Japanese
Jan. Feb. Mar. Apr. May. Jun. Jul. Aug. Sep. Oct. Nov. Dec.
JANUARY 2007 Volume 127-E Number 1
Paper
Wavelength Shift Detection of Fiber Bragg Grating by Dynamic Strain using Serrodyne Modulation
.....................Y. Shinoda, Y. Sakumoto, & T. Higo 1
Improvement of Ultrasonic Micro Array Sensor Using the Amorphous Fluorocarbon Polymer Film
.....................T. Tanaka, S. Lee, M. Uno, K. Inoue, S. Aoyagi, K. Yamashita, & M. Okuyama 7
Application of the Spectral Sensitivity for the Semiconductor Junction Analysis
.....................T. Ichibakase 14
Development of FBG Strain-Detection System with Narrow Band Filter using a Scanning FBG
.....................T. Takahama, A. Yokotani, & K. Kurosawa 19
Three-Wing Optical Mixer Design, Fabrication and Application to a -TAS
..................H. Ukita, K. Takada, D. Akagi, T. Ohnishi, & Y. Nonohara 25
A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners
.....................H. Muro, T. Oki, A. Asaoka, T. Bourouina, G. Reyne, A. Debray, E. Lebrasseur, & H. Fujita 31
High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks
.....................T. Hatsuzawa, H. Hamano, M. Saito, & Y. Yanagida 37
FEBRUARY 2007 Volume 127-E Number 2
Special lssue on "Medical Micromachine"
Special lssue Paper
Development of Micro Rotary Reactor Causing Spiral Laminar Flow Interfaces
.....................H. Furusawa, K. Suzumori, T. Kanda, Y. Yamada, Y. Sakata, & A. Muto 47
Development of Micro Lancet Needle Made of Biodegradable Polymer for Medical
Treatment .....................S. Aoyagi, H. Izumi, T. Aoki, & M. Fukuda 53
Development of a Microdevice for Cellular Analysis Integrated with Microvalves
.....................M. Kanai, T. Munaka, H. Abe, H. Nakanishi, & S. Shoji 63
Endoscopic Therapeutic Device Using Focused Ultrasonic Small Transducer
.....................A. Yasui, Y. Haga, J. Chen, H. Iseki, M. Esashi, & H. Wada 69
Active Bending Electric Endoscope Using Shape Memory Alloy Coil Actuators
.....................W. Makishi, T. Matsunaga, M. Esashi, & Y. Haga 75
Paper
Fabrication of Micro-Lens Array using a Chemically Adsorbed Monomolecular Layer
.....................K. Okada, F. Oohira, M. Hosogi, G. Hashiguchi, Y. Mihara,K. Ogawa, & K. Shiwaku 82
Study on New Chain Encoding Scheme Suitable for Isodensity Contours
.....................Y. Kato & O. Nakamura 89
Polycrystalline Diamond Pressure Sensor using Spin Coat Seeding Method
.....................K. Mishima, R. Mori, & K. Takahashi 96
Mechanical Property Evaluation of Micro Cantilever Fabricated Using
Micro-Stereolithography ..................M. Miwa, H. Kawaguchi, K. Douoka, S. Yoneyama, S. Tuchitani, & Y. Koshimoto 102
MARCH 2007 Volume 127-E Number 3
Special lssue on "Sensor Symposium"
Foreword
.....................K. Imanaka 115
Special lssue Paper
Development of Electrostatic Actuator, which enables the Stable Contact Resistance Driven at Low Voltage
.....................T. Masuda, T. Seki, T. Miyaji, & F. Sato 116
Analysis of Electrically Induced Swirling Flow of Isotonic Saline in a Mixing Microchannel
.....................S. Hirahara, T. Tsuruta, Y. Matsumoto, & H. Minamitani 121
Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film
.....................J. Lu, T. Ikehara, M. Konno, R. Maeda, & T. Mihara 126
Fabrication and Characterization of a Schottky Barrier Diode-Type Ultraviolet Sensor using a ZnO Single Crystal
..................H. Endo, M. Sugibuchi, K. Takahashi, S. Goto,
T. Hasegawa, E. Ohshima, K. Meguro, K. Hane, & Y. Kashiwaba 131
Ambient Temperature Compensation of Thin Film Pirani Vacuum Sensor
.....................H. Yonekura & M. Kimura 136
Pn Junction Temperature-Sensor by Use of Superimposed AC Signal
.....................N. Takashima & M. Kimura 140
Reliability of Surface MEMS Structures Fabricated Using Standard CMOS Back-End-Of-Line Processes
..................Y. Hanaoka, T. Fujimori, K. Fujisaki, & H. Fukuda 144
The Displacement Measurement Device using a Comb-Drive Actuator
.....................K. Suzuki, K. Ayano, & G. Hashiguchi 148
Fabrication of MOSFET Capacitive Sensor using Spray Coating Method
.....................S. Aoyagi, Y. Matsui, K. Makihira, H. Tokunaga, M. Sasaki, & K. Hane 153
Photonic Bandgap Fiber for a Sensing Device
.....................J. Pawl~at, T. Sugiyama, T. Matsuo, & T. Ueda 160
Study of PEG Tether Length of Pegylated-Lipid Sensing Films in QCM Odor Sensors
.....................B. Wyszynski, P. Somboon, & T. Nakamoto 165
High Resolution CNT-FED and Improvement in Field-Emission Characteristics
.....................H. Kurachi, S. Uemura, J. Yotani, T. Nagasako, H. Yamada, T. Ezaki,
T. Maesoba, T. Nakao, M. Ito, A. Sakurai, H. Shimoda, Y. Saito, & H. Shinohara 170
Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor
.....................D. V. Dao, Q. Wang, & S. Sugiyama 177
Multi-Probe SPM using Interference Patterns for a Parallel Nano Imaging
.....................H. Koyama, F. Oohira, M. Hosogi, & G. Hashiguchi 182
Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process
.....................P. H. Pham, D. V. Dao, S. Amaya, R. Kitada, & S. Sugiyama 187
Letter
Opto-Tactile Pressure Sensor Using Surface Plasmon Resonance
.....................T. Numata, Y. Iwasaki, Y. Otani, & N. Umeda 192
APRIL 2007 Volume 127-‚d Number 4
Special lssue on "Self-Assembly in Fabrication of Sensors and Micromachines"
Special lssue Paper
Self-Assembly and Magnetic Actuation of Three Dimensional Micro Hinged Mechanisms
.....................H. Yamada,K. Suzuki, H. Miura, & H. Takanobu 207
Sequential Stacking Self-Assembly Using Interfacial Tension of Two Different Droplets
.....................Y. Higuchi, K. Sugano, T. Tsuchiya, & O. Tabata 214
Suppression of Stiction Force by All-Vapor Processes Using HF, Ozone, and HMDS for MEMS Devices
.....................Y. Taii, K. Kakushima, R. Yokokawa, S. Ono,T. Takahashi, K. Isamoto, C. Chong, H. Fujita, & H. Toshiyoshi 221
Paper
Effect of NO2 Gas Adsorption on Electrical Properties of Pyrolyzed Polymer
.....................K. Naka, T. Hashishin, J. Tamaki, & S. Konishi 228
Transport Properties of ZnSe-ITO Hetero Junction
.....................T. Ichibakase 234
Thermal Anemometer Using a Micro-Air-Bridge Heater with Chip Scale Wind Tunnel
.....................S. Yasaka, S. Ohya, M. Mitsuhashi, S. Kaneko, T. Ito, Y. Kanno,Y. Aikyo, S. Komuro, K. Ohbayashi, & M. Kimura 241
Measurement of Temperature and Wind Velocity Based on Multi-Functional Measurement Using a Thermistor
.....................A. Shimoyama & K. Shida 247
Conformal Coating of Organic Dielectric Film on Gold Electrodes in Microelectromechanical System Devices by Electrodeposition
.....................T. Sakata, Y. Okabe, K. Kuwabara, N. Sato,K. Kudou, K. Machida, & H. Ishii 253
Letter
Monitoring of Human Activity Using Plant Bioelectric Potential
.....................S. Hirobayashi, Y. Tamura, T. Yamabuchi, & T. Oyabu 258
MAY 2007 Volume 127-‚d Number 5
Special lssue on "Sensor Symposium 2"
Special lssue Paper
A Hemoglobin and Volume Measurement Sensor for Point of Care Testing Analyzer Using MEMS Process
.....................R. Tanabe, S. Hata, & A. Shimokohbe 267
Paper
Image Quality Degradation Reduction Method for Wireless Transmission of Compressed Moving Picture Using Weighted CDMA Channel
.....................T. Nakaya, M. Date, R. Tezuka, & A. Sugiura 272
Fiber-Delivered Acoustic 3D Imaging System with Laser-Induced Breakdown
.....................Y. Yasumuro, T. Sugiura, O. Oshiro, & K. Chihara 284
A Novel Multifunctional Angular Position Sensor with Magnetic Fluid
.....................W. Quan & K. Shida 290
Electrical Characteristics of Piezoelectric RF-MEMS Tunable Capacitor
.....................M. Nishigaki, T. Nagano, K. Abe, K. Itaya, & T. Kawakubo 297
JUNE 2007 Volume 127-‚d Number 6
Special lssue on "Integrating Functions and Smart Sensors"
Special lssue Paper
Design and Fabrication of a Thin-Film Silicon Photodetector with
Angular Sensitivity for Optical Micro-Encoder
.....................B. Choi, Y. Kanamori, & K. Hane 309
Development of a Capacitive Accelerometer Using Parylene (Part 1)
- Study on Resonant Frequency of Parylene Suspended Structure -
.....................S. Aoyagi, D. Yoshikawa, Y. Isono, & Y. C. Tai 314
Development of a Capacitive Accelerometer Using Parylene (Part 2)
- Measurement Principle Using Fringe Electrical Field and Characterization -
.....................S. Aoyagi, D. Yoshikawa, Y. Isono, & Y. C. Tai 321
Investigation on the Diode Temperature-Sensor with
the Output Voltage Proportional to the Absolute Temperature
.....................N. Takashima & M. Kimura 328
JUJY 2007 Volume 127-‚d Number 7
Paper
Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications
.....................J. Liang, F. Kohsaka, T. Matsuo, & T. Ueda 337
Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy
Integrated with Micro-Droplet Ejection System
.....................S. Ikezawa, M. Wakamatsu, & T. Ueda 343
Optimization of PZT Diaphragm Pump for the Convective Gyroscope
.....................V. T. Dau, D. V. Dao, T. X. Dinh, T. Shiozawa, & S. Sugiyama 347
Detection of Smoldering Fire Using Tin Oxide Gas Sensors
.....................T. Higashino, A. Sawada, T. Oyabu, Y. Takei, H. Nanto, & K. Toko 353
Measurement of Bad-Smell Distribution Using Sensing Network Composed of Nodes
with Gas Detector Tubes and CCD Image Sensors
..................T. Nakamoto, Y. Tanaka, & H. P. Ninh 359
AUGUST 2007 Volume 127-‚d Number 8
Special lssue on "Silicon Chemical Sensors"
Special lssue Paper
Automation of pH Measurement Using a Flow-Through Type Differential pH Sensor System Based on pH-FET
.....................S. Mohri, M. Nakamura, & K. Naruse 367
Paper
Optimized Design of Plastic Package for InSb Thin-Film Magneto-Resistance Devices for Gear-Tooth Rotation Detection
.....................A. Okamoto, K. Nishimura, H. Goto, K. Yoshida, & I. Shibasaki 371
Multi-Channel Taste Sensor with LB Films
.....................T. Arata, T. Hirata, & M. Akiya 376
Study for Identification of Mixed Taste Materials by the Taste Sensor with LB Film
.....................R. Kikuchi, T. Hirata, & M. Akiya 382
SEPTEMBER 2007 Volume 127-‚d Number 9
Review
ptics for Encoders and Integration
.....................K. Hane 391
Paper
Particle Element and Size Simultaneous Measurement Using LIBS
.....................M. Wakamatsu, S. Ikezawa, & T. Ueda 397
Fundamental Study of Multi-Functional Sensors by Using Optical Branching Circuit with Loop Waveguide
.....................M. Fujimoto, W. Tanaka, H. Mae,
K. Yoshimura, M. Hotta, M. Matsunaga, & K. Ono 403
Development of Highly Sensitive Temperature Sensor Using Ni foil
.....................S. Ichida, T. Okamoto, T. Yamaguchi, & H. Kumehara 409
OCTOBER 2007 Volume 127-‚d Number 10
Review
Expecting the Future of Society E
.....................T. Moriizumi 421
Paper
Response Characteristics of Plant Bioelectric Potential to
Light Intensity Indoor and Outdoor
.....................T. Shimbo, M. Fujii, A. Sawada, T. Oyabu, & H. Kimura 425
High Sensitive Tilt Sensor for Quartz Micromachining
.....................F. Kohsaka, J. Liang, T. Matsuo, & T. Ueda 431
The Judgement Formula of the Adhesion on the Circular Plate with Beams
.....................S. Tezuka & N. Kanbara 437
High Aspect Ratio Si Prismatic Shape Forming Technology Using
Crystallographic Orientation-Dependent Etching
.....................S. Nagao, F. Oohira, M. Hosogi, & G. Hashiguchi 443
NOVEMBER 2007 Volume 127-‚d Number 11
Special lssue on "Sensing Systems for Transportations"
Foreword
.....................I. Shibasaki 459
Special lssue Review
Trend of Sensing Technology on Railway Operation
.....................M. Matsumoto 461
Sensing Technologies for Railway Track Maintenance
.....................H. Takai 467
Special lssue Paper
Environmental Monitoring System for Home-Delivery Service of Packages by Using MEMS Sensors
.....................T. Fujita, K. Masaki, & K. Maenaka 472
Application of Sensor Technologies for the Novel Railway Signal Control System
.....................Y. Fukuta, T. Kunifuji, N. Hiura, & M. Matsumoto 478
Development of Maintenance Techniques of Railway Structures Applying Sensor and Information Technologies
.....................S. Yamada, T. Nihei, Y. Kobayashi, K. Minegishi,
T. Nakayama, & N. Sato 486
Applications of Voice/Sound Sensors in Railroad Field
...............I. Shibasaki & M. Shozakai 493
Special Issue Material
The Possibility of Train Speed and Position Detection of Magneto-Resistance Elements
.....................K. Nishimura, S. Yamada, H. Goto, A. Okamoto, & I. Shibasaki 499
Letter
Sputter Deposited Zinc Oxide Photoconductive Antenna on Silicon Substrate for Sub-Terahertz Time-Domain Spectroscopy
.....................K. Iwami, T. Ono, & M. Esashi 508
DECEMBER 2007 Volume 127-‚d Number 12
Special lssue on "Application of Ferroelectric Materials to Sensors and Micromachines"
Special lssue Review
Recent Research Development of Ferroelectric Thin Films
.....................M. Okuyama 513
Special lssue Paper
MEMS Deformable Mirrors for Adaptive Optics Actuated by Piezoelectric PZT Films
.....................I. Kanno, T. Kunisawa, T. Suzuki, & H. Kotera 518
An Experimental Two-Axial Actuator for a Tactile Display Capable of Presenting Pressure and Slippage Sensations
.....................M. Ohka, Y. Sawamoto, S. Matsukawa,
T. Miyaoka, & Y. Mitsuya 524
Neural Control for Two-Axial Micro Piezoelectric Actuators
.....................M. Ohka, Y. Sawamoto, S. Matsukawa,
T. Miyaoka, & Y. Mitsuya 533
High-k Dielectrics for Application in Broadband Radio Frequency-Microelectromechanical System Capacitive Shunt Switch
.....................Y. Zhang, J. Lu, M. Ichiki, K. Onodera, & R. Maeda 540
Development of Remote-Type Haptic Catheter Sensor System Using Piezoelectric Transducer
.....................M. Haruta, Y. Murayama, & S. Omata 546
Preparation of <001> Oriented PZT Thin Films and the Applications to Micro Piezoelectric Devices
.....................R. Takayama, E. Fujii, T. Kamada, A. Murata, T. Hirasawa, A. Tomozawa, S. Fujii, H. Torii, & K. Nomura 553
Special lssue Letter
Reduction of Damage in PZT Thin Films Derived from Wet Etching with LaNiO3 Conductive Oxide Thin Films
.....................T. Kobayashi, R. Kondou, M. Ichiki, & R. Maeda 559