Paper

A Micromachined Nano-Gripper Integrated with a Thermal Expansion Micro Actuator

...............G. Hashiguchi, T. Fukino, T. Hara, J. Miyake, K. Kakushima, M. Ataka, & H. Fujita 1

Touch Mode Capacitive Pressure Sensor for Passive Tire Monitoring System

...................................S.Yamamoto, T. Takizawa, H. Nishimura, H. Nakamura, & O. Nakao 9

Development of A Vision-based Tactile Sensor

...................................K. Kamiyama, H. Kajimoto, M. Inami, N. Kawa‚“kami, & S. Tachi 16

Letter

A Microfluidic Device for Mixing of Capillary-driven Liquids

...................................K. Hosokawa & M. Maeda 23

Review

Silicon Microsensors for Severe Environment Using SOI Technology

...................................M. Ishida & H. Takao 31

Application of Biomedical Sensor and Transducer in the Elderly

...................................T. Tamura 37

Paper

QCM Odor Sensor Noticed by Boilling Point of Odor Substances

...................................Y. So, T. Arai, & M. Akiya 43

Electro-Static Micro Actuator Technology for Moving Lens of Ultra Small Camera of Mobile Equipment

...................................A. Koga, M. Sekimura, T. Akiba, M. Yoshida,Y. Shima, & S. Hattori 49

Review

Future Intelligent Trasportation Systems and Sensors

...................................A. Hosaka 63

Properties of InSb Thin Films Grown by Molecular Beam Epitaxy and Their Applications to Magnetic Field Sensors

...................................I. Shibasaki 69

Paper

Quantitative Analysis and Influence of CO2 Absorbed in TMAH Solution for Silicon Etching

..............................Y. Jing, K. Maenaka, H. Nishioka, S. Ioku, T. Fujita, & Y. Takayama 79

Palpation Simulator of Beating Aorta for Cardiovascular Surgery Training

...................................Y. Yamamoto, M. Nakao, T. Kuroda, H. Oyama, M. Komori, T. Matsuda, G. Sakaguchi, M. Komeda, & T. Takahashi 85

Bio-mimicry Sound Source Localization with Gimbal Diaphragm

Special Issue on "Chemical Sensing at the Micro/Nanometer Scale"

Special Issue Review

Single-molecule Imaging of Chaperonin Functions

...............T. Ueno, H. Tadakuma, & T. Funatsu 107

Special Issue Paper

Dissection and Acquisition of DNA Fragments Based on Microsystems

...................................O. Kurosawa & M. Washizu 112

Surface Photo Voltage (SPV) Type NO, NO2 Gas Sensor Fabricated by Mesoporous Materials with Uniform Pore Size and Ordered Pore Structure

.........................T. Yamada, H. S. Zhou, I. Honma, M. Tomita, Y. Ueno, H. Uchida, & T. Katsube 118

Fundamental Study on the Segmented Flow Injection-Multiphase Flow Formation Towards Microchip-Based Multi-Ion Sensing

...................................H. Hisamoto, T. Horiuchi, A. Hibara, M. Tokeshi, & T. Kitamori 124

Special Issue Letter

Surface-Electrochemical Sensor for the Measurement of Anti-Cholinesterase Activity

...................................H. Matsuura, Y. Sato, S. Yabuki, T. Sawaguchi, & F. Mizutani 128

Measurements of Enzyme Film Thickness and Enzymatic Reaction by Surface Plasmon Resonance

...................................Y. Iwasaki & O. Niwa 130

Near-Field Fiber-Optic Chemical Microsensors

...................................K. Kurihara, O. Niwa, Y. Iwasaki, T. Tobita, & K. Suzuki 132

Development of Small Size Detector for Environmental Monitoring of VOC

...................................T. Horiuchi, Y. Ueno, & O. Niwa 134

Review

Sensing of Taste

...................................K. Toko 147

Paper

Specific SOI Wafer with Embedded Pattern of Silicon Dioxide and its Application for 2-dimensional Wide Angle Optical Scanner

....................M. Katashiro, M. Arima, K. Tokuda, T. Okamura, K. Matsumoto, & H. Miyajima 152

Non-Planer Photo-Fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe

Review

Development of Microcalorimeter

...................................M. Kimura 173

Paper

Evaluation of the Fiber-Optic Thermometer Using Fluorescent Lifetime of Ruby

...................................H. Aizawa, E. Toba, T. Katsumata, S. Komuro, & T. Morikawa 178

Amperometric Glucose Sensor Using Thermostable Co-Factor Binding Glucose Dehydrogenase

....................Y. Nakazawa, T. Yamazaki, W. Tsugawa, K. Ikebukuro, & K. Sode 185

A Full-dry Processing Technique from Sacrificial Layer Etching to Water-Repellent Coating

...................................K. Shimaoka, J. Sakata, & Y. Mitsushima 190

Multi-Functional Sensing Approach for Material Discriminating and Property Analyzing

..............................Z. Chi & K. Shida 197

Calibration of Charge Amplifier on Vibration Acceleration Standard

..............................A. Ohta, T. Usuda, & H. Nakano 203

Review

Development of SPR Immunosensing System Using Microchannel Cell for Simultaneous Detection of Several Endocrine-Disrupting Chemicals

.........................N. Miura, K. V. Gobi, Y. Shoyama, H. Maeda, H. Kawazumi, & H. Iwasaka 217

Paper

Sequential Batch Assembly of 3-D Microstructures by using a Magnetic Anisotropy and a Magnetic Field

...................................E. Iwase & I. Shimoyama 224

Fabrication of Micro Lens Optical Scanner on SOI Wafer

...................................K. Saruta, H. Fujita, & H. Toshiyoshi 231

A New Multifunctional Sensor for Measuring Concentrations of Ternary Solution

...................................G. Wei & K. Shida 237

Shape Dependence of Sensitivity and Strength on a Piezoresistive Semiconductor Accelerometer

..............................T. Obata 243

Optimal Design and Dimensionless Correlation Development for Natural Convection Cooling Board

...................................T. Nakanishi, K. Shimohashi, & T. Hase 249

Letter

Damage Free Dicing Method for MEMS Devices

...................................Y. Matsumoto, Y. Awatani, & K. Kato 255

Special Issue on "Sensing and Networking in Ubiquitous Computing Environment "

Special Issue Review

Sensing Technologies in Ubiquitous Network Environment : From Stand-alone Intelligent Sensing to Knowledge-Shared Network Sensing

...................................S. Ando 263

Automatic Fare Collection System and Introduction of Contactless IC Card, "Suica"

...................................S. Uriuhara 271

Special Issue Paper

ALTAIR : Automatic Location Tracking System with Active IR-Tag

...................................M. Sakata, Y. Yasumuro, M. Imura, Y. Manabe, O. Oshiro, & K. Chihara 279

Principle and Simulation for Reconstruction of Two-dimensional Image beyond Nyquist Frequency of an Image Sensor Using Low-pass Filters

...................................T. Kimura, H. Goto, N. Takatsuka, & H. Shiraki 285

Discrimination of Basic Taste Solutions and Soft Drinks on Electrical and Optical Response Patterns of Artificial Lipid Membrane

...............K. Mukai, K. Misawa, & J. Arisawa 293

Deodorant Characteristics of Breath Odor Occurred from Favorite Foods Using Metal Oxide Gas Sensors

...................................S. Seto, T. Oyabu, K. Cai, & T. Katsube 300

Spectrophotometric Microdetermination of Urea in a Rice Wine by Using an Immobilized Acid Urease Column.FIA System

...................................Y. Iida, N. Hara, K. Matsumoto, & I. Satoh 306

Letter

Deposition of Through-Hole Metal Film on Glass With Electroless Plating

Special Issue on "Power MEMS"

Preface to Special Issue on "Power MEMS"

...................................M. Waga 325

Special Issue Review

MEMS Rotary Engine Power System

...................................A. C. Fernandez-Pello, A. P. Pisano, K. Fu, D. C. Walther, A. Knobloch, F. Martinez, M. Senesky, C. Stoldt, R. Maboudian, S. Sanders, & D. Liepmann 326

Special Issue Paper

Design of High Power Electrostatic Motor and Generator Using Electrets

...................................T. Genda, S. Tanaka, & M. Esashi 331

Hydrogen Supply Using Borohydride and Prototyping of a Miniature Fuel Cell by Sand Blasting

...................................S. Tanaka, A. Higashitani, K. Sugie, & M. Esashi 340

MEMS-Based Fuel Reformer with Suspended Membrane Structure

...................................K. S. Chang, S. Tanaka, & M. Esashi 346

Design of a Micro Reciprocating Engine for Power Generation

...................................S. Sugiyama & T. Toriyama 351

Paper

A Charge Balanced C-V Converter for a Differential Capacitance Sensor

...................................M. Tsugai, Y. Hirata, T. Araki, & M. Kimata 357

Signal Conditioning CMOS Circuits Integrated on Si (111) for Image-Recording Sensor of Neural Activity

....................Y. Kato, T. Kawano, Y. Ito, H. Takao, K. Sawada, & M. Ishida 363

Process Simulation System for 3D X-Ray Lithography and Development

...................................Y. Hirai, S. Hafizovic, J. G. Korvink, & O. Tabata 368

Letter

A New Detection Method for a Slippery Wheel by an Induction Magnetometer

...................................T. Araki, D. Hasegawa, T. Nagase, M. Araki, & H. Ono 376

Optical MEMS and Its Future Trends

...................................R. Sawada 383

Recent Developments of CMOS Image Sensors

...................................S. Kawahito 387

Special Issue Paper

Wide Wavelength Range Tunable Fabry-Perot Filter for gas Measurement

...................................K. Suzuki, N. Kishi, M. Noro, H. Hara, T. Watanabe, & H. Iwaoka 392

A 2-Axis Comb-driven Micromirror Array for 3D MEMS Optical Switch

...................................O. Tsuboi, Y. Mizuno, N. Kouma, H. Soneda, H. Okuda, S. Ueda, I. Sawaki, F. Yamagishi, & Y. Nakamura 398

Micromachined Optical Scanner for Optical Measurement System

...................................Y. Takahashi, Y. Takeuchi, & H. Fujita 403

A Study of Gray Scale Lithography with Micro Chrome Pattern

...................................K. Hanai & Y. Matsumoto 410

Purification Effect of Areca Palm for Continuously Emitting Formaldehyde in a Real Office Environment

...................................A. Sawada, T. Oyabu, K. Takenaka, & T. Yoshida 416

A JFET-CMOS Technology for Low-Noise Sensor Interface Circuits

...................................H. Takao, R. Asaoka, K. Sawada, S. Kawahito, & M. Ishida 422

Laser Micromachining Technique of Nano-Particles Dispersed Polymer

...................................H. Yagyu, S. Hayashi, & O. Tabata 429

Microfluidics of Liquid Propellant Microthruster for Pico-Satellites

...................................Y. Osaki & K. Takahashi 436

Analysis of an Electrostatic Wobble Motor

...................................T. Sonobe & H. Fujita 442

New Software Defined Fluxgate Magnetometer

...................................T. Araki, T. Takayama, T. Nagase, & M. Araki 448

A New Ocean Current Pathways Detecting System Using a Magnetic Sensor and GPS

...................................T. Araki, N. Araake, K. Rikiishi, & T. Nagase 450

Review

Biosensor Using a Quartz-Crystal Microbalance

...................................Y. Okahata & H. Furusawa 459

Paper

Development and Characteristic Evaluation of High Resolution SQUID Magnetometer

...................................K. Kobayashi, H. Hashimoto, M. Kawakatsu, & Y. Uchikawa 465

A CMOS Image Sensor for Hyper Omni Vision

...................................J. Ohta, H. Wakasa, K. Kagawa, M. Nunoshita, M. Suga, M. Doi, O. Oshiro, K. Minato, & K. Chihara 470

Application of ElectroDeposition Photoresist as a Sacrificial Layer to the Circular Micro Hole Forming

.........................M. Yasui, K. Kakushima, Y. Hirabayashi, M. Mita, & H. Fujita 477

Proposal of Noninvasive Liver Function Measurement Method via Saliva

...................................M. Yamaguchi, Y. Kawabata, T. Hatakeyama, & Y. Kashii 483

Automatic Connection�^Disconnection Mechanism of Microconnector

...................................H. Takada, H. Okuyama, T. Haga, & Y. Hirata 487

Active Antenna with Quartz Resonators as Force Sensor and Recognition of Environment by Use of Active Antenna

...................................S. Muraoka, Y. Kida, Y. Okada, & M. Noda 493

UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

...................................R. Mori & Y. Matsumoto 499

Optimal Thermo-Structural Analysis for High Density Package Mounting on Build-up Board

...................................T. Nakanishi & T. Hase 504

Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

...................................J. S. Go & S. Shoji 510

Study of Odor Recorder Using Mass Spectrometry

...................................T. Miura, T. Nakamoto, & T. Moriizumi 513

Special Issue on "Functional Materials and Process Technology"

Special Issue Review

Photon Sensor With Electron-Bombarded Multiplication

.........................Y. Kawai & M. Suyama 529

Special Issue Paper

Self-Generation Door Alarm System using Impact Induced Piezoelectric Vibration

.........................M. Umeda, Y. Sakai, & K. Nakamura 534

New DRIE Process with Sidewall Protection Layer Formed by O2 Plasma Irradiation

.........................J. Ohara, K. Kano, & Y. Takeuchi 541

Preparation of Functionally Combined Wafers of PZT-Si for Microdevices

...................................K. Tanaka, A. Sakurai, T. Kubota, & Y. Sakabe 548

High Quality GaAs on Si Substrate by Epitaxial Lift-off Using SeS2 and its Application to Devices

.........................H. Taguchi�CT. Soga, T. Jimbo, & M. Umeno 553

Special Issue Technical Note

Micro-Fabrication Technology for Piezoelectric Film Formation and its Application to MEMS

...................................M. Ichiki, J. J. Tsaur, L. Zhang, Z. J. Wang, & R. Maeda 560

Paper

PLC-Optical Functional Device Shifting Propagation Direction Based on Blazed Diffraction Grating

...................................T. Sonobe & H. Fujita 565

A Silicon Micro Probe Array on a Flexible Substrate for Neural Recording

...................................N. Akamatsu, T. Suzuki, K. Mabuchi, H. Fujita, B. Kim, & S. Takeuchi 571

Young's Modulus Measurement for Polysilicon Thin Film by Tensile Testing

...................................T. Tsuchiya & H. Funabashi 577

Analysis of Thermal Drift of A Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures

...................................K. I. Lee, H. Takao, K. Sawada, & M. Ishida 583

Special Issue Letter

PZT Film Formation With Use of Spray Coating Method