A Publication of Sensors and Micromachines Associated Society
2001 Vol. 121-E Contents
The Transactions of The Institute of Electrical Engineers of Japan

Japanese English

Extended Summary

Jan. Feb. Mar. Apr. May. Jun. Jul. Aug. Sep. Oct. Nov. Dec.

JANUARY 2001 Volume 121-E Number 1
Paper
A Bidirectional Multiple Charge Transfer Active Pixel Image Sensor for Low-Power Focal Plane Motion Vector Estimation
..........D. Handoko, S. Kawahito, Y. Tadokoro,&A. Matsuzawa 1
An Observations of Magnetic Patterns of a Moving Object by Flux-Gate Magnetometer
..........T. Araki&H. Ono 8
Influence of Indoor Thermal Indexes to a Tin Oxide Gas Sensor Output and Prediction of its Output
..........Y. Nakamoto, T. Oyabu,&H. Kimura 14
Identification of Basic Indoor Human Behaviors using Odor-Sensor Array
T. Oyabu, A. Sawada,&H. Nanto 20
Theoretical Study on Influence of Impulity Concentration on Behavior of a Semiconductor Electrostatic Actuator
S. Tsuchitani, M. Miwa,&R. Kaneko 26
Infruence of Various Electrode Materials on Sensor Output of Limiting Current Type Hydrocarbon Sensors and Realization of High Sensitivity
S. Watanabe, Y. Hatano, M. Kuwano, Y. Eguchi, T. Ishihara, Y. Takita, K. Yoshida,&T. Takeuchi 32
Development of a Current Sensor by Using an Inductive Magnetic Detector
S. Nakagawa, K. Yabusaki,&G. Kinoshita 39
A Study on the Sub-Micron LIGA Process
H. Ueno&S. Sugiyama 45

FEBRUARY 2001 Volume 121-E Number 2
Review
Analytical Models and Simulation-Tools Necessary for Sensors and Micromachines.
.....K. Sato 59
Paper
New Method to Detect a Trace Amount of Organic Substances Using a Lipid Membrane Sensor
.....Y. Naito, H. Ikezaki, A. Taniguchi,&K. Toko 65
A Micro-Sized Scanning Compound Eye with an Electrostatic Mechanical Scanner
.....K. Hoshino, F. Mura,&I. Shimoyama 70
Electric Surface Modification of Diamond Like Carbon Film
.....S. Tsuchitani, Y. Nakano, Y. Imagawa, S. Hirono,&R. Kaneko 77
Development of an Anti-Corrosive Integrated Mass Flow Controller
.....K. Hirata, D.Y. Sim,&M. Esashi 81
A Thermal Micro Pressure Sensor: its Characteristics and Application to Pressure Measurement in a Minute Package
.....S. Wang, K. Mizuno, M. Fujiyoshi, H. Funabashi,&J. Sakata 87
An Organic Film/SiO2/Si Heterostructure as a Novel Biological Interface of a Light-Addressable Potentiometric Sensor
.....A.B.Md. Ismail, T. Yoshinobu,&H. Iwasaki 94

MARCH 2001 Volume 121-E Number 3
Paper
A Ring Array Probe using a Transmitter with a Convex Surface
..........M. Nambu, O. Oshiro, M. Doi,&K. Chihara 107
Magnetically Actuated Cantilever with Small Resonator for Scanning Probe Microscopy
..........D.W. Lee, T. Ono,&M. Esashi 113
Silicon Micromachined Tunable Infrared Polarizer
..........T. Ono, A. Wada,&M. Esashi 119
Preparation and Characterization of Laser Ablation Derived PZT Thin Films for Micro Actuators
..........Z.J. Wang, W.M. Lin,&R. Maeda 124
High Sensitivity Thin Film Pyro Electric IR Sensor
..........T. Nakanishi, K. Fujikawa, K. Komaki, T. Masutani,&K. Nomura 129
Development and Evaluation of Capacitance Detection ASIC for Three-Axis Common Electrode Type Capacitive Accelerometer
..........Y. Matsumoto, S. Kawahito,&M. Ishida 135
Biomimetic Device by Polymer Actuator
..........K. Onishi, S. Sewa, K. Asaka, N. Fujiwara, & K. Oguro 142
Letter
Gas Sensing Property of Semiconductor Odor Sensor
..........T. Kawaguchi, Y. Setoguchi, T. Nakahara,&Y. Matuura 148

APRIL 2001 Volume 121-E Number 4
Special Issue on ''Micro Total Analysis Systems for Chemicaland Bio-chemical Applications''
Preface to the Special Issue on ''Micro Total Analysis Systems for Chemical and Bio-Chemical Applications''
..........Y. Baba 157
Special Issue Paper
Construction of an Array of Micro Lenses Tunable with Focal Length Using Signal-responsive Gel
..........N. Kawazoe, F. Wakabayashi, K. Fukuda, H. Misawa, Y. Ito,&J. Ohta 158
Development of Hybrid Microreactor for Protein Synthesis
..........T. Yamamoto, T. Fujii, T. Nojima, J.W. Hong,&I. Endo 163
Fabrication and Chemical Applications of Polymer Microchannel Chips
..........N. Kitamura, H.B. Kim,&K. Ueno 169
Measurement of Oxyradicals from Leukocytes in Whole Blood Lodged in a Microchannel Array
..........H.E. Kikuchi&Y. Kikuchi 175
Recovery of DNA Fragment from a DNA Probe Array
..........K. Okano, G. Chen, Y. Kohara, T. Kajiyama, K. Yasuda,&S. Ishiwata 181
Electrochemical Array (ECA) as an Integrated Multi-electrode DNA Sensor
..........H. Miyahara, K. Yamashita, M. Takagi, H. Kondo,&S. Takenaka 187
Paper
Improvement of Resolution of Absolute Type Displacement Sensor Utilizing Standing Wave on Transmission Line
..........T. Uebo, Y. Ookubo,&T. Iritani 192
A Temperature-compensated Sensor System for Ozone Detection
..........H. Nakagawa, S. Okazaki, S. Asakura, H. Shimizu,&I. Iwamoto 199
Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light
..........N. Nishi, T. Katoh, H. Ueno,&S. Sugiyama 204
Characteristics of Polycrystalline Si Nano Wire Piezoresistors
..........Y. Tanimoto, T. Toriyama,&S. Sugiyama 209
Detection of Environmental Hormones with Electrode Polarity Controlled Method
..........K. Hayama, M. Habara, K. Hayashi,&K. Toko 215
Micro-magnetic Rotational Wings in an Alternating Magnetic Field
..........N. Miki&I. Shimoyama 221

MAY 2001 Volume 121-E Number 5
Paper
A Prudent Automated Car Ventilation System and Driving Data
H.Nakagawa, S.Okazaki, S.Asakura, H.Akimoto,&J.Kubo 237
Study on the Development of a Practical System for Discrimination and Concentration-Estimation of Domestic Gases
K.Sugahara, R.Konishi, B.Yea,&T.Osaki 243
Ferroelectric Properties of BaTiO3 Related thin Film Prepared by Pulsed Laser Deposition Method Using Nd3+: YAG Laser
Y.Masuda, H.Kakemoto, K.Kakimoto,&S.Fujita 248
Field Emitter Type Pyroelectric Infrared Sensors
K.Tomita, K.Sawada,&M.Ishida 255
Development of a Highly Sensitive Sensing Film of a Gas Sensor by Molecular Arrangement Control of Self-assembled Film
S.Shiratori&K.Kohno 261
Development of Plastic Injection Molding Using the LIGA Process
C.Yoshimura, Y.Kobayashi, H.Aoki, H.Ueno,&S.Sugiyama 266
Non-Scanning Rapid Prototyping System using a Digital Micromirror Device
T.Akahane&K.Takahashi 275
Dangler Type Vibrating Gyroscope Using the Parallel Beam Structure by the Sheet Metal Molding
H.Sato, F.Arai, T.Fukuda, K.Itoigawa,&Y.Tsukahara 281

JUNE 2001 Volume 121-E Number 6
Paper
Miniaturization of Self-running Rectangular Ultrasonic Actuators
..........T. Furukawa, M. Shingyouchi,&Y. Kagawa 295
Magnetic Configuration of Current Sensor Using Inductive Magnetic Detector
..........S. Nakagawa, K. Yabusaki,&G. Kinoshita 302
Preparation of BST Ferroelectric Thin Film by Metal Organic Decomposition for Infrared Sensor
..........H. Zhu, H. Xu, M. Noda, T. Mukaigawa, K. Hashimoto,&M. Okuyama 308
Biomimicry Sound Source Localization with "Fishbone"
..........N. Ono, Y. Zaitsu, T. Nomiyama, A. Kimachi,&S. Ando 313
Fabrication of Grating Couplers using Submicron Silicon Mold
..........Y. Li, M. Sasaki,&K. Hane 320
Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications
..........M. Hirota, F. Satou,&S. Morita 325
Environmental Measurement Technology Using Multiple Internal Reflection FTIR
..........F. Takayanagi, M. Endo, K. Maruo, H. Yoshida,&M. Niwano 331
MEMS Process Simulation and Device Analysis for an Electro-Statically Actuated Micro-Mirror
..........N. Finch, S. Dutta, J. Kuhn, J. Marchetti,&T. Yamada 337
Recognition of Residential Behavious Using Odor Sensor Characteristics--Improvement of Recognition Rate by Applying of an Association Rule--
..........Y. Ueda, S. Furukawa, H. Kimura,&T. Oyabu 343

JULY 2001 Volume 121-E Number 7
Review
Development of Actuators for Micro Robots--Examples of Fluid Microactuators--
..........K.Yoshida&S.Yokota 357
Paper
Small&High-Sensitive Three Axis SOI Capacitive Accelerometer
..........Y.Yamaguchi, F.Katsumata, F.Nishida, M.Nishimura,Y.Matsumoto,&M.Ishida 362
A Novel Range Finding System Using Correlation Image Sensor
..........A.Kimachi, T.Kurihara, M.Takamoto,&S.Ando 367
Measurement of Water Purification Process of Bamboo Charcoal by using the Multichannel Measurement System with Seven Ion-selective Electrodes
..........T.Yoshimura, K.Tsuchida,&Y.Aoyama 376
Microfabricated CE Chips with Optical Slit
..........M.Kanai, H.Nakanishi, T.Nishimoto, Y.Fujiyama, H.Abe,&A.Arai 382
Simple Analytical Method for the Determination of Volatile Chloroorganic Compounds in Water Using Lipid-Coated Quartz Crystal Microbalance Sensor
..........K.Noda, R.Naganawa, H.Tao, K.Sakurai, Y.Numata,&S.Matsumoto 388
Development of SnO2-based Gas Sensors for Detection of Volatile Organic Compounds
..........M.Kadosaki, S.Yamazaki, S.Fujiki, K.Tanino,&C.Tatsuyama 395
Length Measurement for Pipes with Curves and Branches Using Stationary Wave
..........M.Nishimoto&S.Tanaka 402
Dependence of NO2 Gas on Schottky Diode Capacitance Fabricated by Using Diamond Thin Films
..........N.Hashimoto, T.Kamijo, S.G.Ri, K.Tashiro, S.Tanaka,H.Kimura, T.Kurosu,&M.Iida 412

AUGUST 2001 Volume 121-E Number 8
Special lssue on ''Chemical Sensor Technology forClinical Analysis and Welfare''
Preface to the Special Issue on ''Chemical Sensor Technology for Clinical Analysis and Welfare''
..........S. Yamauchi 429
Special lssue Review
Applications of Surface Plasmon Resonance Sensor in Medical Field
..........S. Toyama, A. Ohide,&F. Olga 430
Special Issue Paper
Identification of Meal-degree for Aged Living in Solitude using Odor Sensors
.......... A. Sawada, T. Oyabu,&H. Nanto 434
Micromachined Ammonia Gas-Sensing Electrode and its Application to a Micro Urea Sensor
..........H. Suzuki&Y. Watanabe 440
Needle-Type Glucose Biosensor Fabricated with Semiconductor Process: Utilization of a Novel Thin Film Ag/AgCl Reference Electrode and Plasma-polymerized Film
..........H. Muguruma, A. Hiratsuka, K. Kojima, H. Suzuki,K. Ikebukuro,&I. Karube 445
Microfabricated Double Junction Reference Electrode and its Application to a One-Chip Ca2+ Sensor
..........T. Taura&H. Suzuki 452
Paper
Prototype of the Stacked CdZnTe Semiconductor Detector for 16N Measurement
..........H. Nishizawa, H. Inujima, H. Fujiwara,&H. Nakamura 458
A High Density Full Color LED Display Panel on a Silicon Microreflector
..........S. Takano&K. Takahashi 464
Special Issue Letter
SPR Sensor as a Tool to Evaluate Binding Capacity of Gastric Ulcer Drugs with Mucous Membrane
..........A. Shoji, S. Toyama, Y. Yoshida, S. Yamauchi,&Y. Ikariyama 469

SEPTEMBER 2001 Volume 121-E Number 9
Paper
Ultrasound Imaging using Laser Induced Breakdown
..........O.Oshiro, A.Machida, M.Doi, K.Chihara, D.Ueda,T.Sugiura,&S.Kawata 479
Removal of Ammonia Gas by using Layer-by-Layer Self-Assembly Film
M.Kikuchi, Y.Inami,&S.Shiratori 484
Interferometers based on Standing Wave Detection using thin Film Photodiodes
X.Mi, M.Sasaki, T.Hirano,&K.Hane 489
Preparation of Piezoelectric PZT Micro-discs by Sol-gel Method
T.Omori, H.Makita, M.Takamatsu, K.Hashimoto,M.Yamaguchi,&M.Sato 496
Development of Inkjet Head for DNA Chip
D.Sim, T.Ono,&M.Esashi 501
NO2-fluorescence Detection System Using a Quartz Microchip
T.Sato, H.Susaki, T.Iwata, K.Yamamoto, T.Odake,&T.Korenaga 507
Micromachined Planar Coil Tactile Sensor Implantable in Soft Structure
N.Futai, T.Yasuda,&I.Shimoyama 513
Micromachined Dispenser with High Resolution
A.Koide, Y.Sasaki, Y.Yoshimura, R.Miyake,&T.Terayama 519

OCTOBER 2001 Volume 121-E Number 10
Special Issue on ''Functional Oxide Thin Films and Their Processing Technolgy"
Special Issue Review
Electronic Devices Using Ferroelectric Thin Films
..........M. Okuyama 537
Special Issue Paper
The Substrate-Film Lattice Mismatch in La0.7Ba0.3MnO3 Thin Films for Uncooled Infrared Bolometric Applications
..........K. Hayashi, E. Ohta,&H. Wada 542
Magnetoresistance of (La,Sr)MnO3 Tilted Nanocolumn Boundaries Grown on Step-edged (100) GaAs Substrate
..........I. Satoh, M. Oniduka,&T. Kobayashi 548
Paper
Gene-extraction of Escherichia coli O157 from Feces by the Metal Coating Hollow Fiber Membrane
..........T. Sugawara, S. Funaki, K. Kimura, K. Misawa,J. Arisawa,&O. Igarashi 552
Electrochemical Oligonucleotide Detection Based on Probe DNA-Modified Gold Electrode using Cobalt Phenanthroline Complex
..........S. Watanabe&I. Kubo 559
Realization of Nanometer-scale Processing by Fluorocarbon Plasma Treatment of Polycarbonate and Its Potential Application to High-Density Memory
..........S. Miyake&K. Matsuzaki 564

NOVEMBER 2001 Volume 121-E Number 11
Review
Micromachining for Microwave, Millimeter and Teraheltz Wave Frequencies Applications
K. Mizuno 585
Uncooled Infrared Focal Plane Arrays
M. Kimata 589
Paper
Simulation of Laser Plasma Emission Characteristics of Small Solid Particles in Different Gas Atmospheres at Various Pressures
A. Andreev&T. Ueda 593
Development of a Torque Sensor using Giant Magnetostrictive Material for Electric Power-Assisted Bicycles
K. Kakutani&K. Yokotani 599

DECOMBER 2001 Volume 121-E Number 12
Review
Recent Progress of Optical MEMS Technology
..........H. Fujita 621
Recording of Odor Recipe Using Active Odor Sensing System
T. Nakamoto 625
Paper
High Sensitive Quartz Crystal Microphone using Micro-Machining Technology
T. Ueda, H. Kousaka, D. Yamazaki,&H. Hayashi 629
A Proposal and a Demonstrational Study of an Electrostatically Driven Surface Output Optical Switching Device with a Sheet Waveguide
T. Oguchi, M. Murakami, M. Hayase,&T. Hatsuzawa 636
Improvement of Sensitivity to Sweet Taste Substances Using Taste Sensor with Lipid Membranes
M. Habara, H. Ikezaki, A. Taniguchi,&K. Toko 641
Selectivity Control of Mask Material for XeF2 Etching Using UV Light Exposure
K. Sugano&O. Tabata 647

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