Paper

Thick Oxide Layer Fabrication Process for Silicon RF ICs

...................................K. Tsuruta, T. Shibata, & N. Kawahara 1

Development of Four-Axis Contact Force Sensor with a Flexible Contact Part

...................................N. Saito, T. Satoh, S. Kajikawa, & H. Okano 7

A Coil-Based Tactile Sensor for Material Discrimination and Contact Force Measurement : An Application of Multifunctional Sensing Technique

...................................Z. Chi & K. Shida 15

Quantitative Detection of Amino Acid, Organic Acid and Sugar using an Electrode-separated Piezoelectric Quartz Crystal

...................................T. Nomura, S. Yamamura, & Y. Arikawa 21

Polyimide Film Micromachining by Wet-Etching Technology

...................................H. Ji-song, T. Zhi-yong, K. Sato, & M. Shikida 27

Letter

Flow-induced Vibration Measurement System for Head Gimbal Assembly

...................................S. Nakamura, T. Miyazaki, H. Matsuoka, R. Aduma, M. Abe, & H. Takahashi 37

Special Issue on Trends of Sensing Technologies for Bad Smell and Environmental Pollution

Special Issue Review

Odor Measurement

...................................Y. Iwasaki 45

Special Issue Paper

Simple Analytical Method for the Determination of Trichloroethylene by Applying Oxidizing Agents to the Quartz Crystal Microbalance Sensor

...................................K. Noda, K. Matsunobu, H. Aizawa, S. Kurosawa, R. Naganawa, & H. Tao 50

High Temperature and High Sensitive NOx Gas Sensor with Pt/SnO2/SiC/Ni Heterojunction Structure

.........................G. Wei, S.A.Khan, L. Shi, Y. Hasegawa, & T. Katsube 57

A Study of Gas Interference and Sensitivity Increase in Optical Bad Smell Sensing System Using Gas Detector Tube

...................................Y. Tanaka, M. Yoshioka, T. Nakamoto, & T. Moriizumi 64

Effect of Simultaneous Modification with Metal Loading and Mesoporous Layer on H2 Sensing Properties of SnO2 Thick Film Sensors

...................................Y. Shimizu, K. Tsumura, T. Hyodo, & M. Egashira 70

Detection of Water Pollutant Using Surface-Polarity Controlled Sensor

...................................K. Hayashi, H. Tanaka, K. Hayama, R. Izumi, & K. Toko 75

Paper

Fluidic MEMS based Biosensor for the Detection of Nucleic acids by using Schizophyllan

...................................T. Isoda, S. Hasegawa, K. Noguchi, K. Takamatsu, F. Itho, T. Kimura, K. Sakurai, & S. Shinkai 81

High Speed and Wide Range Rapid Prototyping System Using a Digital Micromirror Device

...................................Y. Tomita, A. Iwasawa, & K. Takahashi 89

Evaluation of the Effect of the Squeeze Film to a Capacitive Micro Accelerometer for Detection of Acoustic Signals

Special Issue on 2004 Annual Meeting on Sensors and Micromachines Society

Preface to the Special Issue on 2004 Annual Meeting of Sensors and Micromachines Society

...................................H. Nanto 107

Special Issue Paper

Revisit the Calibration of Inertia Sensors

...................................A. Umeda, M. Onoe, K. Sakata, T. Fukushima, K. Kanari, & T. Kobayashi 108

Purification Effects of Golden Pothos and Peace Lily for Indoor Air-Pollutants and its Application to a Real Environment

...................................A. Sawada, T. Yoshida, H. Kuroda, T. Oyabu, & K. Takenaka 118

Thermal Anemometer Using a Micro-Air-Bridge Heater

...................................S. Yasaka, S. Ohya, M. Mitsuhashi, S. Kaneko, K. Ito, Y. Kanno, Y. Aikyo, S. Komuro, K. Ohbayashi, & M. Kimura 124

Chemical Analysis for Transient Response of Semiconductor Sensor by Autoregressive Model

...................................S. Seto, H. Kawabe, Y. Shimomura, L. Shi, T. Katsube, & T. Oyabu 129

Acoustic Amplifier Using MEMS Technology

.........................M. Tanaka, M. Terada, & S. Konishi 135

Paper

Taste Sensor Response Dependence on Metal Electrode Using LB Film

...................................S. Takafuji & M. Akiya 141

Special Issue on Sensing Technologies on Biometrics

Special Issue Paper

Investigation of the Optimum Farming Temperature for Grifola frondosa and Growth Promotion Using the Bio-Electric Potential as an Index

...................................H. Yanagibashi, J. Hirama, M. Matsuda, & T. Miyamoto 159

The Functional Sensing of a Bone with Wave Propagation in Tabescular Structure

...................................O. Oshiro & S. Katsuhara 165

Repetitive Adjustment to Estimate the Electric Current Sources in a Nerve Fiber with Magnetic Field Measurement

...................................T. Hayami, Y. Mishima, & O. Hiwaki 170

Projection-Based Assistance for Ultrasonic Diagnosis

...................................Y. Yasumuro, A. Prayitono, K. Kohyama, M. Imura, Y. Manabe, O. Oshiro, & K. Chihara 176

Paper

Fabrication of a Tantalum-Nitride Thin-Film Resistor with a Low-Variability Resistance

...................................T. Akashi 182

Development of BBD Adding-Delay Architecture for Ultrasonic Micro Array Sensor

...................................T. Tanaka, Y. Mo, A. Tsuchitani, K. Inoue, S. Arita, Y. Suzuki, K. Yamashita, & M. Okuyama 188

Development of Ni Grid Mask for Microfocus X-ray Inspection Apparatus

...................................M. Yasui, H. Sasaki, Y. Hirabayashi, & M. Wakuda 196

The Proposal of the New Method for Concentration Discrimination of Alcohol Using the Ultrasonic Sensor

...................................K. Tokitou & K. Shida 200

Paper

Improvement of Measurement Accuracy in Environmental Monitoring System Based-on Semiconductor Gas Sensor

...................................H. Ishida, S. Kaneko, W. Tsujita, A. Yoshino, & T. Moriizumi 245

Bioelectric Potential Characteristic of Potted Plant for Temperature Change in a Residential Space

...................................T. Shimbo, T. Oyabu, Y. Hasegawa, S. Hirobayashi, & K. Takenaka 253

Detection of a Solitude Senior's Irregular States Based on Learning and Recognizing of Behavioral Patterns

...................................S. Aoki, M. Onishi, A. Kojima, & K. Fukunaga 259

Research of Ion Drag Micro Pump with Perforated Thin Film Electrodes Having a Lot of Hole

...................................M. Matsumoto, S. Hayakawa, & N. Tsuchida 266

Development of the 3-axis Angular Velocity Sensor Using a Piezoelectric Element

...................................K. Okada, T. Kakutani, & Y. Matsu 272

Letter

Characteristics of Photovoltaic Lead Lanthanum Zirconate Titanate Ceramics in a Layered Film Structure Design

...................................M. Ichiki, Y. Morikawa, K. Nonaka, T. Nakada, Y. Mabune, & R. Maeda 278

Development of Exposure Method for Wiring Pattern on High Aspect Structures

Special Issue on Characterization of MEMS/NEMS Material Property and Reliability

Special Issue Review

Reliability Characterization of MEMS Materials

...................................T. Tsuchiya 289

Special Issue Paper

Inelastic Constitutive Relationship of Electroplated Nickel Films at Elevated Temperatures for Design of Micro Connector

...................................Y. Isono, J. Tada, T. Unno, S. Sugiyama, & T. Toriyama 294

Evaluation of the Fracture Toughness of Micro-Sized Single Crystal Silicon Wafers

...................................S. Koyama, K. Takashima, & Y. Higo 302

Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon

...................................T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, & K. Sato 307

Effect of Ar Gas Pressure on Mechanical Properties of Sputtered Ti Thin Films

...................................H. Ogawa, S. Kaneko, K. Suzuki, & R. Maeda 313

Paper

An Optical Distance Sensor Fabricated by Micromachining Technology

...................................T. Oka, H. Nakajima, T. Nakashima, S. Kiyono, U. Hollenbach, U. Wallrabe, & J. Mohr 319

Paper

Optical Dynamic Gain Equalizer Using Electrostatic Controlled Linear Inchworm Actuator

...................................A. Oshima, N. Kinoshita, M. Munechika, S. Konishi, T. Sano, & M. Katayama 331

Novel Micro Gyroscope with High-Q Rotational Vibration Structure

...................................S. Ioku, H. Araki, H. Kohara, T. Fujita, K. Maenaka, & Y. Takayama 337

Modeling Analysis of a Six-axis Force/Tactile Sensor for Robot Fingers and a Method for Decreasing Error

...................................M. Luo, E. Shimizu, F. Zhang, & M. Ito 343

Vertical Diaphragm Electrostatic Actuator for a High Density Ink Jet Printer Head

...................................T. Norimatsu, S. Tanaka, & M. Esashi 350

Development of Thin-Film Ta-Si-O-N Resistor Heater

...................................Y. Tanaka, K. Takeyama, T. Terazaki, & O. Nakamura 355

Paper

Design, Fabrication and Performance study of Piezoelectric Crystal Based Acoustic Sensor suitable for Aerospace application

...................................V. D. Chitnis, M. Singaperumal, M. M. Nayak, & K. Rajanna 369

Mechanical Properties of Polycrystalline Titanium Nitride Films Measured by XRD Tensile Testing

...................................T. Namazu, S. Inoue, H. Takemoto, & K. Koterazawa 374

Development of Two Types of POF Amine Sensors and Their Applications to Optical Sensing of Fish-food Freshness

...................................M. Morisawa, T. Watanabe, & S. Muto 380

A High Performance MEMS Flow Sensor Based on a New Sensing Method

...................................Y. Ariyoshi, K. Nakamura, M. Tsugai, & M. Takeda 387

3-D Assembly Methods to Fabricate Multi-Metal Electrodes Implanted PDMS Structures for Micro Flow Devices

.........................M. Ishizuka, M. Abe, H. Houjou, J. Mizuno, & S. Shoji 393

Special Issue on MEMS/NEMS Technology for Fuel Cell Applications

Review

Sensor Systems for Detecting Gas Plumes - Robots and Sensor Network

...................................T. Moriizumi & H. Ishida 403

Special Issue Paper

Catalyst Metal Deposition into Porous Silicon Layer

...................................M. Hayase, D. Saito, & T. Hatsuzawa 407

Application of Screen-Printed Catalytic Electrodes to Mems-Based Fuel Cells

...................................S. Tanaka, K. B. Min, N. Kato, H. Oikawa, & M. Esashi 413

Microvalve to Control Fuel for Portable Fuel Cells

...............K. Yoshida, Y. Hagihara, M. Saitoh, S. Tomonari, S. Tanaka, & M. Esashi 418

Letter

Three Dimensional Structures of Negative-tone Photoresist by Binary Optics

...................................K. Hanai, S. Shimizu, & Y. Matsumoto 424

MEMS and Bio Nanotechnology

...................................H. Fujita 437

Thin-Film Semiconductor Hall Effect Biosensors for Medical Applications

....................A. Sandhu 444

Development of AFM Tweezers for Manipulation of Nanometer Size Objects

Micro Linear Pump with Electromagnetic Actuator

...................................K. Suzumori, H. Furusawa, T. Kanda, Y. Yamada, & T. Nagata 461

Shaking Catalysts Accelerating Chemical Reaction in Micro Reactors

...................................K. Suzumori, T. Nagata, T. Kanda, Y. Sakata, & A. Muto 467

Development of Optically Controlled Micromanipulation Systems by using Two-photon Microstereolithography

...................................Y. Hiratsuka & S. Maruo 473

Paper

Comparative Performance Study of Strain Gauge Sensors for Ion Thrust Measurement

...................................R. John Stephen, K. Rajanna, Vivek Dhar, K. G. Kalyan Kumar, & S. Nagabushanam 479

High Sensitive Formaldehyde Gas Sensor Prepared by R.F. Induction Plasma Deposition

Method