A Publication of Sensors and Micromachines Society
Extended Summary 2000

 

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Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.

Vol. 120-E No. 1 Jan.

 

l         Nanometer-scale Mechanical Processing of Muscovite Mica and Application to High-Density Memory.....S.Miyake & M.Asano            8

l         Detector Pixel in Dielectric Bolometer Mode Based on Ferroelectric thin Film Capacitors for Uncooled Infrared Image Sensor.....K.Hashimoto, M. Noda,T.Mukaigawa, R.Kubo, H.Tanaka, H.Xu, & M.Okuyama      15

l         Measurements of Taste of Milk with a Taste Sensor.....M.Yahiro, K.Toko, Y.Kikkawa, & T.Yahiro      20

Vol. 120-E No. 2 Feb.

 

l         Fabrication of A Rotary device for Self-Running Magnetic Actuator .....M.Enokizono, T.Todaka&K.Goto           45

l         Exposure Characteristics of Photoresist Illuminated by Near-field Light.....Y.Mitsuoka, K.Nakajima,&T.Sakuhara       52

l         Micromachined 125m Diameter Ultra Miniature Fiber-Optic Pressure Sensor for Catheter.....T.Katsumata, Y.Haga, K.Minami,&M.Esashi              58

Vol. 120-E No. 3 Mar.

 

l         A Study on Tapping Styluses for Surface Profilometry..........T. Hatsuzawa&K. Takahashi      93

l         Full-fiber-type Sensing System for Physical Quantities using a Photothermally Vibrated Quartz-core Cantilever..........H. Kumazaki, S. Inaba,&K. Hane            105

l         Double-frame Silicon Gyroscope Packaged under Low Pressure by Wafer Bonding..........S.Kobayashi, K.Ohwada, T.Hara, T. Oguchi, Y. Asaji,&K. Yaji      111

l         Realization of High Sensitivity in Piezoelectric Vibratory Gyroscopes by an Inductance Element..........S. Sugawara&S. Kudo   116

l         Vibrational Characteristics of a Silicon 3D Structure and the Consideration in Applications..........S. Tomonari, T. Ishida, T. Nakamura, K. Nohara,F. Kasano, M. Okada,&K. Maenaka        122

l         Design and Analysis of Parallel Beam Vibrating Gyroscope..........H. Sato, F. Arai, T. Fukuda, K. Itoigawa, &Y. Tsukahara    128

Vol. 120-E No. 4 Apr.

 

l         New Direction Finding Equation of Navigation by Magnetic Sensors..........T. Araki&H. Ono   145

l         Sensor Development for Occlusal Force and Relative Position..........K. Nozaki, K. Totsu, S. Wang, K. Kuroe, T. Sata,&M. Esashi        150

l         Improvement of Production Reproducibility of Tungsten Probe using Electropolishing..........K. Takahashi, M. Hayase,&T. Hatsuzawa           156

l         Multi-layered Sensing Approach for Environment Perception with One Multi-Functional Sensor..........J. Sun&K. Shida            162

l         High Frequency and High Speed IC Inspection Probe using Quartz Crystal Micro-Balance..........T. Ueda, H. Hayashi,&T. Sugiyama           169

Vol. 120-E No. 5 May.

l         A 1-D Motion Measurement Method for Vision Chips..........K.Yamada&M.Soga          190

l         An Artificial Retina Chip with Pixel-wise Self-Adjusting Intensity Response..........H. Ui, Y. Arima, F. Murao, S. Komori,&K. Kyuma   197

l         Study of LSI Circuit for Learning and Odor Recognition Using 1bit Data Stream Signal Processing Method ..........S. Kawamura, T. Nakamoto,&T. Moriizumi 204

l         Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip..........K. Totsu, Y. Haga,&M. Esashi          211

l         GMR Revolution Sensors for Automobiles..........T. Fukami, I. Shinjo, M. Yokotani,&K. Tsutsumi           219

l         A CMOS Optical Sensor Which Counts the Number of Objects..........M. Nishimura&J.V. der Spiegel    225

l         An Optical Feature Detection Sensor Based on Orientation Decomposition..........M. Nishimura&J.V. der Spiegel       230

l         Design of a Motion Stereo VLSI Processor Based on a Transfer Bottleneck-Free Sensor/Memory Architecture..........M. Hariyama, S. Lee,&M. Kameyama   237

l         Sticking Prevention of Resonant Strain Sensors..........K. Ikeda, T. Watanabe, T. Yoshida, S. Miyazaki, H. Tsukamoto,&T. Kudoh             245

l         Study on Display Characteristics of Color Display Using Tuneable Fabry-Perot Interferometer..........S. Tsuchitani, R. Kaneko, Y. Koshimoto,&Y. Arai         252

Vol. 120-E No. 6 Jun.

 

l         Implementation of Real Time Micro VR Camera..........K. Ohba, J.C.P. Ortega, K. Tanie, G. Rin, R. Dangi,Y. Takei, T. Kaneko,&N. Kawahara       264

l         Visualization and Detection of Wall Shear Stress using Micro Shear Stress Sensor and Discrete Wavelet Analysis..........M. Kimura, M. Takei, N. Miyagi, C. Ho, Y. Saito,&K. Horii     272

l         Monitoring System for the Totally Implantable Artificial Heart by the use of the Sensors for a Virtual Reality System and Micromachine..........T. Yambe, A. Tanaka,&S. Nitta      280

l         An Approach to Simultaneous Visualization of Local Electric Field and Atomic Structure Using Electron Interferometer..........J. Endo, Y. Wada, H. Fujita,&J. Chen              285

l         Tomography of Ultrasonic Beam Using Schlieren Method for Data Acquisition..........K. Mizutani, K. Yoshinari, T. Ezure,&K. Nagai       292

l         Rapid Growth of Deuterated L-Alanine-Doped Triglycine Sulfate Crystal and its Pyroelectric Property..........K. Fujioka, M. Nakatsuka, J. Kobayashi, K. Takakura,&H. Kishihara           306

Vol. 120-E No. 7 Jul.

 

l         3-Dimensional Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography Process..........O. Tabata, K. Terasoma, N. Agawa,&K. Yamamoto 321

l         Effect of Potassium Ion on Anisotropy of TMAH..........O. Tabata, M. Yashima, T. Yoshioka,&K. Sato     327

l         A Study of Thin Film Transfer in A Novel Fabrication Method for 3-D Microstructures using Surface-Activated Bonding..........T. Yamada&M. Takahashi 333

l         Fabrication of Sub-Micron Structures with High Aspect Ratio for Practical MEMS..........H. Ueno, N. Nishi,&S. Sugiyama     339

l         Trapping of Microstructure by Laser Scanning Manipulation..........M. Miwa, H. Misawa,& R. Kaneko 345

l         Nano Protuberance and Groove Processing of Silicon by Diamond Tip Sliding..........S. Miyake&J. Kim       350

l         A Silicon Shadow Mask with Unlimited Patterns and a Mechanical Alignment Structure by Al-Delay Masking Process..........Y. Mita, A. Tixer, S. Oshima, M. Mita, J-P. Gouy,& H. Fujita    357

l         Development of Microconnectors Using 3 Dimensional Micromachining Based on Deep X-ray Lithography..........T. Haga, H. Okuyama, Y. Hirata,&H. Takada        363

l         Advanced Micro Stereolithoghaphy with Multi UV Polymers (System Development and Application to Three-dimensional Optical Waveguides)..........S. Maruo, K. Ikuta,&T. Ninagawa   370

Vol. 120-E No. 8/9 Aug./Sep.

 

l         Etching Surface Form Evaluation of LiNbO3 Crystal in Plasma RIE..........T. Nishimura&S. Yoshikado       386

l         A Threaded Wobble Motor by Electro-magnetic Driving ..........T. Iizuka&H. Fujita             392

l         Deformation Analysis of Micro-Cantilever with Constant Bending Moment driven by the Electro-Static Force..........T. Oguchi, M. Hayase,&T. Hatsuzawa              398

l         A Current Mode Successive Approximation ADC for Focal Plane Integration..........K. Sugiura, M.S. Oh,&K. Aizawa         405

l         Principle and Simulation for Reconstruction of Two-dimensional Image beyond Nyquist Frequency..........T. Kimura, N. Takatsuka, T. Arano,&H. Shiraki    410

l         Numerical Visualization of Macroscopic Gas Flows Around Laser Opto-microactuators..........M. Ota&T. Nakao       417

l         Thin-walled Tube Supported by Coil Spring for Small Diameter Active Catheters..........Y. Haga, S. Maeda,&M. Esashi          426

Vol. 120-E No. 10 Oct.

Title

Author

Page

Extended Summary

Full Paper

Discrimination of Volatile Organic Compounds in Indoor Environment by an Integrated Thick-Film Gas Sensor

M.Kadosaki, S.Fujiki, K.Tanino,K.Ishikawa, K.Komori,&C.Tatsuyama

438

VOCs Identification Sensor System with Gas SensorsforHuman Life

Y.Sadaoka

446

Optical Sensing of Alkane and Gasoline Vapors Using Swelling Plastic Optical Fiber

M.Morisawa, H.Kozu, Y.Amemiya,&S.Muto

452

Effects of Pd-and Pt-loading on the Gas-sensing Properties of SnO2 Subjected to Surface Chemical Modification with Diethoxydimethylsilane

K.Wada&M.Egashira

458

Influence of Oxygen to NOX Sensing Properties of WO3 Thin Film Prepared by Vacuum Evaporation..........

S.Nakagomi&T.Sato

468

Thin-Film-Type Oxide Semiconductor Sensor for Detecting Acetone in Human Expiration Aiming at Diagnosis of Diabetes

G.Sakai, K.Motooka, N.Miura,&N.Yamazoe

476

Vol. 120-E No. 11 Nov.

Title

Author

Page

Extended Summary

Full Paper

Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers

M. Mita, Y. Mita, H. Toshiyoshi,&H. Fujita

493

An Odor Detection by Measuring the QCM Resistance

K. Ishii&M. Akiya

521

A Hysteresis Movement Analysis of Micro-Cantilever with Constant Bending Moment Driven by Electro-Static Force

T. Oguchi, M. Hayase,&T. Hatsuzawa

498

A Simple Si Pitch-variable Grating With Shape Memory Alloy Actuator

Y. Li, M. Sasaki, & K. Hane

503

Small Diameter Active Catheter Using Shape Memory Alloy Coils

Y. Haga&M. Esashi

509

Assembly of Bending, Torsional and Extending Active Catheter Using Electroplating

Y. Haga&M. Esashi

515

Development of Signal Processing Circuits for a Resistive Humidity Sensor

S. Nakagawa, A. Takahashi, K. Aizawa,&G. Kinoshita

526

Extraction of Information of Driving-State from a Gas Sensor Response by Genetic Algorithm

T. Hayashi, H. Kimura, T. Oyabu,&T. Nishikawa

533

Vol. 120-E No. 12 Dec.

Title

Author

Page

Extended Summary

Full Paper

Optimization of ZnO Piezoelectric Thin Films and Bottom Electrodes in Thin Film Bulk Acoustic Wave Resonator

Y. Yoshino, K. Inoue, M. Takeuchi, T. Makino,&T. Hata

547

 

Application of Ferroelectric BST Thin Film Prepared by MOD for Uncooled Infrared Sensor of Dielectric Bolometer Mode

H. Zhu, M. Noda, T. Mukaigawa, H. Xu, K. Hashimoto,&M. Okuyama

554

 

A Study of Controlling of Dielectric Properties of Pb(Zr, Ti)O3 Thin Film

T. Hirasawa, T. Yamamoto, I. Kanno, H. Kotera,S. Shima, H. Torii,&R. Takayama

559

 

Through-hole Interconnections Formed by Optical Excitation Electropolishing Method

A. Satoh

565

 

Silicon Micromachined Fiber-Optic Accelerometer for Downhole Seismic Measurement

K. Hirata, H. Niitsuma,&M. Esashi

576

 

Measurement of the Tribo-Charge Values on the Surface of a Spherical Toner Particle

Y. Yamamoto, K. Taniguchi, Y. Takahara,Y. Nakano, H. Yamamoto,&S. Watanabe

582

 

Mono-Channel Taste Sensor Using LB Film

J. Matsuzaki, H. Takano,&M. Akiya

558

 

Indirect Detection of Nitrogen Oxide Emission on Actual PFBC (Pressurized Fluidized Bed Combustion)

T. Harada, Y. Ogura, R. Abe,&K. Sasatsu

593

 

Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.