| Title |
Author |
Page |
Extended Summary |
Full Paper |
| Development of Micro Inspection Mechanism |
O. Tohyama, S. Maeda, K. Abe,&M. Murayama |
59 |
 |
|
| High-Density 3D Packaging Technology for
CCD Micro-Camera System Module |
H. Yamada, T. Togasaki, M. Kimura, H. Sudo,&N.
Kawahara |
67 |
 |
|
| High-output Micro-trochoid Pump Fabricated
by a Surface Treatment Technique |
T. Harada, Y. Yoshimura,&A. Kouno |
73 |
 |
 |
| A Digital All-in-focus Microscope System
using a Quick-Response Dynamic Focusing Lens |
K. Tsuruta, T. Kaneko, N. Mitsumoto,&N.
Kawahara |
78 |
 |
|
| Compact and Low Power Consumed Control Circuit
for Wireless Micromachine |
K. Tsuruta, T. Shibata, N. Mitsumoto, T.
Sasaya,&N. Kawahara |
84 |
 |
|
| Fabrication Process of Micro Bonding Elements
with Taper Shape |
Y. Yokoyama, H. Ota, M. Takeda, T. Ohara,&T.
Araki |
90 |
 |
|
| Artificial Muscle for Small Robots and Other
Micromechanical Devices |
R. Pelrine, R. Kornbluh,&S. Chiba |
97 |
 |
 |
| Influence of Gas Pressure on Sputtering Deposition
of Epitaxial BaTiO3 Thin Films |
T. Yasumoto, N. Yanase, K. Abe, N. Fukushima,&T.
Kawakubo |
103 |
 |
 |
| ZnO Films Grown on Si Substrate by Radical
Source MBE |
K. Iwata, P. Fons, A. Yamada, K. Matsubara,
K. Nakahara, H. Takasu,&S. Niki |
110 |
 |
|