Development and Application of Composite Multi-Layered PZT Thin Films

..............L. Li, S. Aoyagi, Y. Arai, & N. Tagawa 1

Improvement of Abnormality Detection System for Bathers Using Ultrasonic Sensors

..............H. Dobashi, T. Tajima, T. Abe, H. Nambo, & H. Kimura 6

Crank-Shaped and Y-Shaped Through-Hole Interconnections Filled with Au-Sn Solder

..............S. Yamamoto, O. Nukaga, H. Wakioka, T. Suemasu, & H. Hashimoto 14

Material Tester Using Pendulum

..............H. Ito, Y. Fujii, T. Yamaguchi, Y. Sugita, & M. Yokota 22

An Asymmetric Silicon Micro-Mirror for Glasses-Like Retinal Display

..............K. Yamada & T. Kuriyama 35

Development of Capacitive 6-Axis Force Sensor

..............T. Kakutani, A. Tanaka, S. Era, T. Nagai, K. Saeki, & K. Okada 41

Mixed Taste Material Identification with LB Film Taste Sensor

..............S. Hasebe, T. Hirata, & M. Akiya 47

Search Method of Sun Using Fixed Five Photodiode Sensor

..............T. Tambo, M. Shibata, Y. Mizuno, & T. Yamauchi 53

Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS

..............Y. Izawa, Y. Tsurumi, S. Tanaka, H. Fukushi, K. Sueda,
Y. Nakata, M. Esashi, N. Miyanaga, & M. Fujita 63

Development and Evaluation of Microfluidic Device for Mn Ion Quantification in Ocean Environments

..............T. Fukuba, C. Provin, K. Okamura, & T. Fujii 69

Design Optimization and Evaluation of a Bioluminescence Detection Part on a Microfluidic Device for in situ ATP Quantification

..............Y. Aoki, T. Fukuba, T. Yamamoto, & T. Fujii 73

MBE Fabrication of GaN-Based Light Emitting Diode on MOCVD Grown GaN-on-Si Template and Application for Optical MEMS

..............M. Wakui, R. Ito, F. R. Hu, H. Sameshima, & K. Hane 77

Feasibility Study of Micro-Actuator Using Electro Conducting Polymers

..............J. Sone, A. Asami, G. Kimura, & K. Yamada 81

Taste Sensing Based on Frequency Characteristics of Quartz Resonator with Oleic Acid Film Electrodeposition

..............K. Mukai, K. Misawa, M. Kitama, M. Yamashita, & J. Arisawa 83

Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application

..............J. Lu, Y. Zhang, T. Ikehara, T. Itoh, R. Maeda, & T. Mihara 105

Hydrogen Selectivity of a Proton-Pumping Gate FET Hydrogen Sensor in an AC Modulation Mode

..............T. Yamaguchi, M. Takisawa, T. Kiwa, H. Yamada, & K. Tsukada 110

Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy

..............S. Ikezawa, M. Wakamatsu, J. Pawlat, & T. Ueda 115

Fabrication of Subwavelength Gratings on Silicon Micro Lenses for MEMS Scanners at Optical Communication Wavelengths

..............Y. Kanamori, M. Miura, & K. Hane 120

Time-Domain Correlation Imaging and Its Applications

..............S. Ando & A. Kimachi 129

Stress Control of Silicon Membrane for Optical Scanner with Deformable Mirror

..............T. Sasaki & K. Hane 138

Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring

..............R. Amarasinghe, D. V. Dao, & S. Sugiyama 142

Study of Antigen - Antibody Sensor Using Carbon Nanotubes

..............S. Amiya, T. Hirata, & M. Akiya 148

Development of Bitter Taste Sensor Using Ionic-Liquid/Polymer Membranes

..............N. Akutagawa, J. Toida, Y. Amano, H. Ikezaki, K. Toko, & Y. Arikawa 154

A Proposal of a Linked Optical Rotor and its Fundamental Characteristics

..............H. Ukita, Y. Ibe, & T. Ohnishi 161

A Support System for Motion Training Using Motion Capture and Acceleration Sensors

..............T. Hayashi & R. Onai 173

Development of Cervical Spinal Cord Evoked Magnetic Field Measurement System Using SQUID Magnetometers

..............Y. Adachi, M. Miyamoto, J. Kawai, G. Uehara, S. Kawabata, & T. Sato 181

Characteristic Extraction of EMG with Recognition of Tactile Apparent Movement

..............K. Kawahara, Y. Park, & M. Uchida 187

Laser Spectroscopy of Minute Amounts of Gas Using Photonic Bandgap Fiber

..............T. Sugiyama, T. Ueda, & J. Pawlet 189

[25th Sensor Symposium]

Characteristics of a Highly Sensitive Magnetic Sensor Fabricated from Bulk Superconducting BPSCCO

..............H. Fujita, T. Miwa, M. Itoh, H. Kezuka,
H. Matsumoto, & H. Kishimura 199

Surface Adhesion Control of Patterned Perfluoro Polymer for Release Technology in the TAS Fabrication Process

..............T. Kobayashi & S. Konishi 205

Fluidic-Based Inclination Sensor by Silica Coating Process with Low-Voltage Detection Circuitry

..............A. B. A. Manaf & Y. Matsumoto 210

Improved Infrared Position Sensitive Detector

..............A. Takahata, Y. Shimada, F. Yoshioka, I. Yamamoto,
M. Yoshida, M. Kimata, & T. Kano 215

Measurement of pH in Fluidic Chip Using a Terahertz Chemical Microscope

..............T. Kiwa, S. Oka, Y. Minami, I. Kawayama,
M. Tonouchi, & K. Tsukada 221

Examination of Absorptiometry Microchip Application Aiming for Particle-Enhanced Turbidimetric Immunoassay

..............T. Noda, Y.-S. Shin, N. Hirokubo, K. Miyamura, K. Matsumoto, H. Takao, K. Sawada, & M. Ishida 229

Polarization-Analyzing Image Sensor for TAS Based on Standard CMOS Technology

..............T. Tokuda, H. Yamada, K. Sasagawa, & J. Ohta 234

Capacitance-Voltage Measurement of Transporting Function at Cell Membrane

..............T. Sakata & Y. Miyahara 242

Study of Automated Embryo Manipulation Using Dynamic Microarray: Trapping, Culture and Collection

..............H. Kimura, H. Nakamura, K. Iwai, T. Yamamoto, S. Takeuchi, T. Fujii, & Y. Sakai 245

Development of On-chip Coculture System for Cytotoxicity Test Using Caco-2 and Hep G2

..............H. Kimura, H. Nakayama, T. Yamamoto, Y. Sakai, & T. Fujii 252

Dependence of Oxidative Gas Reaction on Diamond p-type Surface Conductive Layer Annealed with Hydrogen Gas

..............K. Haruta, H. Kimura, & T. Kurosu 259

Electric Field Analysis of the ITO-ZnSe-CdTe Photo Sensor Cell

..............T. Ichibakase 265

Paper
[25th Sensor Symposium]

Self-Assembled Lipopolymers with Physisorbed Amphiphilic GC Materials for QCM Odor Sensors

..............B. Wyszynski, P. Somboon, & T. Nakamoto 273

Temperature Control and Packaging Optimization of the Integrated Hydrogen Sensor

..............K. Tsubota, T. Kiwa, H. Yamada, T. Yamaguchi, Y. Kondo, H. Imajo,
T. Hondo, T. Maehara, T. Yamamoto, & K. Tsukada 278

Fabrication of a Micro Capacitive Inclination Sensor by Resin Molding

..............H. Miyake, K. Nishimoto, H. Ueda, H. Ueno, K. Itoigawa,
S. Nishida, D. Noda, & T. Hattori 283

Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon Beam Resonator

..............T. Ishino, S. Makita, H. Tanigawa, & K. Suzuki 289

Fabrication of Micro Accelerometer Using Screen Printed BaTiO3 Film on a Ceramic Substrate and Its Characterization

..............M. Suzuki, Y. Kobayashi, S. Aoyagi, H. Tajiri, & T. Nagahata 295

Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon

..............M. Suzuki, G. Kawai, H. Izumi, S. Aoyagi, & S. Yokoyama 301

Enhancement of Gas Response of ZnO Micro-nano Structured Films through O2 Plasma Treatment

..............I. Nagatomo, R. Uchino, Y. Li, M. Shuzo, I. Yamada, & J.-J. Delaunay 307

Paper
[25th Sensor Symposium]

Design and Fabrication of Biosensor Device by Use of Receptor Proteins

..............Y. Kuwana, K. Kojima, & Y. Tamada 317

A High-Speed CMOS Image Sensor with Global Electronic Shutter Pixels Using Pinned Diodes

..............K. Yasutomi, T. Tamura, M. Furuta, S. Itoh, & S. Kawahito 321

MEMS Tilt Sensor Fabricated Utilizing Anodic Bonding of Thin Silicon Film on Glass Substrate

..............K. Suzuki, T. Hata, K. Ioka, Y. Takahashi, T. Tuzi, & Y. Nishioka 328

A Taste Sensor Based on a Carbon Nanotube

..............K. Takagi, T. Hirata, & M. Akiya 333

Study for Electrode Metals on Taste Sensor with LB film

..............T. Yokoya, T. Hirata, & M. Akiya 338

Ethylene Sensors Using Semiconducting Thin-Film and Palladium-Deposited Porous Alumina

..............K. Goto, Y. Kii, K. Furukawa, & K. Hara 344

A Theory and Experiment of Instantaneous Wave Source Localization from a Wave Distribution on a Small Region

..............S. Koyama, T. Kurihara, & S. Ando 350

Dependence of Resonance Frequency on Diaphragm Dimensions in a Guided-Wave Optical Pressure Sensor

..............M. Nakajima, H. Nikkuni, M. Ohkawa, & T. Sato 357

Fabrication of Micro Lens Array by UV-LED Lithography

..............Y. Iguchi & Y. Matsumoto 363

Development of a Silicon Microneedle with Three-Dimensional Sharp Tip by Electrochemical Etching

..............H. Izumi, T. Okamoto, M. Suzuki, & S. Aoyagi 373

Blood Cell Separation Device Using Serially Connected Membrane Filters for Adapting to Blood Flow Properties

..............T. Kobayashi, D. Kato, H. Koga, K. Morimoto, M. Fukuda, Y. Kinoshita, H. Yoshida, & S. Konishi 380

Application of the Wire Bonding Technology to a Flexible Neural Probe

..............K. Shimizu, M. Nakanishi, M. Makikawa, S. Asajima, & S. Konishi 387

Micromachined Pyrolyzed Polymer as a Candidate of 18F- Deposition Electrode toward PET Application

..............K. Okamoto, A. Syunori, R. Iwata, H. Saiki, H. Nakanishi, & S. Konishi 393

A High-Resolution Endoscope of Small Diameter Using Electromagnetically Vibration of Single Fiber

..............T. Matsunaga, R. Hino, W. Makishi, M. Esashi, & Y. Haga 399

Paper
[25th Sensor Symposium]

A Method of Networking Hierarchical Sensor Systems for Energy-Saving Robust Sensor Networks

..............K. Nemoto, K. Sei, T. Toriyama, & T. Miyano 405

Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using Ni-Cr Thin Film Gauge

..............H. Ohnishi, M. Sohgawa, H. Tachibana, Y. M. Huang, T. Kanashima,
M. Okuyama, K. Yamashita, M. Noda, & H. Noma 411

Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple

..............N. Takashima & M. Kimura 417

A Range-Shift Technique for TOF Range Image Sensors

..............T. Sawada, K. Ito, M. Nakayama, & S. Kawahito 421

Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio - Method to Form Small 3D Structures with an Arbitrary Aspheric Surface and High Aspect Ratio -

..............I. Naniwa, M. Kanamaru, S. Nakamura, T. Shimano, & M. Horino 426

Ultra-Small Laser Scanning Module with High Accuracy Alignment

..............S. Yoshihara, J. Ohara, K. Abe, Y. Takeuchi, & N. Kawahara 433

Integration of QCMs for Studying Surface Science within a Microfluidic Channel

..............Y. Itasaka, M. Nishizawa, & T. Abe 439

Wide Pressure Range Measurement due to the Exchange of Heater Driving of the Temperature Difference Sensor

..............N. Takashima & M. Kimura 444

LSI Design for Sensing Data Transmission by Interruption in Tactile Sensor Systems

..............M. Muroyama, M. Makihata, S. Matsuzaki, H. Yamada, U. Yamaguchi,
T. Nakayama, Y. Nonomura, S. Tanaka, & M. Esashi 450

Development of Monolithic Si Micro Channel Plate

..............K. Sakuma & K. Takahashi 461

Development of Electrolyte-based Capacitive Level Sensor

..............H. Morinaga & Y. Matsumoto 469

Microassembly of PZT Actuators into Silicon Microstructures

..............M. F. M. Sabri, T. Ono, & M. Esashi 471

Photo-darlington for Visible Light ID Using Standard CMOS Process

..............Y. Kimura & Y. Matsumoto 473

A Simple Method of Searching Sun in Sky

..............T. Tambo, M. Shibata, & T. Fukaya 475

Fabrication and Application of Micro Tapered Structure by Proximity Backside Exposure

..............Y. Matsumoto & K. Makabe 480

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