Design and Development of Card-Sized Virtual Keyboard Using Permanent Magnets and Hall Sensors

.....................K. Demachi, M. Ohyama, Y. Kanemoto, & I. Masaie 1

Neo-Transmitter Using Pulse Width Modulation (PWM) Method for Wireless Smart Sensors

.....................W. H. Lee, J-W. Kim, H. Takao, K. Sawada, & M. Ishida 7

Ultra Miniature Optical Fiber Pressure Sensor with a Sleeve for Catheter Insertion

.....................M. Shimada, M. Shimada, Y. Kinefuchi, & K. Takahashi 12

Eddy Current Testing Probe Composed of Double Uneven Step Distributing Planar Coils for Crack Detection

.....................P. Xu & K. Shida 18

Development of Sensing System for the Estimation of Human's State Using Infrared Sensors Arranged at Grid

.....................M. Saito, Y. Kitazono, & S. Serikawa 24

Odor Coding Sensor

.....................K. Hayashi 29

Truth and Denomination Discrimination of Notes Using Surface Properties Evaluated by Scanning with Optical Fiber Feeler

.....................J. Takayama, S. Ohyama, & A. Kobayashi 34

Development of Lightning Surge Sensor for Railway Signal Electronics

.....................T. Hattori, T. Kunifuji, T. Kato, & K. Ebuchi 41

Nonlinear Dielectric Properties of Yeast Cells Cultured in Different Environmental Conditions

.....................G. Kawanishi, N. Fukuda, & M. Muraji 47

Coupled Electro-Thermal Analysis of the Micro Flow Sensor with Control Circuit Using SPICE

.....................S. Kamiunten, H. Nagayo, M. Motosuke, & S. Honami 53

Fabrication of DEP Device for Cell Positioning and its Cell Viability Test

.....................Y. Tanaka, Y. Yanagida, & T. Hatsuzawa 59

Foreword

.....................G. Hashiguchi 69

Development of an Electromagnetically Driven Optical MEMS Mirror with Functionsof Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical Interferometer

.....................Y. Watanabe, Y. Abe, S. Iwamatsu, T. Mitsui, Y. Takahashi, & T. Sato 70

Microfluidic Dispensing Device Using Wettability Gradient and Electrowetting

.....................T. Yasuda, S. Harada, & K. Daimon 75

Theoretical Analysis of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication Wavelengths

.....................E. Bulgan, Y. Kanamori, & K. Hane 80

Fabrication of Two-Axis Quartz MEMS-Based Capacitive Tilt Sensor

.....................J. Liang, T. Matsuo, F. Kohsaka,X. Li, K. Kunitomo, & T. Ueda 85

Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
�|Separation Method of Glass Layer�|

.....................Y. Izawa, Y. Tsurumi, S. Tanaka, H. Kikuchi, K. Sueda,
Y. Nakata, M. Esashi, N. Miyanaga, & M. Fujita 91

Recognition of Bread Key Odorants by Using Polymer Coated QCMs

.....................T. Nakai, S. Kouno, N. Hiruma, M. Shuzo, J. J. Delaunay, & I. Yamada 97

Development of MEMS Capacitive Sensor Using a MOSFET Structure

.....................H. Izumi, Y. Matsumoto, S. Aoyagi, Y. Harada,
S. Shingubara, M. Sasaki, K. Hane, & H. Tokunaga 102

Significance of the Development of VOC Sensors

.....................I. Matsubara, T. Itoh, & N. Murayama 119

Development of Oxide Semiconductor Thick Film Gas Sensor for the Detection of Total Volatile Organic Compounds

.....................M. Kadosaki, Y. Sakai, I. Tamura, I. Matsubara, & T. Itoh 125

Development of the Personal TVOC Monitor and its Application

.....................T. Kawaguchi, T. Nishimura, Y. Setoguchi,
Y. Matsuura, T. Nakahara, & T. Matsumura 131

Preparation of Macroporous Eu-Doped Oxide Thick Films and Their Application to Gas Sensor Materials

.....................Y. Takakura, T. Hyodo, Y. Shimizu, & M. Egashira 137

Preparation of Macroporous Semiconductor Gas Sensors and Their Odur Sensing Properties

.....................S. Nonaka, T. Hyodo, Y. Shimizu, & M. Egashira 141

Detection of Dilute Aromatic VOCs Using WO3 Thin Film Sensors Equipped with Au Interdigitated Microelectrode

.....................J. Tamaki, Y. Michiba, & S. Kajita 145

Detection of Formaldehyde Using a Pt/-Al2O3-Based Adsorption/ Combustion-Type Sensor

.....................T. Sasahara, N. Takahashi, & M. Egashira 149

Design Construction of Beam Structured Vertical Drive SMA Thin Film Actuator for Small Tactile Display

.....................W. Yoshikawa, A. Sasabe, K. Sugano,
T. Tsuchiya, A. Ishida, & O. Tabata 151

Deposition Rate and Movement Effect of Paraffin-Based EBID

.....................S. Kai, K. Takahashi, H. Norsyazwan,
T. Ikuta, T. Nishiyama, & K. Nagayama 161

A Cell Lysis and Protein Purification-Single Molecule Assay Devices for Evaluation of Genetically Engineered Proteins

.....................T. Nakayama, K. Tabata, H. Noji, & R. Yokokawa 167

Fabrication of Microcoils Using X-Ray Lithography and Metallization

.....................D. Noda, Y. Matsumoto, M. Setomoto, & T. Hattori 181

Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection

.....................A. M. R. Fath El Bab, T. Tamura, K. Sugano, T. Tsuchiya,
O. Tabata, M. E. H. Eltaib, & M. M. Sallam 186

Fabrication and Normal/Shear Stress Responses of Tactile Sensors of Polymer/Si Cantilevers Embedded in PDMS and Urethane Gel Elastomers

.....................Y. M. Huang, M. Sohgawa, K. Yamashita, T. Kanashima,
M. Okuyama, M. Noda, & H. Noma 193

Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

.....................J. Paw?at, T. Sugiyama, X. Li, T. Matsuo, S. Ikezawa, & T. Ueda 198

Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes

.....................Y. Uchida, K. Sugano, T. Tsuchiya, O. Tabata, & T. Ikehara 203

Investigation on the Thin Film Pirani Vacuum Sensor Using a Constant Voltage Drive-Mode Diode-Heater

.....................N. Takashima & M. Kimura 209

Improvement of Robustness of Odor Classification in Dynamically Changing Concentration against Environmental Change

.....................N. Nimsuk & T. Nakamoto 214

Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope

.....................V. T. Dau, T. X. Dinh, D. V. Dao, & S. Sugiyama 219

Hydrogen Sensors Using Pd-Based Metallic Glassy Alloys

.....................S. Kajita, S. Yamaura, H. Kimura, K. Yubuta, & A. Inoue 225

Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement

.....................S. Hashimoto, J. H. Kuypers, S. Tanaka, & M. Esashi 230

Development of a 3-DOF Micro Accelerometer with Wireless Readout

.....................B. T. Tung, D. V. Dao, R. Amarasinghe, N. Wada,
H. Tokunaga, & S. Sugiyama 235

Suppression of Background Odor Effect in Odor Sensing System Using Olfactory Adaptation Model

.....................T. Ohba & T. Yamanaka 240

Development of an Arrayed Tactile Sensor Having Four Stories and Recognition of Contact State Using Neural Networks

.....................D. Ono, T. Fukutani, & S. Aoyagi 246

FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOneTM

.....................H. Miura, J. Sone, D. Collard, C. Yamahata, & H. Fujita 252

Application of Vertical Comb-Drive MEMS Mirror for a Phase Shift Device

.....................D. Inoue, F. Oohira, K. Yamamoto, M. Kondo, T. Harada, I. Ishimaru, G. Hashiguchi, & M. Hosogi 261

Low-Temperature Direct Bonding of Flip-Chip Mountable VCSELs with Au-Au Surface Activation

.....................T. Imamura, E. Higurashi, T. Suga, & R. Sawada 266

Compact Triangulation Sensor Realized by Bending Si Wafer with Optical Elements at Metal Hinges

.....................M. Sasaki, S. Endou, & K. Hane 271

Active Head Slider with Piezoelectric Actuator Using Shear Mode Deformation

.....................I. Naniwa, K. Sato, S. Nakamura, & K. Sato 277

Coherent Control of Semiconductor Quantum Wire by High-Resolution and Stable Michelson Interferometer

.....................T. Okada, K. Komori, X. L. Wang, M. Ogura, & N. Tsurumachi 285

Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

.....................S. Ikezawa, M. Wakamatsu, J. Pawlat, & T. Ueda 297

A Two-Frequency CW Radar System for Short-Range Distances Measurements

.....................T. Araki, T. Nagase, M. Araki, & H. Ono 302

Recognition of Devoiced Vowels Using Optical Microphone Made of Multipled POF-Type Moisture Sensors

.....................M. Morisawa, Y. Natori, T. Taki, & S. Muto 306

Electromagnetic Wave Shield Effect of Touch-Panel-Sensor Using Resistive Films

.....................N. Harada 312

Structural Analysis of C60 Nanotubes Heat-Treated in Vacuum

.....................K. Miyazawa, C. Ringor, K. Nakamura,
M. Tachibana, K. Saito, & T. Kizuka 317

Bending Deformation of C60 Nanowhiskers in Solution and Air

.....................M. Watanabe, K. Miyazawa, K. Kojima, & M. Tachibana 321

The Dependence of Demolding Characteristics on Side Wall Roughness of Mold in Thermal Imprint

.....................H. Kawata, J. Ishihara, M. Kayama, M. Yasuda, & Y. Hirai 325

Fabrication of Anti-Corrosive Capacitive Vacuum Sensors with a Silicon Carbide/ Polysilicon Bi-Layer Diaphragm and Electrical Through-Hole Connections on the Opposite Side

.....................B. Larangot, S. Tanaka, & M. Esashi 331

Anisotropic Wet Etching for Micro-Fabrication

..............M. Shikida 341

Special lssue Paper

Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

..............D. Yamazaki, L. Zhang, J. Pawlat, & T. Ueda 347

Development of a Flexible Thermopile Power Generator Utilizing BiTe-Cu Thin Films

..............D. V. Dao, A. Miyaoka, S. Sugiyama, H. Ueno, & K. Itoigawa 352

Optical Mouse Sensor for Non-Contact Tactile Sensing

..............W. Xin & K. Shida 358

Development of System for Prevention of Thing Left Behind Using Acceleration Sensors and RFID Tag

..............Y. Kitazono, T. Inoue, M. Miyauchi, & S. Serikawa 364

Microtechnologies in Advanced Medicine

..............M. Murata & M. Hashizume 369

Modeling and Systemization of Cultured Cell for High Through-Put Analysis (HTA)

..............T. Haruyama & S. Migita 373

Magnetic Navigation System for Thoracoscopic Surgery: a Partial Lung Resection with Transbronchial Marking

..............J. Shimada, K. Itoh, K. Terauchi, M. Yanada,
M. Shimomura, & A. Nishikawa 377

3-D Real-Time Navigation System for Ear-Nose-Throat Surgery

..............J. Hong, N. Matsumoto, R. Ouchida, S. Komune, & M. Hashizume 383

Development of Intravascular MRI Probe Applicable to Catheter Mounting

..............S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, & Y. Haga 389

Blood Cell Classification Utilizing Hydrodynamic Filtration

..............M. Matsuda, M. Yamada, & M. Seki 396

Development of Minimally Invasive Medical Tools Using Laser Processing on Cylindrical Substrates

..............Y. Haga, Y. Muyari, S. Goto, T. Matsunaga, & M. Esashi 402

Human Sensing Fusion Project for Safety and Health Society

..............K. Maenaka 419

A Texture Dependent Interpolation for Barrel Distorted and Longitudinal Chromatic Aberrated Image

..............Y. Zhang, I. Minema, & T. Ueda 423

The Study of the Imprint Mold Materials Suited for B2O3-La2O3 Based Glass

..............M. Yasui, Y. Omata, K. Sugimoto, S. Kaneko,
Y. Hirabayashi, M. Takahashi, & R. Maeda 431

Impedance Characteristics Analysis of the Non-Contact Magnetic Type Position Sensor

..............S. Yang, K. Hirata, T. Ota, Y. Mitsutake, & Y. Kawase 435

Development of Si DRIE Process Allowing Simultaneous Etching from Narrow and Wide Mask Openings

..............J. Ohara, Y. Takeuchi, & K. Sato 442

Recent Trend in Development of Olfactory Displays

..............Y. Yanagida 451

Pulse Ejection Presentation System Synchronized with Breathing

..............A. Kadowaki, J. Sato, K. Ohtsu, Y. Bannai, & K. Okada 455

Model of Transient Response of Semiconductor Gas Sensors

..............A. Fujimoto & T. Kuwahara 461

Recipe Estimation Using Mass Spectrometer and Large-Scale Data - Odor Recipe -

..............AL Mamun & T. Nakamoto 467

Introducing Computational Fluid Dynamics Simulation into Olfactory Display

..............H. Ishida, H. Yoshida, & T. Nakamoto 472

Effect that Smell Presentation Has on an Individual in Regards to Eye Catching and Memory

..............A. Tomono, K. Kanda, & S. Otake 478

Sensitivity Improvement of Odor Sensing System Using Ball SAW Devices

..............M. Sekine, B. Wyszynski, T. Nakamoto, N. Nakaso, & K. Noguchi 487

Influence of Via Stacking for High Density of Consumer Electronics Products

..............T. Nakanishi & T. Hase 493

Estimation of Metabolism Characteristics for Heat-Injured Bacteria Using Dielectrophoretic Impedance Measurement Method

..............E. Amako, T. Enjoji, S. Uchida, & F. Tochikubo 499