Paper

Through-Hole Interconnections Filled with Au-Sn Solder by Molten Metal Suction Method

...................................S. Yamamoto, T. Suemasu, K. Itoi, H. Wada, & T. Takizawa 1

Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata

...................................T. Kakinaga, O. Tabata, N. Baba, Y. Isono, J. G. Korvink, & K. H. Ehrmann 7

Characteristics of Grain Boundaries in Polycrystalline Si Films Fabricated by Chemical Vapor Deposition and Subsequent Annealing

....................Y. Nakano, T. Tsuchiya, & J. Sakata 14

An Electrostatic Microactuator for Positioning a Hard-Disk Drive Magnetic Head

...................................T. Yoshino, H. Toshiyoshi, M. Mita, D. Kobayashi, & H. Fujita 21

Letter

Preparation of Rectangular Column State Titanium Oxide Submicron Fine Particles

...................................A. Hioki, M. Kimoto, & Y. Suzuki 28

A Measurement Method for the Power Generation Characteristics of Piezoelectric Elements

...................................M. Ichiki, R. Maeda, & T. Kitahara 30

Special Issue on "Assembly and Packaging of MEMS Devices"

Special Issue Paper

A Study of the Method to Dice the Microdevice Processed with Si-Micromachining

...................................I. Naniwa & Y. Nezu 37

Packaging Technology for Sensor and Actuator MEMS Devices

...................................T. Masai, S. Sasaki, & K. Imanaka 43

Paper

Determination of Glucose Concentration in Yeast Culture Medium

..............................S. Hara, T. Kishimoto, M. Muraji, H. Tsujimoto, M. Azuma, & H. Ooshima 49

The Deposition of a-C:H Films by Pulsed Laser Ablation

...................................X. Tian, D. K. Mishra, T. Soga, T. Jimbo, & M. Umeno 54

Paper

Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer

...................................H. Kawata & M. Yasuda 69

Stiction Recovery of Silicon Oxide Cantilevers with Heating Elements for MEMS

...................................Y. Kobayashi & K. Fushinobu 75

A New Capacitive Type Humidity Sensor Having Micro Interdigital Electrodes

...................................T. Ogura, Y. Sadaoka, & T. Kuroiwa 81

An Electro-Statically Driven Display Device Using Evanescent Coupling Between Sheet Waveguide and Multi-Cantilevers

...................................T. Oguchi, S. Tanaka, M. Hayase, & T. Hatsuzawa 87

An Analysis of the Quartz Crystal Resonators for Chemical Sensors-Applications for the Frequency-Temperature Characteristics in Solution-

Special Issue on "Chemical Sensors for the Progress of Healthcare"

Special Issue Paper

A Micro Sensing System for Blood Gas Analysis Constructed with Stacked Modules

...................................S. Kojima & H. Suzuki 111

Paper

Piezoelectric Properties of Ferroelectric Epitaxial Films with High Curie Temperature

...................................T. Yoshimura & S. T. McKinstry 117

Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling

...................................K. Yamashita & M. Okuyama 124

Development of Micro-Dies Using Titanium Super Plastic Alloy

...............H. Yoshimura, F. Oohira, G. Hashiguchi, T. Katayama, H. Hayashi, & Y. Mihara 129

Microfabrication Technology for Millimeter-Wave Photonic Systems on Si

...................................H. Ishii, T. Minotani, Y. Royter, S. Yagi, K. Kudou, M. Yano, T. Nagatsuma, K. Machida, & H. Kyuragi 136

Fabrication and Characterization of Micro Sensors for Detecting Specific Sonic Wave Using PZT Film on Si Diaphragm and Cantilever

....................S. Murakami, K. Inoue, Y. Suzuki, S. Takamatsu, K. Yamashita, & M. Okuyama 143

Special Issue Letter

Micro-Analysis System for Glucose with an Electrochemically Actuated Sampling Mechanism

...................................O. Kawatoko, R. Yoneyama, & H. Suzuki 148

Measurements of Taste Solutions using Ultrasonic Wave and Surface Plasmon Resonance

...................................Y. Kojima 150

Letter

A Method for Signal Supplementation for Sensor Fusion

...................................S. Serikawa, M. Gotoh, M. Miyauchi, & T. Shimomura 152

Paper

Dielectric Breakdown Mechanism of Hf-Silicate High-k Gate Dielectrics

...................................H. Satake & T. Yamaguchi 167

A Consideration for the Evaluation of MEMS Devices Low Stress Packaging for MEMS Devices with Piezo-Resistive Pressure Sensing Elements

...................................S. Akai, K. Goto, H. Miyajima, & S. Takami 172

A New Speedometer Design for a Vehicle using K-Band Doppler Sensor

...................................T. Araki, D. Hasegawa, T. Nagase, M. Araki, & H. Ono 179

Development of Pressure Sensors for High Temperature Operation

.........................M. Yoshitake, T. Nosaka, T. Kusaka, Y. Suzuki, H. Takenaka, & M. Sawamura 183

Review

A Three-Dimensional Magnetic Field Measurement for Magnetoencephalogram

...................................K. Kobayashi & Y. Uchikawa 199

Low Temperature Preparation of Functional Oxide Thin Film by Sol-gel - Hydrothermal Process-Application to Si ULSI Monolithic Process for Large-Scale Integrated Sensor, Actuator, and Memory-

...................................M. Noda & M. Okuyama 203

Field Emission Electron and its Applications

...................................H. Nakane & H. Adachi 207

Paper

MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror

...................................K. Isamoto, A. Morosawa, M. Tei, H. Fujita, & H. Toshiyoshi 213

A Cylindrical Capacitance Sensor with Three Electrodes for Liquid-Level Measurement in Two Different Conditions

...................................G. Lu & K. Shida 219

Review

Kansei Biosensor and IT Society

...................................K. Toko 229

Micro-Hall Devices for Scanning Hall Probe Microscopy

...................................A. Sandhu 233

International Standardization of Sensors and Micromachines

...................................K. Ohwada 238

Paper

Development of High TCR Platinum Thin Films

...................................A. Yamashita, H. Ohji, T. Fukami, & K. Tsutsumi 242

Arrayed AFM Probes for Parallel Lithography

Special Issue on "MEMS Technologies in Ubiquitous Computing World"

Preface to the Special Issue on "MEMS Technologies for Ubiquitous Computing"

...................................R. Maeda 265

Special Issue Paper

Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroac-tive Polymers

...................................R. Kornbluh, R. Pelrine, H. Prahlad, & S. Chiba 266

Study on Voice Recognition Utilizing Bone-Conducted Voice

...................................Y. Yamada, Y. Hijikata, N. Kawahara, Y. Fujisaka, & S. Nakagawa 272

Electromagnetic Micro Actuator using Micro Coils for Hard Disk Drives

...................................I. Naniwa, S. Nakamura, K. Sato, & T. Arisaka 278

Paper

Micro Device for Local Temperature Control under Microscope

...................................H. Arata, S. Takeuchi, H. Noji, & H. Fujita 284

Multi-Information Monitoring of Engine Oil Degradation Using a Single Optical Sensor System

...................................L. Zhu & K. Shida 289

Paper

Development of Novel Coupling Method for Biochemical IC Family and Micro Chemical Devices

...................................T. Hasegawa & K. Ikuta 305

Material Discrimination by Means of Multifunctional Touch-Sensor Based on Piezoelectric Ceramics

...................................A. Kimoto & K. Shida 311

Generation of Random Numbers by Micromechanism

...................................M. Mita, H. Toshiyoshi, M. Ataka, & H. Fujita 316

Study of Bad-Smell Sensing Using Gas Detector Tube

...................................Y. Tanaka, M. Yoshioka, T. Nakamoto, & T. Moriizumi 321

A CAD-based Vision System using an ID-Tag and the Network

...................................M. Nakagawa, K. Baba, T. Kugimiya, M. Sato, & H. Hontani 327

Letter

Development of a Microsensor for Measurement of Concentrations of Single Drop Solutions

Special Issue on Polymer-MEMS

Special Issue Review

Polymer-MEMS and Its Applications

...................................S. Shoji 349

Special Issue Paper

Fabrication of Movable Mirror-Array Structure Using Hot-Embossing for Optical Switch Applications

...................................T. Ikehara, X. C. Shan, M. Otomo, & R. Maeda 354

Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding

....................R. Mori, K. Hanai, & Y. Matsumoto 359

Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

...................................D. Uchida, M. Kanai, T. Nishimoto, & S. Shoji 364

Paper

A Surface Movement Aircraft Passage Sensor Using a GPS Receiver and an Accelerometer

...................................S. Okada & Y. Shinohara 369

Ku-Band Silicon Passive Devices Fabricated by Dielectric-Air-Metal (DAM) Cavity Process

..............................Y. Yoshida, T. Nishino, S. S. Lee, Y. Suehiro, K. Miyaguchi, S. Soda, T. Fukami, O. Ishida, & M. Kimata 375

Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)

...................................K. Minami & S. Yano 381

Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding

...................................C. Yoshimura, H. Ishikawa, S. Furuta, H. Aoki & S. Sugiyama 387

Special Issue on 2003 Annual Meeting on Sensors and Micromachines Society

Preface to the Special Issue on 2003 Annual Meeting on Sensors and Micromachines Society

...................................H. Adachi 401

Special Issue Paper

Amperometric Gas Sensor Using Gas Diffusion Membrane Consisting of Garbon Powder and Fluorocarbon

...................................Y. Mizutani, H. Matsuda, T. Ishiji, & N. Furuya 402

Discrimination of Mixed Taste Solutions using Ultrasonic Wave and Soft Computing

...................................Y. Kojima, F. Kimura, T. Mikami, & M. Kitama 407

Paper

The Discrimination Between Water and Oil Using Ultrasonic Sensor

...................................K. Tokitou & K. Shida 415

Improvement of the Gas Selectivity of Semiconductor Thin-Film Gas Sensors

..............................H. Imai & K. Hara 421

Sensing Performances of Mixed-Potential Type NOx Sensor Using Metal-Oxide Electrode

...................................T. Ono, M. Hasei, Y. Yan, A. Kunimoto, & N. Miura 428

A Non-contact Multifunctional Sensor for Level and Concentration Measurement of Solution

...................................G. Lu & K. Shida 435

Special Issue on Measurement and Sensing Technologies for Nanotechnology

Special Issue Review

Precision Measurement of Positioning on the Desktop Microrobot Factory-Towards Production System for Nanotechnology-

...................................O. Fuchiwaki 449

Special Issue Paper

Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope

...................................O. Nakabeppu & T. Kanda 453

Paper

An Ultrasound Catheter using LIB Phenomenon

...................................O. Oshiro, Y. Yasumuro, T. Sugiura, K. Chihara, & S. Kawata 459

Absolute and Noncontact Type Displacement Sensor using Transmission Line for Detecting Multiple Targets

...................................Y. Okubo, T. Uebo, & T. Iritani 464

Statistical Analysis of Plant Bioelectric Potential for Communication with Humans

...................................T. Shimbo, T. Oyabu, S. Hirobayashi, & K. Takenaka 470

Study on a Gas Sensor with Low Power Consumption Using Microbridge Structure

...................................M. Kimura & K. Hara 476