space S. Shibata, T. Higashino, A. Sawada, T. Oyabu, Y. Takei, H. Nanto, & K. Toko 38 Development of a Micro-Fluidic Device for Generating Concentration Gradient in the Flow Direction Using Diffusive Mixing of Droplets S. Uzawa, K. Ariga, & N. Miki 44 Development of an Electrical-Type Distributed Hydrogen Gas Sensor Using Pt/WO3 Thin Film for Detection of Leakage Locations S. Okazaki & S. Yamashita 53

MARCH 2010 Volume 130-E Number 3

Title Author Page Extended Summary Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques D. Yamazaki & T. Ueda 65 Study on Operation Mechanisms of Semiconducting Thin-Film Gas Sensors by Hall-Effect Measurements D. Uemura & K. Hara 69 Semiconducting Thin-Film Sensors for Detection of Polluting Gases and Floating Particles T. Yokoyama & K. Hara 75 Development of High Reliability and High Accuracy Micro Airflow Sensor for Automobile M. Matsumoto, M. Yamada, H. Nakano, R. Minamitani, I. Watanabe, K. Hanzawa, & S. Shimada 80 Dual Axis Light Sensor for Tracking Sun M. Shibata & T. Tambo 86 Antireflection Subwavelength Gratings at Near-Infrared Wavelengths Fabricated by Self-Organized Nanoparticles Y. Kanamori, S. Haida, & K. Hane 92

APRIL 2010 Volume 130-E Number 4

Title Author Page Extended Summary Electromagnetically Driven 2-axis Optical Beam Steering MEMS Mirror and Its Dependence of Actuation on Magnetic Field Y. Watanabe, Y. Abe, S. Iwamatsu, S. Kobayashi, Y. Takahashi, & T. Sato 107 Development for 2-axis Electromagnetic Driving MEMS Mirror A. Iizuka, S. Choe, J. Hashizume, Y. Itou, & R. Okada 113 Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS M. Fujita, Y. Izawa, Y. Tsurumi, S. Tanaka, H. Fukushi, K. Sueda, Y. Nakata, M. Esashi, & N. Miyanaga 118 Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements K. Kanda, Y. Iga, J. Matsuoka, T. Fujita, K. Higuchi, & K. Maenaka 124 Freely Expandable Single Crystalline Si Networks for MEMS Applications Y. Takahashi, T. Kosugi, S. Tomioka, K. Suzuki, & Y. Nishioka 130

MAY 2010 Volume 130-E Number 5

Title Author Page Extended Summary Realization of MEMS - IC Vertical Integration Utilizing Smart Bumpless Bonding M. Shiozaki, M. Moriguchi, S. Sasaki, & M. Oba 152 One-chip Integrated Module of MEMS Shock Sensor and Sensing Amplifier LSI Using Pseudo-SOC Technology A. Iida, Y. Onozuka, M. Nishigaki, H. Yamada, H. Funaki, & K. Itaya 157 RF-MEMS Switch Using Carbon Nanotube Composite Gold Electroplating S. Izuo, Y. Yoshida, S. Soda, S. Ogawa, S. S. Lee, Y. Sakai, & H. Fukumoto 165 Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible "Back-end-of-line MEMS Processes" T. Fujimori, H. Takano, Y. Hanaoka, & Y. Goto 170 Tunable Laser Using Silicon MEMS Mirror T. Watanabe, T. Hirata, N. Kanbara, N. Fujimura, T. Yano, S. Tezuka, H. Saitou, M. Ooyama, & R. Noda 176 Fabrication of Three Dimensional Silicon Slopes Using Mask with Square Openings Y. Takei, T. Ohori, T. Takahata, T. Kan, E. Iwase, K. Matsumoto, & I. Shimoyama 182 Self-alignment Method on a Temperature-Controlled Transfer E. Iwase, H. Onoe, A. Nakai, K. Matsumoto, & I. Shimoyama 188 MEMS-LSI Integrated Microchip Using Pseudo-SoC Technology H. Funaki, K. Itaya, H. Yamada, Y. Onozuka, & A. Iida 194

JUNE 2010 Volume 130-E Number 6

Title Author Page Extended Summary Micro Gas Preconcentrator Made of a Film of Single-Walled Carbon Nanotubes S. Takada, T. Nakai, T. Thurakitseree, J. Shiomi, S. Maruyama, H. Takagi, M. Shuzo, J. J. Delaunay, & I. Yamada 207 Vacuum-Packaging Technology for IRFPAs T. Matsumura, T. Tokuda, A. Tsutinaga, M. Kimata, H. Abe, & N. Tokashiki 212 Structural Properties of Si Films Deposited by Plasma Enhanced Chemical Transport T. Murakami, Y. Yoshida, Y. Yokoyama, & T. Itoh 219 Fabrication and Basic Characteristics of Multiaxial Tactile Sensor with 3 Cantilevers H. Tachibana, S. Kamanaru, T. Mima, M. Sohgawa, T. Kanashima,M. Okuyama, K. Yamashita, M. Noda, H. Noma, & M. Higuchi 223 Ultralow-Energy Wireless Smart-Scales System with Micropower Generator K. Kitamura, H. Yano, M. Mochizuki, T. Takano, H. Yamauchi, & T. Douseki 230 Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-Level Integration of Acoustic Devices and LSI K. D. Park, M. Esashi, & S. Tanaka 236 Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure R. Amarasinghe, D. V. Dao, & S. Sugiyama 242 Multi-Step Operation of Piezoelectric RF-MEMS Tunable Capacitor M. Nishigaki, T. Nagano, H. Ono, T. Kawakubo, & K. Itaya 247

JULY 2010 Volume 130-E Number 7

Title Author Page Extended Summary Surface Plasmon Resonance Based Sensitive Immunosensor for Benzaldehyde Detection T. Onodera, T. Shimizu, N. Miura, K. Matsumoto, & K. Toko 269 Design and Fabrication of High-Sensitive Chemical Sensor System with Preconcentration and Analysis Functions Employing a Micro Cantilever T. Mihara, T. Ikehara, M. Konno, R. Maeda, M. Kimura, & T. Fukawa 275 Fabrication of Odor Sensor Using Peptide Y. Hotokebuchi, K. Hayashi, K. Toko, R. Chen, & H. Ikezaki 282 A Study on Electrostatic Tuning of Resonant Frequency for SOI-MEMS Resonators K. Mizuguchi & H. Muro 288 Mixing Speed and Temperature-Controlled Microreactor for Gold Nanoparticle Synthesis K. Sugano, Y. Uchida, T. Tsuchiya, & O. Tabata 292 Development of a Wireless Remote Controller System Using Optical Sensors with Large Area Consisting of Frosted Glass Y. Kitazono, S. Nakashima, L. Zhang, & S. Serikawa 300 Analysis of the Characteristics of a Rotary Stepper Micromotor J. Sone, T. Mizuma, M. Masunaga, S. Mochizuki, E. Sarajic, C. Yamahata, & H. Fujita 310 Hydrogen Sensing with a Rectangular Lattice of Sub-Wavelength Holes in Palladium S. Mikuriya, E. Maeda, M. Shuzo, I. Yamada, & J. J. Delaunay 317 The Pull-in Phenomenon of the Microstructure on which the Surface Tension Acts, and its Analytic Solution S. Tezuka 321 A Far-Infrared Sensor with a Subwavelength Structured Absorber Y. Ohta, Y. Arakawa, T. Fukumoto, Y. Fukuyama, & M. Hirota 327

AUGUST 2010 Volume 130-E Number 8

Title Author Page Extended Summary Au-Electrode-Embedded Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding H. Shinohara, J. Mizuno, & S. Shoji 347 Electrophoretic Separation-Mass Spectrometric Detection on Polymer Microchip Directly Integrated with a Nanospray Tip F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, & S. Shoji 351 Experimental Analysis and Characterization on Thermal Imprint Process via In-situ Observation T. Saito, T. Kawaguchi, & I. Satoh 356 Fabrication Process for Large Size Mold and Alignment Method for Nanoimprint System K. Ishibashi, M. Kokubo, H. Goto, J. Mizuno, & S. Shoji 363 Room-Temperature Bonding of GaN to Al Using Ar-Beam Surface Activation E. Higurashi, A. Kaneko, M. Akaike, & T. Suga 369 Ultra Compact Optical RGB Multiplexer for Pocket Projector Applied Development of the Micro-Molding Processing T. Sano, M. Harumoto, T. Shimazu, Y. Iyoda, & A. Inoue 373 Fabrication of a Valveless Micropump with Polyimide Membrane Y. Liu, S. Matsuno, H. Komatsuzaki, S. Imai, & Y. Nishioka 378 Underfill Parameter Optimization Study for Mobile Products with Numerical Analysis T. Nakanishi, Y. Shundoh, & T. Kuboyama 383 Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration S. Ueki, Y. Nishimori, H. Imamoto, T. Kubota, M. Sugiyama, S. Samukawa, & G. Hashiguchi 388 Patterning PEDOT:PSS with Parylene Peel-off Method S. Takamatsu, T. Takahata, K. Matsumoto, & I. Shimoyama 394 Evaluation of the Sensitivity of Hydrogen Sensors Covered with Polytetrafluoroethylene as a Protective Membrane for Humidity K. Fujii, H. Inoue, T. Yamaguchi, T. Kiwa, & K. Tsukada 401 Development and Evaluation of a Pt/Ti-FET-Type Hydrogen Sensor M. Kariya, K. Mizuhara, T. Yamaguchi, T. Kiwa, S. Kunitsugu, & K. Tsukada 407 Development of a MEMS Gas Flow Sensor Unified with an Impurity-Gas Concentration Sensor Y. Abe, J. Kosaka, T. Ohe, S. Ishihara, & M. Kimura 412

SEPTEMBER 2010 Volume 130-E Number 9

Title Author Page Extended Summary Evaluation and Application of Resist for Alkaline Wet Etching T. Takahashi, M. Makihata, M. Esashi, & S. Tanaka 421 Effects of Anisotropy of Single Crystal Silicon on the Vibration Properties of Disk-Type MEMS Resonators S. Murakami, M. Konno, T. Ikehara, R. Maeda, & T. Mihara 426 Detecting Frequency of Quartz Crystal Microbalance Sensors with High Resolution S. Ogawa, M. Seyama, & H. Kuwano 431 Copper-Filled Through-Hole Electrode of a ZnS Window Material for Sealing a Thermal Infrared Sensor T. Fukumoto, N. Okamoto, Y. Ohta, Y. Fukuyama, M. Hirota, & K. Kondo 437 Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, & O. Tabata 443

OCTOBER 2010 Volume 130-E Number 10

Title Author Page Extended Summary Dynamic Microarray Devices for the Observation of Paired Different Types of Beads T. Teshima, H. Ishihara, K. Iwai, A. Adachi, & S. Takeuchi 465 Development of an Easy and High-Throughput Cell Assay System with a Culture Chip and an Assay Chip K. Sugiura, N. Kaji, Y. Okamoto, M. Tokeshi, & Y. Baba 471 On-chip Glucose Sensor for Online Measurement of Cell Activities H. Kimura, Y. Shono, N. Pereira-Rodrigues, T. Yamamoto, Y. Sakai, & T. Fujii 476 Deliberation of Effect to Glass Imprinting Analysis by Williams-Landel-Ferry Equation M. Yasui, M. Arai, M. Takahashi, H. Ito, T. Ino, S. Kaneko, Y. Hirabayashi, & R. Maeda 484 Study of AC Drive Type Fluid-Based Resistive Inclination Sensor H. Kawano & Y. Matsumoto 489 Light Sensor System Measuring Declination and Orientation T. Tambo, Y. Miyamoto, S. Sakashita, & M. Shibata 495

NOVEMBER 2010 Volume 130-E Number 11

Title Author Page Extended Summary Passive Dew Droplet Removal from Hydrogen Sensors for Fuel Cell Applications M. Kano, M. Ishii, H. Yoshinaga, M. Esashi, & S. Tanaka 517 Stress Control of AlN Thin Film Sputter-Deposited Using ECR Plasma R. Hino, T. Matsumura, M. Esashi, & S. Tanaka 523 An Analytic Solution of the Approximate Governing Equation of the Electrostatically Actuated Structures in Systems with One Degree of Freedom Involving the Second Order Displacement Terms S. Tezuka 528 Study of Water Detecting Sensor in Insulated Gas of GIS/GCB Elctrochemical Sensor Using Ttriethlenediaminesulfate as Electrolyte M. Kamei, C. Nishida, S. Yamauchi, M. Miyayama, & O. Takai 531 Study on a Phased-Array Antenna with MEMS Switches K. Suzuki, H. Ado, K. Yagi, T. Furutsuka, & K. Suzuki 537 Application for Antigen - Antibody Sensor Using Carbon Nanotubes Y. Funada, T. Hirata, & M. Akiya 543

DECEMBER 2010 Volume 130-E Number 12

Title Author Page Extended Summary Encapsulation Method of Glucose Oxidase Solution with Ionic Liquid Solvent and Direct Parylene Deposition S. Takamatsu, H. Takano, N. Binh-Khiem, E. Iwase, K. Matsumoto, & I. Shimoyama 562 Fundamental Experiment in Real-time Strain Measurement of Multipoint Fiber Bragg Grating using Optical Frequency Sweeping Y. Shinoda, K. Nagai, & T. Higo 570 MEMS Micro-Mirror Array for Electrostatic Field Distribution Measurement System T. Kuriyama, T. Aoi, H. Maeda, T. Itoh, Y. Ueno, T. Nakaie, N. Matsui, & H. Okumura 575 Development of a Patch-Type Cardiography Monitoring System for Human Healthcare H. Hamada, Y. Jiang, Y. Iga, S. Okochi, K. Kanda, T. Fujita, K. Higuchi, & K. Maenaka 580 Development of a Magnetic Beads Quantitative Detection System for Fast Diagnosis Y. Yamamoto, T. Morishita, K. Matsuyama, K. Takasa, & I. Shibasaki 584

	Adobe(R) Acrobat(R) Reader is needed to view, navigate, and print PDF files. If you want to get the Acrobat Reader software, click the "Download" button please