The
Transactions of The Institute of Electrical Engineers of Japan
A Publication of Sensors and
Micromachines Society
2000 Volume 120 Contents
Japanese English
Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.
JANUARY 2000 Volume
120-E Number 1
Special
Issue on ''Nano-Machinig
and Data Storage
Special Issue Review
Nano-Machining
and Data Storage using SPM
.....S.Hosaka 1
Special Issue Paper
Nanometer-scale
Mechanical Processing of Muscovite Mica and Application to High-Density Memory
.....S.Miyake & M.Asano 8
Paper
Detector
Pixel in Dielectric Bolometer Mode Based on Ferroelectric thin Film Capacitors
for Uncooled Infrared Image Sensor
.....K.Hashimoto, M. Noda,T.Mukaigawa, R.Kubo, H.Tanaka, H.Xu, &
M.Okuyama 15
Measurements
of Taste of Milk with a Taste Sensor
.....M.Yahiro, K.Toko, Y.Kikkawa, & T.Yahiro 20
Letter
A Modeling of Purification Process of Epipremnum aureum for Formaldehyde using Gas Sensor
.....T.Onodera, S.Hirobayashi, T.Yamabuchi, H.Kimura, & T.Oyabu 26
FEBRUARY 2000 Volume
120-E Number 2
Review
Reliability
of Measurement Results on Micromachine
.....T.Usuda 31
Sensor
Technology for Automobile
.....S.Shimada&K.Tabuchi 35
Current
Trends and Future Outlook for Sensor Materials
.....N.Ichinose 39
Paper
Fabrication
of A Rotary device for Self-Running Magnetic Actuator
.....M.Enokizono, T.Todaka&K.Goto 45
Exposure
Characteristics of Photoresist Illuminated by Near-field Light
.....Y.Mitsuoka, K.Nakajima,&T.Sakuhara 52
Micromachined
125
m Diameter Ultra Miniature
Fiber-Optic Pressure Sensor for Catheter
.....T.Katsumata, Y.Haga, K.Minami,&M.Esashi 58
MARCH 2000 Volume 120-E Number 3
Special Issue on ''Vibratory Sensors and Actuators''
Special Issue Review
Sensor
Technologies Based on Mechanical Resonance and Vibration
..........K. Ikeda&K. Maenaka 87
Special Issue Paper
A
Study on Tapping Styluses for Surface Profilometry
..........T. Hatsuzawa&K. Takahashi 93
Environmental
Sensing using a Contact Force and Position Sensor Incorporating Four Pairs of
Quartz Resonators
..........S. Muraoka 99
Full-fiber-type
Sensing System for Physical Quantities using a Photothermally Vibrated
Quartz-core Cantilever
..........H. Kumazaki, S. Inaba,&K. Hane 105
Double-frame
Silicon Gyroscope Packaged under Low Pressure by Wafer Bonding
..........S.Kobayashi, K.Ohwada, T.Hara, T. Oguchi, Y. Asaji,&K. Yaji 111
Realization
of High Sensitivity in Piezoelectric Vibratory Gyroscopes by an Inductance
Element
..........S. Sugawara&S. Kudo 116
Vibrational
Characteristics of a Silicon 3D Structure and the Consideration in Applications
..........S. Tomonari, T. Ishida, T. Nakamura, K. Nohara,F. Kasano, M.
Okada,&K. Maenaka 122
Design
and Analysis of Parallel Beam Vibrating Gyroscope
..........H. Sato, F. Arai, T. Fukuda, K. Itoigawa, &Y. Tsukahara 128
Special Issue Letter
A
Study of Vibratory Gyroscope using Membrane Structure as A Spring
..........K.Maenaka, S.Okada, M.Tokunaga, T.Fujita,&M.Maeda 134
Micromachined
Mirror using High Polymer as Moving Structure
..........K.Maenaka, T.Nishimura, H.Ikeda, T.Fujita,&M. Maeda 136
Driving
Technique of Reference Vibration for Vibratory Gyroscopes using Hard Spring
Effect
..........T. Fujita, S. Okada, K. Maenaka,&M. Maeda 138
APRIL 2000 Volume 120-E
Number 4
Paper
New
Direction Finding Equation of Navigation by Magnetic Sensors
..........T. Araki&H. Ono 145
Sensor
Development for Occlusal Force and Relative Position
..........K. Nozaki, K. Totsu, S. Wang, K. Kuroe, T. Sata,&M. Esashi 150
Improvement
of Production Reproducibility of Tungsten Probe using Electropolishing
..........K. Takahashi, M. Hayase,&T. Hatsuzawa 156
Multi-layered
Sensing Approach for Environment Perception with One Multi-Functional Sensor
..........J. Sun&K. Shida 162
High
Frequency and High Speed IC Inspection Probe using Quartz Crystal Micro-Balance
..........T. Ueda, H. Hayashi,&T. Sugiyama 169
Letter
Measurement
of Heat Transfer in Micro-Bridge Heater
..........H. Wado, T. Yamamoto, Y. Takeuchi, Y. Ohtsuka,&S. Akita 175
A
Normally Closed PDMS (polydimethylsiloxane) Microvalve
..........K. Hosokawa&R. Maeda 177
MAY 2000 Volume 120-E
Number 5
Special
Issue on ''Integrated
Sensors, Smart Sensors and Their Technologies''
Special
Issue Review
CMOS
Integrated Chemical Microsensors And Their Circuitry
..........H. Baltes, O. Brand,&C. Hagleitner 185
Special
Issue Paper
A
1-D Motion Measurement Method for Vision Chips
..........K.Yamada&M.Soga 190
An
Artificial Retina Chip with Pixel-wise Self-Adjusting Intensity Response
..........H. Ui, Y. Arima, F. Murao, S. Komori,&K. Kyuma 197
Study of LSI Circuit for Learning and Odor Recognition Using 1bit Data Stream Signal Processing Method
..........S. Kawamura, T. Nakamoto,&T. Moriizumi 204
Magnetic
Sensor System for Detecting Position and Orientation of a Catheter Tip
..........K. Totsu, Y. Haga,&M. Esashi 211
GMR
Revolution Sensors for Automobiles
..........T. Fukami, I. Shinjo, M. Yokotani,&K. Tsutsumi 219
A
CMOS Optical Sensor Which Counts the Number of Objects
..........M. Nishimura&J.V. der Spiegel 225
An
Optical Feature Detection Sensor Based on Orientation Decomposition
..........M. Nishimura&J.V. der Spiegel 230
Design
of a Motion Stereo VLSI Processor Based on a Transfer Bottleneck-Free
Sensor/Memory Architecture
..........M. Hariyama, S. Lee,&M. Kameyama 237
Paper
Sticking
Prevention of Resonant Strain Sensors
..........K. Ikeda, T. Watanabe, T. Yoshida, S. Miyazaki, H.
Tsukamoto,&T. Kudoh 245
Study
on Display Characteristics of Color Display Using Tuneable Fabry-Perot
Interferometer
..........S. Tsuchitani, R. Kaneko, Y. Koshimoto,&Y. Arai 252
JUNE 2000 Volume 120-E
Number 6
Special
Issue on ''Micromachine
and Visualization Technology''
Preface
to the Special Issue on ''Micromachine
and Visualization Technology''
..........H. Yuasa 263
Special
Issue Paper
Implementation
of Real Time Micro VR Camera
..........K. Ohba, J.C.P. Ortega, K. Tanie, G. Rin, R. Dangi,Y. Takei, T.
Kaneko,&N. Kawahara 264
Visualization
and Detection of Wall Shear Stress using Micro Shear Stress Sensor and Discrete
Wavelet Analysis
..........M. Kimura, M. Takei, N. Miyagi, C. Ho, Y. Saito,&K. Horii 272
Monitoring
System for the Totally Implantable Artificial Heart by the use of the Sensors
for a Virtual Reality System and Micromachine
..........T. Yambe, A. Tanaka,&S. Nitta 280
An
Approach to Simultaneous Visualization of Local Electric Field and Atomic
Structure Using Electron Interferometer
..........J. Endo, Y. Wada, H. Fujita,&J. Chen 285
Tomography
of Ultrasonic Beam Using Schlieren Method for Data Acquisition
..........K. Mizutani, K. Yoshinari, T. Ezure,&K. Nagai 292
Visualization
Techniques Related to Scanning Probe Microscopy
..........H. Kawakatsu 298
Paper
Rapid
Growth of Deuterated L-Alanine-Doped Triglycine Sulfate Crystal and its
Pyroelectric Property
..........K. Fujioka, M. Nakatsuka, J. Kobayashi, K. Takakura,&H.
Kishihara 306
Review
Vacuum
Packaging Technology for Microsensors
..........M. Esashi 310
JULY 2000 Volume 120-E
Number 7
Special
Issue on ''3-Dimensional
Micromachining''
Special
Issue Paper
3-Dimensional
Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography
Process
..........O. Tabata, K. Terasoma, N. Agawa,&K. Yamamoto 321
Effect
of Potassium Ion on Anisotropy of TMAH
..........O. Tabata, M. Yashima, T. Yoshioka,&K. Sato 327
A
Study of Thin Film Transfer in A Novel Fabrication Method for 3-D
Microstructures using Surface-Activated Bonding
..........T. Yamada&M. Takahashi 333
Fabrication
of Sub-Micron Structures with High Aspect Ratio for Practical MEMS
..........H. Ueno, N. Nishi,&S. Sugiyama 339
Trapping
of Microstructure by Laser Scanning Manipulation
..........M. Miwa, H. Misawa,& R. Kaneko 345
Nano
Protuberance and Groove Processing of Silicon by Diamond Tip Sliding
..........S. Miyake&J. Kim 350
A
Silicon Shadow Mask with Unlimited Patterns and a Mechanical Alignment
Structure by Al-Delay Masking Process
..........Y. Mita, A. Tixer, S. Oshima, M. Mita, J-P. Gouy,& H.
Fujita 357
Development
of Microconnectors Using 3 Dimensional Micromachining Based on Deep X-ray
Lithography
..........T. Haga, H. Okuyama, Y. Hirata,&H. Takada 363
Advanced
Micro Stereolithoghaphy with Multi UV Polymers (System Development and
Application to Three-dimensional Optical Waveguides)
..........S. Maruo, K. Ikuta,&T. Ninagawa 370
Special
lssue Letter
3-D
Micromachining with TIEGA Process
..........T. Katoh 375
AUGUST/SEPTEMBER 2000
Volume 120-E Number 8/9
Special
Issue on ''Measurement
Techniques for Micromachine''
Special
Issue Review
Interferometric Metrology of Dynamic Properties of MEMS
..........C.K. Lee&G.Y. Wu 381
Special
Issue Paper
Etching
Surface Form Evaluation of LiNbO3 Crystal in Plasma RIE
..........T. Nishimura&S. Yoshikado 386
Paper
A Threaded Wobble Motor by Electro-magnetic Driving
..........T. Iizuka&H. Fujita 392
Deformation
Analysis of Micro-Cantilever with Constant Bending Moment driven by the
Electro-Static Force
..........T. Oguchi, M. Hayase,&T. Hatsuzawa 398
A
Current Mode Successive Approximation ADC for Focal Plane Integration
..........K. Sugiura, M.S. Oh,&K. Aizawa 405
Principle
and Simulation for Reconstruction of Two-dimensional Image beyond Nyquist
Frequency
..........T. Kimura, N. Takatsuka, T. Arano,&H. Shiraki 410
Numerical
Visualization of Macroscopic Gas Flows Around Laser Opto-microactuators
..........M. Ota&T. Nakao 417
Thin-walled
Tube Supported by Coil Spring for Small Diameter Active Catheters
..........Y. Haga, S. Maeda,&M. Esashi 426
OCTOBER 2000 Volume
120-E Number 10
Special
Issue on ''Chemical
Sensing of Living Environment''
Preface
to the Special Issue on ''Chemical
Sensing of Living Environment''
..........M.Egashira 437
Special
Issue Paper
Discrimination
of Volatile Organic Compounds in Indoor Environment by an Integrated Thick-Film
Gas Sensor
..........M.Kadosaki, S.Fujiki, K.Tanino,K.Ishikawa,
K.Komori,&C.Tatsuyama 438
VOCs
Identification Sensor System with Gas SensorsforHuman Life
..........Y.Sadaoka 446
Optical
Sensing of Alkane and Gasoline Vapors Using Swelling Plastic Optical Fiber
..........M.Morisawa, H.Kozu, Y.Amemiya,&S.Muto 452
Effects
of Pd-and Pt-loading on the Gas-sensing Properties of SnO2 Subjected to Surface
Chemical Modification with Diethoxydimethylsilane
..........K.Wada&M.Egashira 458
Influence
of Oxygen to NOX Sensing Properties of WO3 Thin Film Prepared by Vacuum
Evaporation
..........S.Nakagomi&T.Sato 468
Thin-Film-Type
Oxide Semiconductor Sensor for Detecting Acetone in Human Expiration Aiming at
Diagnosis of Diabetes
..........G.Sakai, K.Motooka, N.Miura,&N.Yamazoe 476
Special
Issue Letter
Enhancement
of Acetaldehyde Sensitivity of SnO2 by Simultaneous Addition of Rh and La2O3
..........Y.Shimizu, M.Kohyama, T.Hyodo,&M.Egashira 482
The
Effect of Phosphor Doping on the Enhancement of Ammonia Gas Sensing with
Ammonium Hydrogermanate Solid Electrolytes
..........N.Imanaka, S.Yoshikawa,T. Yamamoto &G.Adachi 484
Dissolved
Oxygen Sensor using Platinum Electrode Coated with Polydimethylsiloxane
..........F.Mizutani, S.Yabuki,&S.Iijima 486
A
Planar-Type CO2 Sensor Using NASICON and Perovskite-Type Oxide Thin-Films
..........Y.Shimizu&T.Soda 488
NOVEMVER 2000 Volume
120-E Number 11
Paper
Multiple-height
Microstructures Fabricated by ICP-RIE and Embedded Masking Layers
..........M. Mita, Y. Mita, H. Toshiyoshi,&H. Fujita 493
A
Hysteresis Movement Analysis of Micro-Cantilever with Constant Bending Moment
Driven by Electro-Static Force
..........T. Oguchi, M. Hayase,&T. Hatsuzawa 498
A
Simple Si Pitch-variable Grating With Shape Memory Alloy Actuator
..........Y. Li, M. Sasaki, & K. Hane 503
Small
Diameter Active Catheter Using Shape Memory Alloy Coils
..........Y. Haga&M. Esashi 509
Assembly
of Bending, Torsional and Extending Active Catheter Using Electroplating
..........Y. Haga&M. Esashi 515
An
Odor Detection by Measuring the QCM Resistance
..........K. Ishii&M. Akiya 521
Development
of Signal Processing Circuits for a Resistive Humidity Sensor
..........S. Nakagawa, A. Takahashi, K. Aizawa,&G. Kinoshita 526
Extraction
of Information of Driving-State from a Gas Sensor Response by Genetic Algorithm
..........T. Hayashi, H. Kimura, T. Oyabu,&T. Nishikawa 533
DECEMBER 2000 Volume
120-E Number 12
Special
Issue on ''Ferroelectric
Thin Film and its Process Technologies''
Special
Issue Paper
Optimization
of ZnO Piezoelectric Thin Films and Bottom Electrodes in Thin Film Bulk
Acoustic Wave Resonator
..........Y. Yoshino, K.
Inoue, M. Takeuchi, T. Makino,&T. Hata 547
Application
of Ferroelectric BST Thin Film Prepared by MOD for Uncooled Infrared Sensor of
Dielectric Bolometer Mode
..........H. Zhu, M. Noda, T.
Mukaigawa, H. Xu, K. Hashimoto,&M. Okuyama 554
A
Study of Controlling of Dielectric Properties of Pb(Zr, Ti)O3 Thin Film
..........T. Hirasawa, T.
Yamamoto, I. Kanno, H. Kotera,S. Shima, H. Torii,&R. Takayama 559
Paper
Through-hole
Interconnections Formed by Optical Excitation Electropolishing Method
..........A. Satoh 565
Silicon
Micromachined Fiber-Optic Accelerometer for Downhole Seismic Measurement
..........K. Hirata, H.
Niitsuma,&M. Esashi 576
Measurement
of the Tribo-Charge Values on the Surface of a Spherical Toner Particle
..........Y. Yamamoto, K.
Taniguchi, Y. Takahara,Y. Nakano, H. Yamamoto,&S. Watanabe 582
Mono-Channel
Taste Sensor Using LB Film
..........J. Matsuzaki, H.
Takano,&M. Akiya 558
Indirect
Detection of Nitrogen Oxide Emission on Actual PFBC (Pressurized Fluidized Bed
Combustion)
..........T. Harada, Y.
Ogura, R. Abe,&K. Sasatsu 593
Special
Issue Letter
Patterning
Properties of Lead Zirconate Titanate (PZT) Thick Films Made by Aerosol
Deposition
..........M. Lebedev&J. Akedo 600
Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.