A Publication of Sensors and Micromachines Associated Society
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The Transactions of The Institute of Electrical Engineers of Japan

This page consist of full text of English Papers which were published in our transactions.
This page shows full text of English Papers that were published on the transactions of our five societies

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JANUARY 2002 Volume 122-E Number 1
Title Author Page Extended Summary Full Paper
The Saturation Characteristics Control of Photo-diodes with Overflow Drain T. Tanaka, T. Kimura, S. Kimura,&H. Shiraki 10
Multi-channel Frequency Shift Measurement Circuit with High Sampling Rate for QCM Odor Sensors N. Segawa, T. Tokuhiro, T. Nakamoto,&T. Moriizumi 16
An Application of the Driving Circuit for Resistive Humidity Sensor using Timer IC to the Thermo-hygrometer R. Hayashibe, S. Watanabe,&H. Itoh 23
Development of InGaAs Photodiodes for Near-infrared Spectroscopy M. Wada, S. Araki, T. Kudou, T. Umezawa, S. Nakajima,&T. Ueda 29
Design of a Micro Multi-Axis Force-Moment Sensor D.V. Dzung, T. Toriyama, J. Wells,&S. Sugiyama 35

FEBRUARY 2002 Volume 122-E Number 2
Title Author Page Extended Summary Full Paper
Development of Micro Inspection Mechanism O. Tohyama, S. Maeda, K. Abe,&M. Murayama 59
High-Density 3D Packaging Technology for CCD Micro-Camera System Module H. Yamada, T. Togasaki, M. Kimura, H. Sudo,&N. Kawahara 67
High-output Micro-trochoid Pump Fabricated by a Surface Treatment Technique T. Harada, Y. Yoshimura,&A. Kouno 73
A Digital All-in-focus Microscope System using a Quick-Response Dynamic Focusing Lens K. Tsuruta, T. Kaneko, N. Mitsumoto,&N. Kawahara 78
Compact and Low Power Consumed Control Circuit for Wireless Micromachine K. Tsuruta, T. Shibata, N. Mitsumoto, T. Sasaya,&N. Kawahara 84
Fabrication Process of Micro Bonding Elements with Taper Shape Y. Yokoyama, H. Ota, M. Takeda, T. Ohara,&T. Araki 90
Artificial Muscle for Small Robots and Other Micromechanical Devices R. Pelrine, R. Kornbluh,&S. Chiba 97
Influence of Gas Pressure on Sputtering Deposition of Epitaxial BaTiO3 Thin Films T. Yasumoto, N. Yanase, K. Abe, N. Fukushima,&T. Kawakubo 103
ZnO Films Grown on Si Substrate by Radical Source MBE K. Iwata, P. Fons, A. Yamada, K. Matsubara, K. Nakahara, H. Takasu,&S. Niki 110

MARCH 2002 Volume 122-E Number 3
Title Author Page Extended Summary Full Paper
Enhancement of Taste-discrimination for a Taste Sensor Using LB Films H. Takano, Y. Kitamura,&M. Akiya 127
The Development of a Simple Car Traffic Counter by the Flux-gate Magnetometer T. Araki&H. Ono 133
Remote Power Sourceless Encoder Using Resonant Circuit with Loop-type Coil M. Hayase, T. Hatano,&T. Hatsuzawa 139
Stiction Recovery of Silicon Oxide Cantilevers with Pulse Laser Irradiation for MEMS M. Nakata, K. Fushinobu,&K. Okazaki 144
Development of Signal Conditioning LSI using Digital Signal Processor for Pressure Sensor M. Matsumoto, S. Shimada, F. Murabayashi, H. Yamada,&K. Hanzawa 150
Tracking a Moving Object in Log-Polar Mapped Coordinates W. Mitsuhashi, H. Nitta,&N. Okajima 158
An Improved Image Reconstruction Method for a Chopperless Pyroelectric Infrared Image Sensor S. Kawahito, K. Sawada, K. Tada, M. Ishida,&Y. Tadokoro 166
The Development of Microchannel Chip Using Chemical Bonding Technique at Room Temperature A. Yamaguchi, H. Tsuchiyama, S. Matsuo, J. Yokoyama,&H. Misawa 172

APRIL 2002 Volume 122-E Number 4
Title Author Page Extended Summary Full Paper
Non-Linear Phenomena of Piezo-Electric Ceramic Vibrator and Loci to Resonance Point of Non-Linear Region T. Wada 193
Spectral Matching Imager Using Correlation Image Sensor A. Kimachi, T. Imaizumi, A. Kato,&S. Ando 200
Miniaturized Thermal Analysis Sensor using Micro-heaters on SOI Substrate M. Furuya, S. Fujiwara,&M. Kimura 207
3-Axis Hall Sensor Fabricated by Microassembly Technique Y. Watanabe, T. Mineta, S. Kobayashi,&T. Mitsui 212
Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating G. Suzuki&M. Esashi 217

MAY 2002 Volume 122-E Number 5
Title Author Page Extended Summary Full Paper
Spray Coating of Photoresist for Three Dimensional Micromachining M. Sasaki, S. Nogawa,&K. Hane 235
Laser with SBS Pulse Compression for LIBS T. Ueda, V. Yashin, M. Wakamatsu,&A. Andreev 244
Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist T. Unno, T. Toriyama, M.M.I. Bhuiyan, Y. Yokoyama,&S. Sugiyama 249
Self-standing Polysilicon-metal Thermopile for Micro Power Generator M. Yajima, T. Toriyama,&S. Sugiyama 256
A Study on Discrimination of Forward Objects on the Road Using Laser Radar and a Camera N. Shimomura, K. Fujimoto, T. Oki,&H. Muro 261
Work Pattern Formation Technology for Multi-micromachines Y. Shimomura, Y. Nakano,&Y. Otsuki 267
Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor H. Hara, N. Kishi,&H. Iwaoka 274
Double Injection Type Magnetodiode Formed on a SOI Substrate H. Takeyama, K. Senoo, T. Otuki,&M. Kimura 280

JUNE 2002 Volume 122-E Number 6
Title Author Page Extended Summary Full Paper
Effect of Soil-kinds and Room Temperature on Purification Capability of Foliage Plant for Atmospheric Formaldehyde A. Sawada, T. Oyabu, T. Yoshida, K. Takenaka,&B.Wolverton 300
Analysis of Formaldehyde Concentration Change in an Airtight Chamber with a Piece of Plywood and Foliage Plants T. Onodera, T. Kamimiya, H. Kimura, T. Oyabu,&K. Toko 306
Improvement of Odor-Recorder Robustness against Environmental Change using Real-time Reference Method T. Yamanaka&T. Nakamoto 312
Fundamental Study of Taste Sensing by Acoustical Properties in Various Taste Solutions Y. Kojima&T. Mikami 318
The Experimental Microfactory System for Processing and Assembling K. Furuta 326
A Proposal of Measurements of Conductance and Propagation Time for Determination of Temperature and Ingredient in the Living Body Model A. Kimoto&K. Shida 332
Optimal Harmonics Extraction Filter with Auditory Filter Bank Structure K. Nishi&S. Ando 338
Application of the Adaptive Line Enhancer in Formaldehyde Detection of SnO2 Thin Film Sensor T. Osaki, K. Sugahara,&R. Konishi 345

JULY 2002 Volume 122-E Number 7
Title Author Page Extended Summary Full Paper
Acoustic Impedance Control Through Structural Tuning by Pneumatic Balloon Actuators M. Yoda&S. Konishi 355
Measurement of Audible Acoustic Wave by Laser Light K. Tanaka, G. Nogami,&Y. Sonoda 362
Driving Performance Improvement of the Interferometric Display Device (IDD) T. Oguchi, M. Hayase,&T. Hatsuzawa 369
Response Characteristics of Taste Sensor to Extract from Roasted Sesame Seeds S. Ezaki&S. Iiyama 374

AUGUST 2002 Volume 122-E Number 8
Title Author Page Extended Summary Full Paper
Development of Deep Reactive Ion Etching (Deep-RIE) Process for Bonded Silicon-Glass Structures Y. Yoshida, M. Kumagai, J. Ichikawa, Jiao,&K. Tsutsumi 391
Fabrication of Diffractive Optical Elements on a Si Chip by Imprint Lithography using Novel Mold Yoshihiko Hirai, Masato Okano, Hiroyuki Okuno, Hiroshi Toyota, Hisao Kikuta, Yoshio Tanaka 398
Fine Pattern Fabrication on Polymer Plate by Direct Imprint Lithography Yoshihiko Hirai, Nobuyuki Takagi, Satoshi Harada, Yoshio Tanaka 404

SEPTEMBER 2002 Volume 122-E Number 9
Title Author Page Extended Summary Full Paper
Numerical Analysis for Evaluating Adhesion of Arbitrary-shaped Microstructures Using Optimization Method S. Tezuka, S. Kato, H. Hamanaka, T. Watanabe,&H. Iwaoka 427
Limit of Biological Structure Estimation by Ultrasound Reflection Coefficient H. Ohno&M. Saito 433
Development of Micro-Probe Substrate for LSI Testing M. Kanamaru, R. Kohno, Y. Endo,&A. Hosogane 440
Development of a Temperature-Compensated Ultrasonic Liquid-Level Meter S. Ogawa&H. Kuwano 447

OCTOBER 2002 Volume 122-E Number 10
Title Author Page Extended Summary Full Paper
Tactile Display using Thin Type Electrostatic Linear Actuator T.Ishii, A.Yamamoto,&T.Higuchi 474
Estimation of Gas Generation Point using Delay of Gas Sensor Responses H.Nambo, H.Kimura,&T.Oyabu 480
Development of a New Speedometer of Vehicle by Induction Magnetometer T.Araki, K.Kanazawa, H.Ono,&F.Murofushi 487
Quartz Glass Molding by Precision Glass Molding Method H.Maehara&H.Murakoshi 494
Assembling Technology using Magnetic Force for Micromachines Y.Yokoyama, H.Ota, M.Takeda, T.Ohara,&T.Araki 498

NOVEMBER 2002 Volume 122-E Number 11
Title Author Page Extended Summary Full Paper
Pyroelectric Infrared Sensor Using Modified PbTiO3 Ceramics M. Nakamoto, N. Ichinose, N. Iwase,&Y. Yamashita 523
3-D Micro Machining of Photo Sensitive Glass Using Gray-Scale Mask G. Kanomata&Y. Matsumoto 531
Application of the Metal Coated Hollow Fiber Membrane Electrode to the Sugar Sensor by Amperometric Detection Method O. Igarashi, M. Uto, S. Inoue, S. Hoshi, T. Sugawara, K. Kimura, K. Misawa,&J. Arisawa 537

DECEMBER 2002 Volume 122-E Number 12
Title Author Page Extended Summary Full Paper
Electrostatic Controlled Linear Inchworm Actuato . Konishi, M. Munechika, T. Sawai&K. Yoshifuji 560
Biological Temperature Measurement Using a Microthermocouple Probe T. Yasuda, N. Suzuka, K. Kurihara&I. Shimoyama 567

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