Power Micro-electromechanical Systems (Power MEMS)

..........S. Tanaka 1

The Saturation Characteristics Control of Photo-diodes with Overflow Drain

..........T. Tanaka, T. Kimura, S. Kimura,&H. Shiraki 10

Multi-channel Frequency Shift Measurement Circuit with High Sampling Rate for QCM Odor Sensors

N. Segawa, T. Tokuhiro, T. Nakamoto,&T. Moriizumi 16

An Application of the Driving Circuit for Resistive Humidity Sensor using Timer IC to the Thermo-hygrometer

R. Hayashibe, S. Watanabe,&H. Itoh 23

Development of InGaAs Photodiodes for Near-infrared Spectroscopy

M. Wada, S. Araki, T. Kudou, T. Umezawa, S. Nakajima,&T. Ueda 29

Design of a Micro Multi-Axis Force-Moment Sensor

D.V. Dzung, T. Toriyama, J. Wells,&S. Sugiyama 35

Non-uniformity in the Electrical Properties of Aluminum Added Silicon Carbide Ceramics

T. Terashige&K. Okano 42

The Results of National R&D Project "Micromachine Technology"

T. Hirano 53

Development of Micro Inspection Mechanism

O. Tohyama, S. Maeda, K. Abe,&M. Murayama 59

High-Density 3D Packaging Technology for CCD Micro-Camera System Module

H. Yamada, T. Togasaki, M. Kimura, H. Sudo,&N. Kawahara 67

High-output Micro-trochoid Pump Fabricated by a Surface Treatment Technique

T. Harada, Y. Yoshimura,&A. Kouno 73

A Digital All-in-focus Microscope System using a Quick-Response Dynamic Focusing Lens

K. Tsuruta, T. Kaneko, N. Mitsumoto,&N. Kawahara 78

Compact and Low Power Consumed Control Circuit for Wireless Micromachine

K. Tsuruta, T. Shibata, N. Mitsumoto, T. Sasaya,&N. Kawahara 84

Fabrication Process of Micro Bonding Elements with Taper Shape

Y. Yokoyama, H. Ota, M. Takeda, T. Ohara,&T. Araki 90

Artificial Muscle for Small Robots and Other Micromechanical Devices

R. Pelrine, R. Kornbluh,&S. Chiba 97

Influence of Gas Pressure on Sputtering Deposition of Epitaxial BaTiO3 Thin Films

T. Yasumoto, N. Yanase, K. Abe, N. Fukushima,&T. Kawakubo 103

ZnO Films Grown on Si Substrate by Radical Source MBE

K. Iwata, P. Fons, A. Yamada, K. Matsubara, K. Nakahara, H. Takasu,&S. Niki 110

Special Issue Letter

3-D Stacking of Silicon Components using Micro Electro-Mechanical System (MEMS) Technologies

T. Suemasu&T. Takizawa 116

Paper

Enhancement of Taste-discrimination for a Taste Sensor Using LB Films

..........H. Takano, Y. Kitamura,&M. Akiya 127

The Development of a Simple Car Traffic Counter by the Flux-gate Magnetometer

..........T. Araki&H. Ono 133

Remote Power Sourceless Encoder Using Resonant Circuit with Loop-type Coil

..........M. Hayase, T. Hatano,&T. Hatsuzawa 139

Stiction Recovery of Silicon Oxide Cantilevers with Pulse Laser Irradiation for MEMS

..........M. Nakata, K. Fushinobu,&K. Okazaki 144

Development of Signal Conditioning LSI using Digital Signal Processor for Pressure Sensor

..........M. Matsumoto, S. Shimada, F. Murabayashi, H. Yamada,&K. Hanzawa 150

Tracking a Moving Object in Log-Polar Mapped Coordinates

..........W. Mitsuhashi, H. Nitta,&N. Okajima 158

An Improved Image Reconstruction Method for a Chopperless Pyroelectric Infrared Image Sensor

..........S. Kawahito, K. Sawada, K. Tada, M. Ishida,&Y. Tadokoro 166

The Development of Microchannel Chip Using Chemical Bonding Technique at Room Temperature

..........A. Yamaguchi, H. Tsuchiyama, S. Matsuo, J. Yokoyama,&H. Misawa 172

Special Issue on the ''Acoustic and Vibration Sensors, and Signal Processing Techniques''

Special Issue Review

Acoustic Sensors

..........K. Nakamura 187

Paper

Non-Linear Phenomena of Piezo-Electric Ceramic Vibrator and Loci to Resonance Point of Non-Linear Region

..........T. Wada 193

Spectral Matching Imager Using Correlation Image Sensor

..........A. Kimachi, T. Imaizumi, A. Kato,&S. Ando 200

Miniaturized Thermal Analysis Sensor using Micro-heaters on SOI Substrate

..........M. Furuya, S. Fujiwara,&M. Kimura 207

3-Axis Hall Sensor Fabricated by Microassembly Technique

..........Y. Watanabe, T. Mineta, S. Kobayashi,&T. Mitsui 212

Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating

..........G. Suzuki&M. Esashi 217

Special Issue Letter

Fundamental Study of Taste Sensing by Ultrasonic Wave

..........Y. Kojima 223

Paper

Spray Coating of Photoresist for Three Dimensional Micromachining

..........M. Sasaki, S. Nogawa,&K. Hane 235

Laser with SBS Pulse Compression for LIBS

..........T. Ueda, V. Yashin, M. Wakamatsu,&A. Andreev 244

Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist

..........T. Unno, T. Toriyama, M.M.I. Bhuiyan, Y. Yokoyama,&S. Sugiyama 249

Self-standing Polysilicon-metal Thermopile for Micro Power Generator

..........M. Yajima, T. Toriyama,&S. Sugiyama 256

A Study on Discrimination of Forward Objects on the Road Using Laser Radar and a Camera

..........N. Shimomura, K. Fujimoto, T. Oki,&H. Muro 261

Work Pattern Formation Technology for Multi-micromachines

..........Y. Shimomura, Y. Nakano,&Y. Otsuki 267

Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor

..........H. Hara, N. Kishi,&H. Iwaoka 274

Double Injection Type Magnetodiode Formed on a SOI Substrate

..........H. Takeyama, K. Senoo, T. Otuki,&M. Kimura 280

Letter

Temperature Sensor Around 0�� Using Surface Acoustic Wave Filter on ZnO/LiNbO3

..........H. Yamamoto, N. Saiga,&K. Nishimori 285

Special Issue on ''Taste and Odor Sensors with Intelligent Information Processing''

Preface to the Special Issue on ''Taste and Odor Sensors with Intelligent Information Processing''

..........K. Toko 295

Special Issne Review

Developments and Technologies of Taste Sensor and Odor Sensor

..........T. Katsube 296

Special Issue Paper

Effect of Soil-kinds and Room Temperature on Purification Capability of Foliage Plant for Atmospheric Formaldehyde

..........A. Sawada, T. Oyabu, T. Yoshida, K. Takenaka,&B.Wolverton 300

Analysis of Formaldehyde Concentration Change in an Airtight Chamber with a Piece of Plywood and Foliage Plants

..........T. Onodera, T. Kamimiya, H. Kimura, T. Oyabu,&K. Toko 306

Improvement of Odor-Recorder Robustness against Environmental Change using Real-time Reference Method

..........T. Yamanaka&T. Nakamoto 312

Fundamental Study of Taste Sensing by Acoustical Properties in Various Taste Solutions

..........Y. Kojima&T. Mikami 318

Paper

The Experimental Microfactory System for Processing and Assembling

..........K. Furuta 326

A Proposal of Measurements of Conductance and Propagation Time for Determination of Temperature and Ingredient in the Living Body Model

..........A. Kimoto&K. Shida 332

Optimal Harmonics Extraction Filter with Auditory Filter Bank Structure

..........K. Nishi&S. Ando 338

Application of the Adaptive Line Enhancer in Formaldehyde Detection of SnO2 Thin Film Sensor

..........T. Osaki, K. Sugahara,&R. Konishi 345

Paper

Acoustic Impedance Control Through Structural Tuning by Pneumatic Balloon Actuators

..........M. Yoda&S. Konishi 355

Measurement of Audible Acoustic Wave by Laser Light

..........K. Tanaka, G. Nogami,&Y. Sonoda 362

Driving Performance Improvement of the Interferometric Display Device (IDD)

..........T. Oguchi, M. Hayase,&T. Hatsuzawa 369

Response Characteristics of Taste Sensor to Extract from Roasted Sesame Seeds

..........S. Ezaki&S. Iiyama 374

Letter

Continuous Multi-Gas Analysis using Portable Time-of-Flight Mass Spectrometer

..........Y. Arita, T. Hirano, M. Fujiwara, H. Seki, K. Matsuda,&M. Nakao 380

Special Issue on ''Technologies for the Realization of Complex Structures with Complicated Materials''

Special Issue Paper

Development of Deep Reactive Ion Etching (Deep-RIE) Process for Bonded Silicon-Glass Structures

..........Y. Yoshida, M. Kumagai, J. Ichikawa, Jiao,&K. Tsutsumi 391

Fabrication of Diffractive Optical Elements on a Si Chip by Imprint Lithography using Novel Mold

..........Y. Hirai, M. Okano, H. Okuno, H. Toyota, H. Kikuta,&Y. Tanaka 398

Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography

..........Y. Hirai, N. Takagi, S. Harada,&Y. Tanaka 404

Paper

Ultra-Fine Pitch Electrical feed Through using Si Deep Etching and Bonding Wafer

..........T. Suzuki, K. Uchino, T. Yokoi, Y. Rai, H. Takizawa, R. Maeda, H. Takagi, K. Hanada 409

Special Issue Letter

Micro-hole Fubrication using a Silicon-mold

..........M. Yasui, K. kakushima, Y. Hirabayashi, M. Mita,&H. Fujita 415

Paper

Numerical Analysis for Evaluating Adhesion of Arbitrary-shaped Microstructures Using Optimization Method

..........S. Tezuka, S. Kato, H. Hamanaka, T. Watanabe,&H. Iwaoka 427

Limit of Biological Structure Estimation by Ultrasound Reflection Coefficient

..........H. Ohno&M. Saito 433

Development of Micro-Probe Substrate for LSI Testing

..........M. Kanamaru, R. Kohno, Y. Endo,&A. Hosogane 440

Development of a Temperature-Compensated Ultrasonic Liquid-Level Meter

..........S. Ogawa&H. Kuwano 447

Letter

Recognition of Human Activities Using Clustering Analysis

..........Y. Ogoshi, S. Ogoshi, S. Hirose,&H. Kimura 452

Special Issue on ''Tactile Sensing System and Virtual Reality''

Special Issue Review

Roles of Tactile Display in Virtual Reality

..........S.Tachi 461

Tactile Sensing and Display

..........M.Shimojo 465

Tactile Sensation of Humans--Mechanical Dynamics, Analogy and Illusion--

..........T.Maeno 469

Special Issue Paper

Tactile Display using Thin Type Electrostatic Linear Actuator

..........T.Ishii, A.Yamamoto,&T.Higuchi 474

Paper

Estimation of Gas Generation Point using Delay of Gas Sensor Responses

..........H.Nambo, H.Kimura,&T.Oyabu 480

Development of a New Speedometer of Vehicle by Induction Magnetometer

..........T.Araki, K.Kanazawa, H.Ono,&F.Murofushi 487

Quartz Glass Molding by Precision Glass Molding Method

..........H.Maehara&H.Murakoshi 494

Assembling Technology using Magnetic Force for Micromachines

..........Y.Yokoyama, H.Ota, M.Takeda, T.Ohara,&T.Araki 498

Review

Transition Edge X-ray Sensor Using Anodic Bonding Wafer

..........K. Tanaka, T. Morooka, S. Nakayama,&K. Chinone 517

Paper

Pyroelectric Infrared Sensor Using Modified PbTiO3 Ceramics

..........M. Nakamoto, N. Ichinose, N. Iwase,&Y. Yamashita 523

3-D Micro Machining of Photo Sensitive Glass Using Gray-Scale Mask

..........G. Kanomata&Y. Matsumoto 531

Application of the Metal Coated Hollow Fiber Membrane Electrode to the Sugar Sensor by Amperometric Detection Method

..........O. Igarashi, M. Uto, S. Inoue, S. Hoshi, T. Sugawara, K. Kimura, K. Misawa,&J. Arisawa 537

Letter

An Application of the Flux-gate Magnetometer to Measuring the Wind Direction

..........T. Araki, S. Imamura, K. Rikiishi,&S. Ishida 544

Special Issue on "Recent Technology of Microactuator"

Special Issue Review

Microactuators

..........K. Suzumori&N. Kawahara 555

Special Issue Paper

Electrostatic Controlled Linear Inchworm Actuator

..........S. Konishi, M. Munechika, T. Sawai&K. Yoshifuji 560

Paper

Biological Temperature Measurement Using a Microthermocouple Probe

..........T. Yasuda, N. Suzuka, K. Kurihara&I. Shimoyama 567

Special Issue Letter

Chain Motion by Serial Comb Drive Microactuator

..........S. Konishi&K. Fukumasu 573

Letter

Discrimination of Basic Taste Solutions on Electrical and Optical Response Patterns of a Single Artificial Lipid Membrane