Droplet Transportation on a Wettability Gradient Surface Generated by Electrowetting-on-Dielectric

..............K. Imamura & T. Yasuda 1

A Simple Wireless Intra-Oral Thermometry - A Denture with a CMOS Chip-

..............T. Ishikawa, T. Kunimasa, N. Sasaki, Y. Murakami, T. Yoshida, & K. Tsuga 6

Urea Monitor Based on Chemiluminescence and Electrolysis as a Marker for Dialysis Efficiency

..............M. Ozaki, T. Okabayashi, T. Ishimaru, K. Hayashi,
J. Hori, I. Yamamoto, & M. Nakagawa 11

Real-Time Vibration Amplitude/Phase Imager Using White-Light Interferometer and Correlation Image Sensor

..............S. Sato, T. Kurihara, & S. Ando 17

Proposal of a Smile Sensor Using Light Reflected from a Cheek

..............S. Nakashima, Y. Kitazono, M. Miyauchi, & S. Serikawa 25

Device Structure of Low Coordinate Distortion Touch Panel Sensor Using Resistive Films with Electromagnetic Wave Shield Effect

..............N. Harada, R. Kawakami, & T. Yoneda 31

Fire Detection Using Tin Oxide Gas Sensors Installed in an Indoor Space

..............S. Shibata, T. Higashino, A. Sawada, T. Oyabu,
Y. Takei, H. Nanto, & K. Toko 38

Development of a Micro-Fluidic Device for Generating Concentration Gradient in the Flow Direction Using Diffusive Mixing of Droplets

..............S. Uzawa, K. Ariga, & N. Miki 44

Development of an Electrical-Type Distributed Hydrogen Gas Sensor Using Pt/WO3 Thin Film for Detection of Leakage Locations

..............S. Okazaki & S. Yamashita 53

Electrostatically Switchable Microprobe for Mass-Analysis Scanning Force Microscopy

..............C. Y. Shao, Y. Kawai, M. Esashi, & T. Ono 59

Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

..............D. Yamazaki & T. Ueda 65

Study on Operation Mechanisms of Semiconducting Thin-Film Gas Sensors by Hall-Effect Measurements

..............D. Uemura & K. Hara 69

Semiconducting Thin-Film Sensors for Detection of Polluting Gases and Floating Particles

..............T. Yokoyama & K. Hara 75

Development of High Reliability and High Accuracy Micro Airflow Sensor for Automobile

..............M. Matsumoto, M. Yamada, H. Nakano,
R. Minamitani, I. Watanabe, K. Hanzawa, & S. Shimada 80

Dual Axis Light Sensor for Tracking Sun

..............M. Shibata & T. Tambo 86

Antireflection Subwavelength Gratings at Near-Infrared Wavelengths Fabricated by Self-Organized Nanoparticles

Electromagnetically Driven 2-axis Optical Beam Steering MEMS Mirror and Its Dependence of Actuation on Magnetic Field

..............Y. Watanabe, Y. Abe, S. Iwamatsu, S. Kobayashi, Y. Takahashi, & T. Sato 107

Development for 2-axis Electromagnetic Driving MEMS Mirror

..............A. Iizuka, S. Choe, J. Hashizume, Y. Itou, & R. Okada 113

Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS

..............M. Fujita, Y. Izawa, Y. Tsurumi, S. Tanaka, H. Fukushi,
K. Sueda, Y. Nakata, M. Esashi, & N. Miyanaga 118

Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements

..............K. Kanda, Y. Iga, J. Matsuoka, T. Fujita, K. Higuchi, & K. Maenaka 124

Freely Expandable Single Crystalline Si Networks for MEMS Applications

..............Y. Takahashi, T. Kosugi, S. Tomioka, K. Suzuki, & Y. Nishioka 130

Magnetic Torque Driving 2D Micro Scanner with a Non-Resonant Large Scan Angle

..............W. Makishi, Y. Kawai, & M. Esashi 135

Detection Method of Three Events to Window and Key Using Light Sensor for Crime Prevention

..............A. Yamawaki, T. Katakami, Y. Kitazono, & S. Serikawa 137

Preface to the Special Issue on "Fine MEMS Project"

..............I. Shimoyama 145

Evaluation and Analysis of Physical Properties of Nanomaterials for Highly Sensitive Mechanical Sensing Devices

..............S. Sugiyama, T. Toriyama, K. Nakamura, & D. V. Dao 146

Realization of MEMS - IC Vertical Integration Utilizing Smart Bumpless Bonding

..............M. Shiozaki, M. Moriguchi, S. Sasaki, & M. Oba 152

One-chip Integrated Module of MEMS Shock Sensor and Sensing Amplifier LSI Using Pseudo-SOC Technology

..............A. Iida, Y. Onozuka, M. Nishigaki, H. Yamada, H. Funaki, & K. Itaya 157

RF-MEMS Switch Using Carbon Nanotube Composite Gold Electroplating

..............S. Izuo, Y. Yoshida, S. Soda, S. Ogawa,
S. S. Lee, Y. Sakai, & H. Fukumoto 165

Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible "Back-end-of-line MEMS Processes"

..............T. Fujimori, H. Takano, Y. Hanaoka, & Y. Goto 170

Tunable Laser Using Silicon MEMS Mirror

..............T. Watanabe, T. Hirata, N. Kanbara, N. Fujimura,
T. Yano, S. Tezuka, H. Saitou, M. Ooyama, & R. Noda 176

Fabrication of Three Dimensional Silicon Slopes Using Mask with Square Openings

..............Y. Takei, T. Ohori, T. Takahata, T. Kan, E. Iwase,
K. Matsumoto, & I. Shimoyama 182

Self-alignment Method on a Temperature-Controlled Transfer

..............E. Iwase, H. Onoe, A. Nakai, K. Matsumoto, & I. Shimoyama 188

MEMS-LSI Integrated Microchip Using Pseudo-SoC Technology

..............H. Funaki, K. Itaya, H. Yamada, Y. Onozuka, & A. Iida 194

Micro Gas Preconcentrator Made of a Film of Single-Walled Carbon Nanotubes

..............S. Takada, T. Nakai, T. Thurakitseree, J. Shiomi, S. Maruyama,
H. Takagi, M. Shuzo, J. J. Delaunay, & I. Yamada 207

Vacuum-Packaging Technology for IRFPAs

..............T. Matsumura, T. Tokuda, A. Tsutinaga,
M. Kimata, H. Abe, & N. Tokashiki 212

Structural Properties of Si Films Deposited by Plasma Enhanced Chemical Transport

..............T. Murakami, Y. Yoshida, Y. Yokoyama, & T. Itoh 219

Fabrication and Basic Characteristics of Multiaxial Tactile Sensor with 3 Cantilevers

..............H. Tachibana, S. Kamanaru, T. Mima, M. Sohgawa, T. Kanashima,
M. Okuyama, K. Yamashita, M. Noda, H. Noma, & M. Higuchi 223

Ultralow-Energy Wireless Smart-Scales System with Micropower Generator

..............K. Kitamura, H. Yano, M. Mochizuki, T. Takano,
H. Yamauchi, & T. Douseki 230

Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-Level Integration of Acoustic Devices and LSI

..............K. D. Park, M. Esashi, & S. Tanaka 236

Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure

..............R. Amarasinghe, D. V. Dao, & S. Sugiyama 242

Multi-Step Operation of Piezoelectric RF-MEMS Tunable Capacitor

..............M. Nishigaki, T. Nagano, H. Ono, T. Kawakubo, & K. Itaya 247

Cavity Ring-Down Characteristic Using Reflective Semiconductor Optical Amplifier

..............H. Tanimoto, T. Matuo, & Y. Maeda 253

Application of the Development in Environment Measurement and Sensibility Nano-Sensing

..............K. Noda & H. Aizawa, 261

Surface Plasmon Resonance Based Sensitive Immunosensor for Benzaldehyde Detection

..............T. Onodera, T. Shimizu, N. Miura, K. Matsumoto, & K. Toko 269

Design and Fabrication of High-Sensitive Chemical Sensor System with Preconcentration and Analysis Functions Employing a Micro Cantilever

..............T. Mihara, T. Ikehara, M. Konno, R. Maeda, M. Kimura, & T. Fukawa 275

Fabrication of Odor Sensor Using Peptide

..............Y. Hotokebuchi, K. Hayashi, K. Toko, R. Chen, & H. Ikezaki 282

A Study on Electrostatic Tuning of Resonant Frequency for SOI-MEMS Resonators

..............K. Mizuguchi & H. Muro 288

Mixing Speed and Temperature-Controlled Microreactor for Gold Nanoparticle Synthesis

..............K. Sugano, Y. Uchida, T. Tsuchiya, & O. Tabata 292

Development of a Wireless Remote Controller System Using Optical Sensors with Large Area Consisting of Frosted Glass

..............Y. Kitazono, S. Nakashima, L. Zhang, & S. Serikawa 300

Analysis of the Characteristics of a Rotary Stepper Micromotor

..............J. Sone, T. Mizuma, M. Masunaga, S. Mochizuki,
E. Sarajic, C. Yamahata, & H. Fujita 310

Hydrogen Sensing with a Rectangular Lattice of Sub-Wavelength Holes in Palladium

..............S. Mikuriya, E. Maeda, M. Shuzo, I. Yamada, & J. J. Delaunay 317

The Pull-in Phenomenon of the Microstructure on which the Surface Tension Acts, and its Analytic Solution

..............S. Tezuka 321

A Far-Infrared Sensor with a Subwavelength Structured Absorber

..............Y. Ohta, Y. Arakawa, T. Fukumoto, Y. Fukuyama, & M. Hirota 327

Micro Wishbone Interferometer for Miniature FTIR Spectrometer

..............Y. Lee, M. Toda, M. Esashi, & T. Ono 333

Study of Fluid-Based Resistance-type Four-direction Inclination Switch

..............T. Takizawa, H. Kawano, & Y. Matsumoto 335

Compound Nanoimprint Processes and Their Applications for Devices

..............J. Mizuno & H. Shinohara 343

Au-Electrode-Embedded Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding

..............H. Shinohara, J. Mizuno, & S. Shoji 347

Electrophoretic Separation-Mass Spectrometric Detection on Polymer Microchip Directly Integrated with a Nanospray Tip

..............F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, & S. Shoji 351

Experimental Analysis and Characterization on Thermal Imprint Process via In-situ Observation

..............T. Saito, T. Kawaguchi, & I. Satoh 356

Fabrication Process for Large Size Mold and Alignment Method for Nanoimprint System

..............K. Ishibashi, M. Kokubo, H. Goto, J. Mizuno, & S. Shoji 363

Room-Temperature Bonding of GaN to Al Using Ar-Beam Surface Activation

..............E. Higurashi, A. Kaneko, M. Akaike, & T. Suga 369

Ultra Compact Optical RGB Multiplexer for Pocket Projector Applied Development of the Micro-Molding Processing

..............T. Sano, M. Harumoto, T. Shimazu, Y. Iyoda, & A. Inoue 373

Fabrication of a Valveless Micropump with Polyimide Membrane

..............Y. Liu, S. Matsuno, H. Komatsuzaki, S. Imai, & Y. Nishioka 378

Underfill Parameter Optimization Study for Mobile Products with Numerical Analysis

..............T. Nakanishi, Y. Shundoh, & T. Kuboyama 383

Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration

..............S. Ueki, Y. Nishimori, H. Imamoto, T. Kubota,
M. Sugiyama, S. Samukawa, & G. Hashiguchi 388

Patterning PEDOT:PSS with Parylene Peel-off Method

..............S. Takamatsu, T. Takahata, K. Matsumoto, & I. Shimoyama 394

Evaluation of the Sensitivity of Hydrogen Sensors Covered with Polytetrafluoroethylene as a Protective Membrane for Humidity

..............K. Fujii, H. Inoue, T. Yamaguchi, T. Kiwa, & K. Tsukada 401

Development and Evaluation of a Pt/Ti-FET-Type Hydrogen Sensor

..............M. Kariya, K. Mizuhara, T. Yamaguchi, T. Kiwa,
S. Kunitsugu, & K. Tsukada 407

Development of a MEMS Gas Flow Sensor Unified with an Impurity-Gas Concentration Sensor

..............Y. Abe, J. Kosaka, T. Ohe, S. Ishihara, & M. Kimura 412

Evaluation and Application of Resist for Alkaline Wet Etching

..............T. Takahashi, M. Makihata, M. Esashi, & S. Tanaka 421

Effects of Anisotropy of Single Crystal Silicon on the Vibration Properties of Disk-Type MEMS Resonators

..............S. Murakami, M. Konno, T. Ikehara, R. Maeda, & T. Mihara 426

Detecting Frequency of Quartz Crystal Microbalance Sensors with High Resolution

..............S. Ogawa, M. Seyama, & H. Kuwano 431

Copper-Filled Through-Hole Electrode of a ZnS Window Material for Sealing a Thermal Infrared Sensor

..............T. Fukumoto, N. Okamoto, Y. Ohta, Y. Fukuyama, M. Hirota, & K. Kondo 437

Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection

..............H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, & O. Tabata 443

Fabrication of Optical Devices Based on Printable Photonics Technology and Its Application for Biosensor

..............T. Endo, N. Okuda, Y. Yanagida, S. Tanaka, & T. Hatsuzawa 450

Detection of Plant Water Content with Needle-Type In-Situ Water Content Sensor

..............H. Katayanagi & N. Miki 452

Dynamic Microarray Devices for the Observation of Paired Different Types of Beads

..............T. Teshima, H. Ishihara, K. Iwai, A. Adachi, & S. Takeuchi 465

Development of an Easy and High-Throughput Cell Assay System with a Culture Chip and an Assay Chip

..............K. Sugiura, N. Kaji, Y. Okamoto, M. Tokeshi, & Y. Baba 471

On-chip Glucose Sensor for Online Measurement of Cell Activities

..............H. Kimura, Y. Shono, N. Pereira-Rodrigues,
T. Yamamoto, Y. Sakai, & T. Fujii 476

Deliberation of Effect to Glass Imprinting Analysis by Williams-Landel-Ferry Equation

..............M. Yasui, M. Arai, M. Takahashi, H. Ito, T. Ino,
S. Kaneko, Y. Hirabayashi, & R. Maeda 484

Study of AC Drive Type Fluid-Based Resistive Inclination Sensor

..............H. Kawano & Y. Matsumoto 489

Light Sensor System Measuring Declination and Orientation

..............T. Tambo, Y. Miyamoto, S. Sakashita, & M. Shibata 495

Dew Condensation Sensor Using Quartz Tuning Fork Coated with Polystyrene Sphere Self-Assembled Monolayer

..............H. Nagasaki, K. Iwami, T. Tanahashi, & N. Umeda 501

Passive Dew Droplet Removal from Hydrogen Sensors for Fuel Cell Applications

..............M. Kano, M. Ishii, H. Yoshinaga, M. Esashi, & S. Tanaka 517

Stress Control of AlN Thin Film Sputter-Deposited Using ECR Plasma

..............R. Hino, T. Matsumura, M. Esashi, & S. Tanaka 523

An Analytic Solution of the Approximate Governing Equation of the Electrostatically Actuated Structures in Systems with One Degree of Freedom Involving the Second Order Displacement Terms

..............S. Tezuka 528

Study of Water Detecting Sensor in Insulated Gas of GIS/GCB Elctrochemical Sensor Using Ttriethlenediaminesulfate as Electrolyte

..............M. Kamei, C. Nishida, S. Yamauchi, M. Miyayama, & O. Takai 531

Study on a Phased-Array Antenna with MEMS Switches

..............K. Suzuki, H. Ado, K. Yagi, T. Furutsuka, & K. Suzuki 537

Application for Antigen - Antibody Sensor Using Carbon Nanotubes

..............Y. Funada, T. Hirata, & M. Akiya 543

Fabrication and Demonstration of an Organic Electrochromic Volume Display Prototype

..............S. Takamatsu, S. Murao, K. Matsumoto, & I. Shimoyama 550

Preface to the Special Issue on "Sensor Technology for Safety and Security"

..............H. Kezuka 561

Encapsulation Method of Glucose Oxidase Solution with Ionic Liquid Solvent and Direct Parylene Deposition

..............S. Takamatsu, H. Takano, N. Binh-Khiem, E. Iwase,
K. Matsumoto, & I. Shimoyama 562

Fundamental Experiment in Real-time Strain Measurement of Multipoint Fiber Bragg Grating using Optical Frequency Sweeping

..............Y. Shinoda, K. Nagai, & T. Higo 570

MEMS Micro-Mirror Array for Electrostatic Field Distribution Measurement System

..............T. Kuriyama, T. Aoi, H. Maeda, T. Itoh, Y. Ueno,
T. Nakaie, N. Matsui, & H. Okumura 575

Development of a Patch-Type Cardiography Monitoring System for Human Healthcare

..............H. Hamada, Y. Jiang, Y. Iga, S. Okochi, K. Kanda,
T. Fujita, K. Higuchi, & K. Maenaka 580

Development of a Magnetic Beads Quantitative Detection System for Fast Diagnosis

..............Y. Yamamoto, T. Morishita, K. Matsuyama, K. Takasa, & I. Shibasaki 584