A Publication of Sensors and Micromachines Society 1999E

The Transactions of The Institute of Electrical Engineers of Japan
A Publication of Sensors and Micromachines Society
1999 Volume 119 Contents

Japanese English
Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.

Extended Summary

JANUARY 1999 Volume 119-E Number 1

Paper

Optical Occupant Position Sensor for Airbag System

.....Y. Sano, H. Tanaka, & T. Tanigawa 1

Development of a Milli-sized Superconducting Linear Actuator Using High Tc Superconductor

.....M. Komori & Y. Kawano 7

Influence of Surface Force on Motion of An Electrostatic Microstructure

.....S. Tsuchitani, R. Kaneko, & S. Suzuki 13

Velocity Field Sensing System Using Color TV Camera and Trichrome Stroboscope

.....A. Kimachi, Y. Yao, & S. Ando 20

Development of Oxygen Sensor by Using Fiber-optics Coupler

.....E. Toba, M. Ichikawa, J. Kazama, T. Nishimatsu, & H. Aizawa 27

Lift-Off Patterning Process at the Bottom of a Deep Pit

.....T. Akashi & H. Okano 32

An Analysis of the Heat Transfer for a Micro-Flow Sensor

.....S. Okano, S. Hirano, & H. Horiguchi 38

Discrimination of Standard Odorous Materials for Measuring Olfactory Sense by Quartz Resonator Gas Sensors

.....M. Masanori, M. Katto, S. Ohnishi, & Y. Kurioka 44

FEBRUARY 1999 Volume 119-E Number 2

Special Issue on ''Mechanical Properties of MicrofabricatedStructure Materials''

Special Issue Review

Charactarization of Mechanical Properties of MEMS Materials

.....K. Sato & T. Yoshioka 55

Special Issue Paper

Mechanical Properties of a Polyimide Coat for Fiber-optic Sensors

.....R. Minamitani, M. Komachiya, A. Yasukawa, & S. Watanabe 60

Measurement of Stress and Strain of Single-Crystal-Silicon Thin Film during On-Chip Tensile Test

.....T. Ando, T. Yoshioka, M. Shikida, K. Sato, & T. Kawabata 67

Tensile Testing of Thin Films-Effect of Gauge Length on Breaking Elongation of Low Ductile Thin Films-

.....H. Ogawa, K. Suzuki, S. Kaneko, Y. Nakano, & Y. Ishikawa 73

Paper

Preparation and Fundamental Characteristics of Temperature-sensitive Magnetic Thin Film Photosensor

.....T, Yoshida, T. Obara, H. Osada, N. Tayama, O. Michikami, & K. Seki 80

Optical Encoder Having Pitch-Modulated Photodiode Array

.....T. Ohashi, T. Hirano, A. Ieki, K. Matsui, M. Nashiki,M. Sasaki, & K. Hane 86

An Electrostatic Servo Capacitive Pressure Sensor

.....Y. Ueda, H. Henmi, K. Minami, & M. Esashi 94

Micro Variable Infrared Filter

.....H. Hara & H. Yamagishi 99

NOX Gas Sensing Properties and Mechanism of ZnO-Based Varistor-Type Gas Sensors

.....T. Hyodo, K. Okamoto, Y. Takao, Y. Shimizu, & M. Egashira 103

Self-Alignment Technique of Surface-Micromashined Optical Switches to Bulk-Micromachined V-Grooves

.....D. Miyauchi, H. Toshiyoshi, & H. Fujita 108

Letter

A Fiber Optic Vertical Coupler for the Matrix Tactile Sensor

.....K. Nakamura & M. Uchiyama 113

MARCH 1999 Volume 119-E Number 3

Paper

Study on Ultraminiature Thermal Analysis Device with Micro-Air-Bridge Heater and a New Method for its Heating-rate Curve

.....J. Hayasaka, C. Sawai, & M. Kimura 119

Micro Mechanical Acoustic Sensor toward Artificial Basilar Membrane Modeling

.....M. Harada, N. Ikeuchi, S. Fukui, H. Toshiyoshi, H. Fujita, & S. Ando 125

Multistep Si(100) Terraced Structure by one Photo Mask for Microlens

.....C.K. Chung, Y.T. Li, C.C. Lee, C.Y. Wu, & T.S. Lee 131

Delta-Sigma Modulation Sensor Interface Circuits with Improved Conversion Gain for Capacitive Readout Chemical Sensors

.....S. Kawahito, A. Koll, C. Hagleitner, H. Baltes, & Y. Tadokoro 138

Evaluation of Quality of Recycled Food Packages Using Multichannel Taste Sensor

.....T. Futsuno, S. Takagi, K. Toko, & A. Taniguchi 143

An Analytical Sensor Device of Mixed Gas Based on the Cataluminescence Spectroscopy on

-Al2O3:Dy

.....T. Okabayashi, T. Fujimoto, I. Yamamoto,K. Utsunomiya, & M. Nakagawa 149

Simultaneous Detection of an Electric Field and a Small Quantity of Decomposition Products by Use of Several Sensor Heads and OTDR
Method

.....M. Kawamura & S. Sato 155

On Resolution of Magnetic Sensors

.....H. Matsuba 161

Characteristics of Optical Devices Integrated with Micromechanical Devices Using Spot-size Converted LD

.....K. Akimoto, Y. Katagiri, Y. Uenishi,S. Nagaoka, K. Honma, & Y. Tohmori 167

APRIL 1999 Volume 119-E Number 4

Special Issue on "Smart Systems and Intelligent Sensors"

Preface to the Special Issue on "Smart Systems and Intelligent Sensors"

.....S. Fujimura 177

Special Issue Paper

Boundary Extraction of Uneven Area on LCD Display Using Genetic Algorithm Based on Perceptive Grouping Factors

.....F. Saitoh 178

A Multifunctional Sensor for Automobile Engine Oil Condition Monitoring

.....D.M.G. Preethichandra & K. Shida 184

A Discriminating Method of Three Mixed Tactile Information Using Pressure-Temperature Sensitive Materials

.....J. Yuji & K. Shida 189

Study of Gas/Odor Flow Visualization System Using Array of Pulse Drive Semiconductor Gas Sensors

.....H. Ishida, N. Kushida, T. Yamanaka, T. Nakamoto, & T. Moriizumi 194

Gate Access Control System Using Microwave ID Tag System in Automobile Assembly Plants

.....K. Kozuka, I. Tanahashi, Y. Nishimura, S. Ishikawa, & S. Yamamoto 201

Bi-Beam Position Sensor and Its Application to a Pronunciation Leaning System

.....X. Wang, S. Liu, & H. Shinoda 209

A Harmonics Extraction Filter with Robustness to Pitch and Amplitude Fluctuation

.....K. Nishi & S. Ando 215

A Semiconductor Pressure Sensing System for Monitoring of GIS

.....S. Inoue, M. Kamei, T. Ito, K. Takashima, T. Usami, & A. Jitsumori 221

Paper

X-ray Mask with SiC Membrane for LIGA Process

.....H. Ueno, M. Hosaka, O. Tabata, S. Konishi, & S. Sugiyama 229

The Microassembly Technique for a 3D Single Crystalline Silicon StructureUsing a Polyimide/Chromium Cantilever

.....Y. Watanabe, T. Mineta, S. Kobayashi, & K. Shibata 236

Study on Photo-Cell with an Optical Fiber Coupling as a Power Supply for Micromachine

.....K. Oyama & M. Kimura 242

Development of Plane Irradiation Type Micro Stereolithography Equipment using Optical Fibers

.....Y. Ohtsubo, M. Yamamoto, S. Tadokoro, & T. Takamori 247

Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro Actuators

.....Z. Wang, R. Maeda, & K. Kikuchi 254

Design of High-Performance Latching Type Single-Mode Fiber Switches and Their Characteristics

.....S. Nagaoka 260

MAY 1999 Volume 119-E Number 5

Message from the President of Sensors and Micromachines Society

.....H. Fujita 269

Paper

Effects of Light Intensity and Abscisic Acid on the Light-induced Changes of Electric Potential in Eggplants

.....K. Harada 270

Active Wireless Electrodes for Multichannel Surface Electromyography

.....M. Ohyama, Y. Tomita, S. Honda, H. Uchida, & N. Matsuo 279

Optical Phosphate-Ion Sensor Based on Electrochromism of Metal-Oxide Thin-Film Electrode

.....Y. Shimizu, Y. Furuta, & T. Yamashita 285

Tensile Testing of Insulating Thin Films Using Electrostatic Force Grip

.....T. Tsuchiya & J. Sakata 290

A Discussion on the Relation between substrate Impurity Concentration Fluctuation and Saturated Signal Fluctuation in the Charge Coupled Device Image Sensors

.....T. Kimuara, H. Shiraki, T. Arano, & N. Takatsuka 295

A Method for Measuring the Charge to Mass Ratio of a Spherical Toner Particle

.....Y. Yamamoto, K. Taniguchi, Y. Nakano, H. Yamamoto, & Y. Takahara302

Letter

Delay-Masking Process for Silicon Three-Dimensional Bulk Structures

.....M. Mita, Y. Mita, H. Toshiyoshi, & H. Fujita 310

JUNE 1999 Volume 119-E Number 6

New Application and Further Development of Optical SensingTechnologies and the Related Devices

Special Issue Paper

Birefringence Measurement by Low Coherence Interferometry

.....H. Nishi, S. Inoue, T. Mitsuyama, M. Shimotani, T. Ashizawa,H. Maruyama, M. Ohmi, & M. Haruna 315

Paper

Small Magnetic Levitation System with a Millimetersized Cylindrical Rotor

.....M. Komori & T. Yamane 321

Piezoresistive Force Sensor Utilizing Combination of Three-Axis Stress Components

.....K. Sawa, M. Arai, T. Toriyama, & S. Sugiyama 327

Peristaltic Motion System like Earthworm

.....E. Shinohara, K. Minami, & M. Esashi 334

Stiction Recovery of Micro-cantilevers with Excimer Laser Irradiation

.....K. Fushinobu 340

Odor Sensor Based on Mixed LB Films and Quartz Crystal Microbalance

.....S. Mun~oz, A. Saitoh, & T. Moriizumi 346

Special Issue Letter

Fundamental Study on Emission Characteristics of Near-Axis Scattered Light

.....S. Kidooka, M. Kitama, K. Misawa, J. Arisawa, & K. Shimizu 352

JULY 1999 Volume 119-E Number 7

Paper

Operation Support System Drive by SEM Image for Micro Assembly

.....T.Okusa, M.Nakao, K.Tsuchiya, Y.Hatamura, & T.Sato 359

An Electrostatic Servo-Accelerometer with mG Resolution

.....S.Ko, D.Sim, & M.Esashi 368

Adsorption of Taste Substances to Lipid Membranes of Taste Sensor

.....K.Hayashi, H.Shimoda, S.Matsufuji, & K.Toko 374

Exploration of Highly Sensitive Oxide Semiconductor Materials to Indoor-Air Pollutants

.....M.Kadosaki, T.Terasawa, K.Tanino, & C.Tatuyama 383

Evaluation of Gas Concentrations in a Mixture Using a Logarithmitic Model for a Gas Sensor Response

.....S.Hirobayashi, T.Yamabuchi, & T.Yoshizawa 390

Electrical and Optical Characteristics of a Single Artificial Lipid Membrane for Basic Taste Solutions

.....A.Yokohama, K.Misawa, & J.Arisawa 396

AUGUST/SEPTEMBER 1999 Volume 119-E Number 8/9

Review

Photodiodes Fabricated by Micromachining for Mechatronics

.....K. Hane&M. Sasaki 401

Practical High Sensitivity Hall Elements for Magnetic Sensor by Thin Film Technology

.....I. Shibasaki 405

Paper

Preliminary Study on Rotational Vibrating Disk Gyroscope

.....T. Fujita, K. Hatano, T. Mizuno, K. Maenaka,&M. Maeda 411

A Micro Conveyance Actuator based on Superconducting Magnetic Levitation

.....T. Iizuka&H. Fujita 417

Theoretical Analysis of Optically Addressed Spatial Light Modulator with Electromagnetic Driven Micromirror for Optical Information Processing

.....T. Ohashi, M. Yoshida,&K. Hane 424

Study of Transient Response of QCM Odor/Gas Sensors Coated with Calixarene LB Films

.....S. Mun~oz, T. Nakamoto, T. Moriizumi 430

Immobilization of Biomaterial by Random Fluidic Self-Assembly Method

.....Y. Murakami, K. Idegami, H. Nagai, Y. Morita, A. Yamamura,T. Sakaguchi, K. Yokoyama,&E. Tamiya 436

OCTOBER 1999 Volume 119-E Number 10

Special Issue on ''Micro Total Analysis Systems forChemical and Bio-Chemical Applications''

Preface to the Special Issue on ''Micro Total Analysis Systems for Chemical and Bio-chemical Applications''

.....S.Shoji 447

Special Issue Paper

Development of a Microreactor for PCR

.....S.Kondo, N.Morimoto, K.Hori, E.Shinohara, & Kyoichi Kano 448

Separation of Biomolecules using Dielectrophoretic Chromatography

.....T.Kawabata & M.Washizu 454

Development of Microfabricated Capillary Array Electrophoresis Chip and Direct Observation of Dynamics of DNA Molecules Migrating in Microchannels

.....M.Ueda, O.Tabata, & Y.Baba 460

Manipulation of Micro Air Bubbles in a Flow-Through Cell using US Standing Waves

.....T.Kajiyama, H.Tomita, & Y.Miyahara 464

Handling of Small Volume Droplets using Hydrophobic Microcapillary Vent

.....K.Hosokawa, T.Fujii, & I.Endo 470

Microfabricated Chips for Capillary Electrophoresis on Quartz Glass Substrates

.....T.Nishimoto, H.Abe, M.Kanai, Y.Fujiyama, H.Nakanishi, & A.Arai 476

Micro Capillary Array Chip For DNA Analysis Fabricated by Deep X-ray Lithography

.....T.Fujie, K.Terasoma, O.Tabata, & Y.Baba 482

Paper

Precise Micro-Nanomachining of Silicon

.....M.Esashi, R.Toda, K.Minami, & T.Ono 489

Acoustic Sensing Based on Logarithmic Differential Decomposition (I): AM-FM Feature Extraction Based on Basis Waveforms Decomposition

.....N.Ono, M.Abe, & S.Ando 498

Amperometric Mode of Operation of Bipolar Magnetotransistor Sensors

.....K.Fillyov, Ch.Roumenin, T.Takov, Tz. Tzeneva, & D.Minkov 506

NOVEMBER 1999 Volume 119-E Number 11

Special Issue on ''Biosensors''

Preface to the Special Issue on ''Biosensors''

.....S.Uchiyama 517

Special Issue Review

Current Trends in Biosensor Research

.....M.Aizawa 518

Special Issue Paper

Amplification of SPR Responses for the Immunoreaction using Anti HIV gp41 Antibody by the Method of Molecular Accumulation

.....T.Nishimura, E.Hifumi, K.Shimizu, N.Egashira,&T.Uda 522

Quantitative Expression of Mixed Taste of Amino Acids using Multichannel Taste Sensor

.....K.Toko&T.Nagamori 528

Purification Rate of Epipremnum aureum for Formaldehyde in Light

.....T.Onodera, S.Hirobayashi, H.Kimura,&T.Oyabu 532

Application of Carbon Fiber Modified by Oxygen Plasma Treatment to a Glucose Sensor

.....T.Yamauchi, S.Sato, K.Oshima, M.Shimomura,&S.Miyauchi 538

Effects of Bitter Antibiotics on Electrical Potential Oscillation across a Water/Octanol/Water Liquid Membrane

.....K.Arai, K.Watanabe,&F.Kusu 544

Electrochemical Characterization of Aspergillus Niger-immobilized Carbon Electrode

.....K.Miki, Y.Hattori,&K.Kobayashi 549

Amperometric Glucose Sensor using Glassy Carbon Electrode Anodized in 1, 5-pentanediol as the Base Transducer

.....F.Mizutani&S.Yabuki 554

Glucose Sensor Based on Nickelocene Blended Carbon Paste Electrode-Suppression of Enzyme Leaking from Electrode Surface-

.....S.Toyama, Y.Chisuwa,&Y.Ikariyama 560

The Variation of Harmonics for Difference of Electrode Materials in Nonlinear Dielectric Properties on Yeast Cells

.....H.Yoshitake, M.Muraji, H.Tsujimoto,&W.Tatebe 565

Flow-through Biosensing of DNA-binding Drugs using DNA-Immobilized Carbon Felt as a Reactor

.....Y.Hasebe, T.Yamauchi, M.Arai,&S.Uchiyama 571

Enzyme Coupled Lactose Sensors Based on Bienzyme Membrane Prepared by an Avidin/Biotin Method

.....T.Hoshi, H.Saiki, K.Takeuchi,&J.Anzai 576

Highly Sensitive Detection of Methamphetamine (Stimulant Drug) by using SPR-Based Immunosensor and Kinetic Study of the Immunoreaction on Sensor Element

.....S.Nakata, G.Sakai, T.Uda, N.Miura,&N.Yamazoe 581

Detection of Cyanide Using the Taste Sensor

.....A.Taniguchi, Y.Naito, N.Maeda, Y.Sato, H.Ikezaki,&K.Toko 587

Characterization of the Oxidase-Peroxidase Electrode for the Integrated Miniature Enzyme Electrodes

.....Y.Iribe&M.Suzuki 593

Paper

Study of Ni-W Alloy as a MEMS Material

.....H.Ikeda, S.Ioku, T.Fujita, K.Maenaka,&M.Maeda 598

A Nonlinearity Consideration on Photoelectric Conversion Characteristics in CCD Image Sensor

.....N.Ushijima, T.Kimura,&H.Shiraki 604

DECEMBER 1999 Volume 119-E Number 12

Paper

Active Catheter Using Multi-Link-Joint Structure Fabricated in Silicon Wafer

.....T. Mineta, Y. Watanabe, S. Kobayashi, Y. Haga, & M. Esashi 615

Development of Gene Mapping for Single Chromosomal DNA Molecules

.....Y. Matsui, K. Takashima, S. Katsura, & A. Mizuno 620

Highly Sensitive Measurement of PVA Solution with Multichannel Taste Sensor

.....Y. Hino, K. Toko, T. Nagamori, A. Kawabata, & H. Takeguchi 626

A Proposal and a Feasibility Study of an Interferometric Display Device

.....T. Hatsuzawa, T. Goto, T. Oguchi, & M. Hayase 631

NO2 Sensing Characteristics of Thin Film TiO2

.....Y. Yamada, Y. Seno, Y. Masuoka, & K. Yamashita 636

An SMA Microelectrode for Insect Neural Recording

.....S. Takeuchi & I. Shimoyama 641

Letter

Fabrication of an Inverted Scratch-Drive-Actuator for a Powerful and Precise Conveyance System

.....Y. Mita, D. Collard, M. Mita, & H. Fujita 648

Jan. Feb. Mar. Apr. May. Jun. Jul. Aug./Sep. Oct. Nov. Dec.