IEEJ Transactions on Sensors and Micromachines
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This page consist of full text of English Papers which were published in our transactions.
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| JANUARY 2004 Volume 124-E Number 1 |
| Title |
Author |
Page |
Extended Summary |
Full Paper |
| Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata |
T. Kakinaga, O. Tabata, N. Baba, Y. Isono, J. G. Korvink, & K. H. Ehrmann |
7 |
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| Characteristics of Grain Boundaries in Polycrystalline Si Films Fabricated by Chemical Vapor Deposition and Subsequent Annealing |
Y. Nakano, T. Tsuchiya, & J. Sakata |
14 |
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| An Electrostatic Microactuator for Positioning a Hard-Disk Drive Magnetic Head |
T. Yoshino, H. Toshiyoshi, M. Mita, D. Kobayashi, & H. Fujita |
21 |
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| FEBRUARY 2004 Volume 124-E Number 2 |
| Title |
Author |
Page |
Extended Summary |
Full Paper |
| A Study of the Method to Dice the Microdevice Processed with Si-Micromachining |
I. Naniwa & Y. Nezu |
37 |
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| Packaging Technology for Sensor and Actuator MEMS Devices |
T. Masai, S. Sasaki, & K. Imanaka |
43 |
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| Determination of Glucose Concentration in Yeast Culture Medium |
S. Hara, T. Kishimoto, M. Muraji, H. Tsujimoto, M. Azuma, & H. Ooshima |
49 |
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| The Deposition of a-C:H Films by Pulsed Laser Ablation |
X. Tian, D. K. Mishra, T. Soga, T. Jimbo, & M. Umeno |
54 |
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| MARCH 2004 Volume 124-E Number 3 |
| Title |
Author |
Page |
Extended Summary |
Full Paper |
| Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer |
H. Kawata & M. Yasuda |
69 |
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| Stiction Recovery of Silicon Oxide Cantilevers with Heating Elements for MEMS |
Y. Kobayashi & K. Fushinobu |
75 |
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| A New Capacitive Type Humidity Sensor Having Micro Interdigital Electrodes |
T. Ogura, Y. Sadaoka, & T. Kuroiwa |
81 |
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| An Electro-Statically Driven Display Device Using Evanescent Coupling Between Sheet Waveguide and Multi-Cantilevers |
T. Oguchi, S. Tanaka, M. Hayase, & T. Hatsuzawa |
87 |
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| An Analysis of the Quartz Crystal Resonators for Chemical Sensors-Applications for the Frequency-Temperature Characteristics in Solution- |
M. Kuroiwa & M. Nakazawa |
93 |
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| APRIL 2004 Volume 124-E Number 4 |
| Title |
Author |
Page |
Extended Summary |
| A Micro Sensing System for Blood Gas Analysis Constructed with Stacked Modules |
S. Kojima & H. Suzuki |
111 |
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| Piezoelectric Properties of Ferroelectric Epitaxial Films with High Curie Temperature |
T. Yoshimura & S. T. McKinstry |
117 |
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| Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling |
K. Yamashita & M. Okuyama |
124 |
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| Development of Micro-Dies Using Titanium Super Plastic Alloy |
H. Yoshimura, F. Oohira, G. Hashiguchi, T. Katayama, H. Hayashi, & Y. Mihara |
129 |
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| Microfabrication Technology for Millimeter-Wave Photonic Systems on Si |
H. Ishii, T. Minotani, Y. Royter, S. Yagi, K. Kudou, M. Yano, T. Nagatsuma, K. Machida, & H. Kyuragi |
136 |
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| Fabrication and Characterization of Micro Sensors for Detecting Specific Sonic Wave Using PZT Film on Si Diaphragm and Cantilever |
S. Murakami, K. Inoue, Y. Suzuki, S. Takamatsu, K. Yamashita, & M. Okuyama |
143 |
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| MAY 2004 Volume 124-E Number 5 |
| Title |
Author |
Page |
Extended Summary |
| Dielectric Breakdown Mechanism of Hf-Silicate High-k Gate Dielectrics |
H. Satake & T. Yamaguchi |
167 |
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| A Consideration for the Evaluation of MEMS Devices Low Stress Packaging for MEMS Devices with Piezo-Resistive Pressure Sensing Elements |
S. Akai, K. Goto, H. Miyajima, & S. Takami |
172 |
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| A New Speedometer Design for a Vehicle using K-Band Doppler Sensor |
T. Araki, D. Hasegawa, T. Nagase, M. Araki, & H. Ono |
179 |
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| Development of Pressure Sensors for High Temperature Operation |
M. Yoshitake, T. Nosaka, T. Kusaka, Y. Suzuki, H. Takenaka, & M. Sawamura |
183 |
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| JUNE 2004 Volume 124-E Number 6 |
| Title |
Author |
Page |
Extended Summary |
| MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror |
K. Isamoto, A. Morosawa, M. Tei, H. Fujita, & H. Toshiyoshi |
213 |
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| A Cylindrical Capacitance Sensor with Three Electrodes for Liquid-Level Measurement in Two Different Conditions |
G. Lu & K. Shida |
219 |
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| JULY 2004 Volume 124-E Number 7 |
| Title |
Author |
Page |
Extended Summary |
| Development of High TCR Platinum Thin Films |
A. Yamashita, H. Ohji, T. Fukami, & K. Tsutsumi |
242 |
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| AUGUST 2004 Volume 124-E Number 8 |
| Title |
Author |
Page |
Extended Summary |
| Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroac-tive Polymers |
R. Kornbluh, R. Pelrine, H. Prahlad, & S. Chiba |
266 |
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| Study on Voice Recognition Utilizing Bone-Conducted Voice |
Y. Yamada, Y. Hijikata, N. Kawahara, Y. Fujisaka, & S. Nakagawa |
272 |
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| Electromagnetic Micro Actuator using Micro Coils for Hard Disk Drives |
I. Naniwa, S. Nakamura, K. Sato, & T. Arisaka |
278 |
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| Micro Device for Local Temperature Control under Microscope |
H. Arata, S. Takeuchi, H. Noji, & H. Fujita |
284 |
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| Multi-Information Monitoring of Engine Oil Degradation Using a Single Optical Sensor System |
L. Zhu & K. Shida |
289 |
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| SEPTEMBER 2004 Volume 124-E Number 9 |
| Title |
Author |
Page |
Extended Summary |
| Development of Novel Coupling Method for Biochemical IC Family and Micro Chemical Devices |
T. Hasegawa & K. Ikuta |
305 |
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| Material Discrimination by Means of Multifunctional Touch-Sensor Based on Piezoelectric Ceramics |
A. Kimoto & K. Shida |
311 |
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| Generation of Random Numbers by Micromechanism |
M. Mita, H. Toshiyoshi, M. Ataka, & H. Fujita |
316 |
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| Study of Bad-Smell Sensing Using Gas Detector Tube |
Y. Tanaka, M. Yoshioka, T. Nakamoto, & T. Moriizumi |
321 |
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| A CAD-based Vision System using an ID-Tag and the Network |
M. Nakagawa, K. Baba, T. Kugimiya, M. Sato, & H. Hontani |
327 |
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| OCTOBER 2004 Volume 124-E Number 10 |
| Title |
Author |
Page |
Extended Summary |
| Fabrication of Movable Mirror-Array Structure Using Hot-Embossing for Optical Switch Applications |
T. Ikehara, X. C. Shan, M. Otomo, & R. Maeda |
354 |
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| Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding |
R. Mori, K. Hanai, & Y. Matsumoto |
359 |
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| Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure |
D. Uchida, M. Kanai, T. Nishimoto, & S. Shoji |
364 |
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| A Surface Movement Aircraft Passage Sensor Using a GPS Receiver and an Accelerometer |
S. Okada & Y. Shinohara |
369 |
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| Ku-Band Silicon Passive Devices Fabricated by Dielectric-Air-Metal (DAM) Cavity Process |
Y. Yoshida, T. Nishino, S. S. Lee, Y. Suehiro, K. Miyaguchi, S. Soda, T. Fukami, O. Ishida, & M. Kimata |
375 |
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| Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel) |
K. Minami & S. Yano |
381 |
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| Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding |
C. Yoshimura, H. Ishikawa, S. Furuta, H. Aoki & S. Sugiyama |
387 |
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| NOVEMBER 2004 Volume 124-E Number 11 |
| Title |
Author |
Page |
Extended Summary |
| Amperometric Gas Sensor Using Gas Diffusion Membrane Consisting of Garbon Powder and Fluorocarbon |
Y. Mizutani, H. Matsuda, T. Ishiji, & N. Furuya |
402 |
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| Discrimination of Mixed Taste Solutions using Ultrasonic Wave and Soft Computing |
Y. Kojima, F. Kimura, T. Mikami, & M. Kitama |
407 |
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| The Discrimination Between Water and Oil Using Ultrasonic Sensor |
K. Tokitou & K. Shida |
415 |
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| Improvement of the Gas Selectivity of Semiconductor Thin-Film Gas Sensors |
H. Imai & K. Hara |
421 |
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| Sensing Performances of Mixed-Potential Type NOx Sensor Using Metal-Oxide Electrode |
T. Ono, M. Hasei, Y. Yan, A. Kunimoto, & N. Miura |
428 |
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| A Non-contact Multifunctional Sensor for Level and Concentration Measurement of Solution |
G. Lu & K. Shida |
435 |
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| DECEMBER 2004 Volume 124-E Number 12 |
| Title |
Author |
Page |
Extended Summary |
| Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope |
O. Nakabeppu & T. Kanda |
453 |
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| An Ultrasound Catheter using LIB Phenomenon |
O. Oshiro, Y. Yasumuro, T. Sugiura, K. Chihara, & S. Kawata |
459 |
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| Absolute and Noncontact Type Displacement Sensor using Transmission Line for Detecting Multiple Targets |
Y. Okubo, T. Uebo, & T. Iritani |
464 |
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| Statistical Analysis of Plant Bioelectric Potential for Communication with Humans |
T. Shimbo, T. Oyabu, S. Hirobayashi, & K. Takenaka |
470 |
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| Study on a Gas Sensor with Low Power Consumption Using Microbridge Structure |
M. Kimura & K. Hara |
476 |
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| Copyright (C) 2004 The Institute of Electrical Engineers of Japan. All
Rights Reserved |
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