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JANUARY 2009 Volume 129-E Number 1

Title Author Page Extended Summary Development and Application of Composite Multi-Layered PZT Thin Films L. Li, S. Aoyagi, Y. Arai, & N. Tagawa 1 Improvement of Abnormality Detection System for Bathers Using Ultrasonic Sensors H. Dobashi, T. Tajima, T. Abe, H. Nambo, & H. Kimura 6 Crank-Shaped and Y-Shaped Through-Hole Interconnections Filled with Au-Sn Solder S. Yamamoto, O. Nukaga, H. Wakioka, T. Suemasu, & H. Hashimoto 14 Material Tester Using Pendulum H. Ito, Y. Fujii, T. Yamaguchi, Y. Sugita, & M. Yokota 22

FEBRUARY 2009 Volume 129-E Number 2

Title Author Page Extended Summary An Asymmetric Silicon Micro-Mirror for Glasses-Like Retinal Display K. Yamada & T. Kuriyama 35 Development of Capacitive 6-Axis Force Sensor T. Kakutani, A. Tanaka, S. Era, T. Nagai, K. Saeki, & K. Okada 41 Mixed Taste Material Identification with LB Film Taste Sensor S. Hasebe, T. Hirata, & M. Akiya 47 Search Method of Sun Using Fixed Five Photodiode Sensor T. Tambo, M. Shibata, Y. Mizuno, & T. Yamauchi 53

MARCH 2009 Volume 129-E Number 3

Title Author Page Extended Summary Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS Y. Izawa, Y. Tsurumi, S. Tanaka, H. Fukushi, K. Sueda, Y. Nakata, M. Esashi, N. Miyanaga, & M. Fujita 63 Development and Evaluation of Microfluidic Device for Mn Ion Quantification in Ocean Environments T. Fukuba, C. Provin, K. Okamura, & T. Fujii 69 Design Optimization and Evaluation of a Bioluminescence Detection Part on a Microfluidic Device for in situ ATP Quantification Y. Aoki, T. Fukuba, T. Yamamoto, & T. Fujii 73 MBE Fabrication of GaN-Based Light Emitting Diode on MOCVD Grown GaN-on-Si Template and Application for Optical MEMS M. Wakui, R. Ito, F. R. Hu, H. Sameshima, & K. Hane 77 Taste Sensing Based on Frequency Characteristics of Quartz Resonator with Oleic Acid Film Electrodeposition K. Mukai, K. Misawa, M. Kitama, M. Yamashita, & J. Arisawa 83

APRIL 2009 Volume 129-E Number 4

Title Author Page Extended Summary Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application J. Lu, Y. Zhang, T. Ikehara, T. Itoh, R. Maeda, & T. Mihara 105 Hydrogen Selectivity of a Proton-Pumping Gate FET Hydrogen Sensor in an AC Modulation Mode T. Yamaguchi, M. Takisawa, T. Kiwa, H. Yamada, & K. Tsukada 110 Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy S. Ikezawa, M. Wakamatsu, J. Paw?at, & T. Ueda 115 Fabrication of Subwavelength Gratings on Silicon Micro Lenses for MEMS Scanners at Optical Communication Wavelengths Y. Kanamori, M. Miura, & K. Hane 120

MAY 2009 Volume 129-E Number 5

Title Author Page Extended Summary Stress Control of Silicon Membrane for Optical Scanner with Deformable Mirror T. Sasaki & K. Hane 138 Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring R. Amarasinghe, D. V. Dao, & S. Sugiyama 142 Study of Antigen - Antibody Sensor Using Carbon Nanotubes S. Amiya, T. Hirata, & M. Akiya 148 Development of Bitter Taste Sensor Using Ionic-Liquid/Polymer Membranes N. Akutagawa, J. Toida, Y. Amano, H. Ikezaki, K. Toko, & Y. Arikawa 154 A Proposal of a Linked Optical Rotor and its Fundamental Characteristics H. Ukita, Y. Ibe, & T. Ohnishi 161

JUNE 2009 Volume 129-E Number 6

Title Author Page Extended Summary A Support System for Motion Training Using Motion Capture and Acceleration Sensors T. Hayashi & R. Onai 173 Development of Cervical Spinal Cord Evoked Magnetic Field Measurement System Using SQUID Magnetometers Y. Adachi, M. Miyamoto, J. Kawai, G. Uehara, S. Kawabata, & T. Sato 181 Laser Spectroscopy of Minute Amounts of Gas Using Photonic Bandgap Fiber T. Sugiyama, T. Ueda, & J. Pawlet 189

JULY 2009 Volume 129-E Number 7

Title Author Page Extended Summary Characteristics of a Highly Sensitive Magnetic Sensor Fabricated from Bulk Superconducting BPSCCO H. Fujita, T. Miwa, M. Itoh, H. Kezuka, H. Matsumoto, & H. Kishimura 199 Surface Adhesion Control of Patterned Perfluoro Polymer for Release Technology in the TAS Fabrication Process T. Kobayashi & S. Konishi 205 Fluidic-Based Inclination Sensor by Silica Coating Process with Low-Voltage Detection Circuitry A. B. A. Manaf & Y. Matsumoto 210 Improved Infrared Position Sensitive Detector A. Takahata, Y. Shimada, F. Yoshioka, I. Yamamoto, M. Yoshida, M. Kimata, & T. Kano 215 Measurement of pH in Fluidic Chip Using a Terahertz Chemical Microscope T. Kiwa, S. Oka, Y. Minami, I. Kawayama, M. Tonouchi, & K. Tsukada 221

AUGUST 2009 Volume 129-E Number 8

Title Author Page Extended Summary Examination of Absorptiometry Microchip Application Aiming for Particle-Enhanced Turbidimetric Immunoassay T. Noda, Y.-S. Shin, N. Hirokubo, K. Miyamura, K. Matsumoto, H. Takao, K. Sawada, & M. Ishida 229 Polarization-Analyzing Image Sensor for TAS Based on Standard CMOS Technology T. Tokuda, H. Yamada, K. Sasagawa, & J. Ohta 234 Capacitance-Voltage Measurement of Transporting Function at Cell Membrane T. Sakata & Y. Miyahara 242 Study of Automated Embryo Manipulation Using Dynamic Microarray: Trapping, Culture and Collection H. Kimura, H. Nakamura, K. Iwai, T. Yamamoto, S. Takeuchi, T. Fujii, & Y. Sakai 245 Development of On-chip Coculture System for Cytotoxicity Test Using Caco-2 and Hep G2 H. Kimura, H. Nakayama, T. Yamamoto, Y. Sakai, & T. Fujii 252 Dependence of Oxidative Gas Reaction on Diamond p-type Surface Conductive Layer Annealed with Hydrogen Gas K. Haruta, H. Kimura, & T. Kurosu 259 Electric Field Analysis of the ITO-ZnSe-CdTe Photo Sensor Cell T. Ichibakase 265

SEPTEMBER 2009 Volume 129-E Number 9

Title Author Page Extended Summary Self-Assembled Lipopolymers with Physisorbed Amphiphilic GC Materials for QCM Odor Sensors B. Wyszynski, P. Somboon, & T. Nakamoto 273 Temperature Control and Packaging Optimization of the Integrated Hydrogen Sensor K. Tsubota, T. Kiwa, H. Yamada, T. Yamaguchi, Y. Kondo, H. Imajo, T. Hondo, T. Maehara, T. Yamamoto, & K. Tsukada 278 Fabrication of a Micro Capacitive Inclination Sensor by Resin Molding H. Miyake, K. Nishimoto, H. Ueda, H. Ueno, K. Itoigawa, S. Nishida, D. Noda, & T. Hattori 283 Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon Beam Resonator T. Ishino, S. Makita, H. Tanigawa, & K. Suzuki 289 Fabrication of Micro Accelerometer Using Screen Printed BaTiO3 Film on a Ceramic Substrate and Its Characterization M. Suzuki, Y. Kobayashi, S. Aoyagi, H. Tajiri, & T. Nagahata 295 Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon M. Suzuki, G. Kawai, H. Izumi, S. Aoyagi, & S. Yokoyama 301 Enhancement of Gas Response of ZnO Micro-nano Structured Films through O2 Plasma Treatment I. Nagatomo, R. Uchino, Y. Li, M. Shuzo, I. Yamada, & J.-J. Delaunay 307

OCTOBER 2009 Volume 129-E Number 10

Title Author Page Extended Summary Design and Fabrication of Biosensor Device by Use of Receptor Proteins Y. Kuwana, K. Kojima, & Y. Tamada 317 A High-Speed CMOS Image Sensor with Global Electronic Shutter Pixels Using Pinned Diodes K. Yasutomi, T. Tamura, M. Furuta, S. Itoh, & S. Kawahito 321 MEMS Tilt Sensor Fabricated Utilizing Anodic Bonding of Thin Silicon Film on Glass Substrate K. Suzuki, T. Hata, K. Ioka, Y. Takahashi, T. Tuzi, & Y. Nishioka 328 A Taste Sensor Based on a Carbon Nanotube K. Takagi, T. Hirata, & M. Akiya 333 Study for Electrode Metals on Taste Sensor with LB film T. Yokoya, T. Hirata, & M. Akiya 338 Ethylene Sensors Using Semiconducting Thin-Film and Palladium-Deposited Porous Alumina K. Goto, Y. Kii, K. Furukawa, & K. Hara 344 A Theory and Experiment of Instantaneous Wave Source Localization from a Wave Distribution on a Small Region S. Koyama, T. Kurihara, & S. Ando 350 Dependence of Resonance Frequency on Diaphragm Dimensions in a Guided-Wave Optical Pressure Sensor M. Nakajima, H. Nikkuni, M. Ohkawa, & T. Sato 357

NOVEMBER 2009 Volume 129-E Number 11

Title Author Page Extended Summary Development of a Silicon Microneedle with Three-Dimensional Sharp Tip by Electrochemical Etching H. Izumi, T. Okamoto, M. Suzuki, & S. Aoyagi 373 Blood Cell Separation Device Using Serially Connected Membrane Filters for Adapting to Blood Flow Properties T. Kobayashi, D. Kato, H. Koga, K. Morimoto, M. Fukuda, Y. Kinoshita, H. Yoshida, & S. Konishi 380 Application of the Wire Bonding Technology to a Flexible Neural Probe K. Shimizu, M. Nakanishi, M. Makikawa, S. Asajima, & S. Konishi 387 Micromachined Pyrolyzed Polymer as a Candidate of 18F- Deposition Electrode toward PET Application K. Okamoto, A. Syunori, R. Iwata, H. Saiki, H. Nakanishi, & S. Konishi 393 A High-Resolution Endoscope of Small Diameter Using Electromagnetically Vibration of Single Fiber T. Matsunaga, R. Hino, W. Makishi, M. Esashi, & Y. Haga 399 A Method of Networking Hierarchical Sensor Systems for Energy-Saving Robust Sensor Networks K. Nemoto, K. Sei, T. Toriyama, & T. Miyano 405 Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using Ni-Cr Thin Film Gauge H. Ohnishi, M. Sohgawa, H. Tachibana, Y. M. Huang, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, & H. Noma 411 Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple N. Takashima & M. Kimura 417 A Range-Shift Technique for TOF Range Image Sensors T. Sawada, K. Ito, M. Nakayama, & S. Kawahito 421 Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio - Method to Form Small 3D Structures with an Arbitrary Aspheric Surface and High Aspect Ratio - I. Naniwa, M. Kanamaru, S. Nakamura, T. Shimano, & M. Horino 426

DECEMBER 2009 Volume 129-E Number 12

Title Author Page Extended Summary Ultra-Small Laser Scanning Module with High Accuracy Alignment S. Yoshihara, J. Ohara, K. Abe, Y. Takeuchi, & N. Kawahara 433 Integration of QCMs for Studying Surface Science within a Microfluidic Channel Y. Itasaka, M. Nishizawa, & T. Abe 439 Wide Pressure Range Measurement due to the Exchange of Heater Driving of the Temperature Difference Sensor N. Takashima & M. Kimura 444 LSI Design for Sensing Data Transmission by Interruption in Tactile Sensor Systems M. Muroyama, M. Makihata, S. Matsuzaki, H. Yamada, U. Yamaguchi, T. Nakayama, Y. Nonomura, S. Tanaka, & M. Esashi 450 Development of Monolithic Si Micro Channel Plate K. Sakuma & K. Takahashi 461 A Simple Method of Searching Sun in Sky T. Tambo, M. Shibata, & T. Fukaya 475 Fabrication and Application of Micro Tapered Structure by Proximity Backside Exposure Y. Matsumoto & K. Makabe 480

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